Keithley 4200-SCS Reference Manual page 1623

Model 4200-SCS Reference Manual
4.
Figure L-14
CM500 Prober 2 Point Alignment 2
5.
6.
7.
Figure L-15
CM500 Prober 2 Point Alignment 3
8.
9.
10.
11.
Figure L-16
CM500 Prober Set Home icon
4200-901-01 Rev. S / May 2017
Check the Set Point1 checkbox
The Wafer stage will move to the other side as set by the scan distance.
Press the Arrow buttons on the window
point 2.
Check the Set Point2 checkbox
The Prober software will rotate the theta motor for the proper alignment.
Press the Scan Check button to check if the wafer is aligned well.
Press the Fine Align button for a further fine alignment.
After the wafer is aligned, set the HOME die of the wafer and wafermap.
For the wafer:
a. Move the wafer stage to the actual location that needs to be set as HOME.
b. When completed moving wafer stage, press the Set Home icon on toolbar.
Return to
(Figure L-14).
(Figure
(Figure L-15).
Section Topics
Appendix L: Signatone CM500 Prober
L-13) to move wafer stage to reference
L-9