Keithley 4200-SCS Reference Manual page 1600

Appendix K: Cascade Summit-12000 Prober
Figure K-38
Move the Reference Die
10. Click OK.
11. Manually move the wafer to the Reference Die. Then click Yes to set the reference die to
the present position
Figure K-39
Align dialog
NOTE:
12. From the Nucleus UI toolbar, click the Hard Align button
Align dialog.
Figure K-40
Hard Align button
K-20
(Figure
When choosing the reference die:
1) The wafer should be on the chuck and physically in the correct REFERENCE
position.
2) Click the die on the wafer map GUI that will be the reference die.
3) An R appears when a die has been selected as the home die.
Return to
K-39).
Section Topics
Model 4200-SCS Reference Manual
(Figure K-40) to display the Hard
4200-901-01 Rev. S / May 2017