Page 1 Model 4200-SCS Semiconductor Characterization System User Manual 4200-900-01 Rev. K / February 2017 *P4200-900-01K* 4200-900-01K...
Page 3 All rights reserved. Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments. is strictly prohibited. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments.
Page 5 Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages.
Page 6 To maintain protection from electric shock and fire, replacement components in mains circuits - including the power transformer, test leads, and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if the rating and type are the same.
Page 7: Table Of Contents
Table of Contents Model 4200-SCS User’s Manual Table of Contents Section Topic Page Getting Started .................... 1-1 Installation and system connections ............... 1-3 Unpacking the Model 4200-SCS .............. 1-3 Shipment contents ..................1-3 Environmental considerations..............1-4 Powering up the 4200-SCS ..............
Page 8 Table of Contents Model 4200-SCS User’s Manual Project navigator check boxes..............2-21 Executing an individual test ..............2-23 How to display and manage test results ............2-24 Data file management................2-24 How to manage numeric test results in Sheet tab ........
Page 9 How to perform a Charge Trapping test ............3-156 Slow single pulse charge trapping high K gate stack ......3-156 Charge trapping procedure..............3-157 How to Control Other Instruments with the Model 4200-SCS ..4-1 How to control external equipment..............4-2 Controlling external equipment overview..........4-2 Keithley Configuration Utility (KCON) .............
Page 10 Table of Contents Model 4200-SCS User’s Manual Custom file arb waveforms (full-arb)............5-8 Index ..........................I-1 4200-900-01 Rev. K / February 2017...
Page 11: Getting Started
Operating environment ......1-4 Powering up the 4200-SCS ......1-5 Line power .
Page 12 Section 1: Getting Started Model 4200-SCS User’s Manual Standard pulse ........1-27 Segment ARB waveform .
Page 13: Installation And System Connections
Adobe Reader Repacking for shipment Should it become necessary to return the 4200-SCS for repair, carefully pack the entire unit in its original packing carton or the equivalent, and follow these instructions: • Call Keithley Instruments’ repair department at 1-800-935-5595 for a Return Material Authorization (RMA) number.
Page 14: Environmental Considerations
Section 1: Getting Started Model 4200-SCS User’s Manual Environmental considerations Shipping and storage environment To avoid possible damage or deterioration, the 4200-SCS should be shipped and stored within the following environmental limits: • Temperature: -10 °C to +60 °C •...
Page 15: Powering Up The 4200-Scs
Line power The 4200-SCS operates from a line voltage in the range of 100 V to 240 V at a frequency of 50 Hz or 60 Hz. Line voltage is automatically sensed, but line frequency is not (For more information see Reference Manual, Line frequency setting, page 2-16.
Page 16: System Connections
Line power receptacle and line fuses location Line frequency setting The 4200-SCS can be operated either from 50 Hz or 60 Hz power line sources, but it does not automatically sense the power line frequency when it is powered up. You can change the line frequency setting using the KCON utility.
Page 17: Connecting Gpib Instruments
Model 4200-SCS User’s Manual Section 1: Getting Started Figure 1-2 Model 4200-SCS keyboard To use an optional mouse, connect a USB mouse into any of the four 4200-SCS USB ports. Figure 1-3 Keyboard connections Connecting GPIB instruments The 4200-SCS can control one or more external instruments by way of the IEEE-488 General Purpose Instrument Bus (GPIB).
Page 18: Connecting A Probe Station
GPIB Instrument GPIB Instrument 7007 GPIB Cable 7007 GPIB Cable Connecting a probe station A probe station can be controlled through the RS-232 interface connected to the 4200-SCS, as shown in Figure 1-5. Figure 1-5 Probe station connections RS-232 Connector...
Page 19: Connecting A Printer
Printer connections Connecting a LAN The two LAN connectors on the 4200-SCS are standard RJ-45 connectors intended for use with unshielded twisted pair (UTP) cable. For best results, use only CAT 5 UTP cables equipped with RJ-45 connectors to connect your LANs, as shown in Figure 1-7.
Page 20: Model 4200-Scs Hardware Overview
Section 1: Getting Started Model 4200-SCS User’s Manual Model 4200-SCS Hardware Overview DC source-measure unit (SMU) This section provides detailed information about several 4200-SCS hardware components, and is arranged as follows: • Models 4200-SMU and 4210-SMU overview: Discusses 4200-SMU and 4210-SMU basic source and measure characteristics, basic circuit configurations, operating boundaries, and connectors.
Page 21 Model 4200-SCS User’s Manual Section 1: Getting Started Figure 1-8 Basic SMU source-measure configuration 4200-SMU or 4210-SMU 4200-SMU or 4210-SMU I-Measure FORCE GUARD 100kΩ Source Auto Sense Control SENSE Resistors I-Limit V-Limit (Compliance) (Compliance) V-MEASURE SENSE V-Source I-Source SENSE LO GUARD 100kΩ...
Page 22: Smu Terminals And Connectors
Section 1: Getting Started Model 4200-SCS User’s Manual SMU terminals and connectors The locations and configuration of the 4200-SMU and 4210-SMU terminals are shown in Figure 1-9. Basic information about these terminals is summarized below. Refer to the Reference Manual,...
Page 23: Smu With Model 4200-Pa Overview
The remote sense capability of the ground unit should be used instead of the SENSE LO of a SMU. If you need to use the SENSE LO terminal of a SMU, the SENSE LO terminals of all SMUs being used in that 4200-SCS should be connected to the DUT. PA CNTRL connector The PA CNTRL (preamp control) terminal is a 15-pin D connector that provides both power and signal connections to the 4200-PA remote preamp.
Page 24: Dc Preamp
Section 1: Getting Started Model 4200-SCS User’s Manual Figure 1-10 Basic SMU/preamp source-measure configuration 4200-SMU 4200-PA 4210-SMU FORCE FORCE GUARD PreAmplifier PreAmp Control SENSE SENSE GUARD SENSE LO Ground SENSE Unit FORCE DC preamp PreAmp terminals and connectors The locations and configuration of the 4200-PA terminals are shown in Figure 1-11.
Page 25: Force Terminal
Model 4200-SCS User’s Manual Section 1: Getting Started The maximum allowed voltages between the preamp signals are: CAUTION COMMON to chassis ground: 32 V peak • GUARD to COMMON: 250 V peak • SENSE or FORCE to GUARD: 40 V peak •...
Page 26: Multi-Frequency Capacitance / Voltage Unit (Cvu)
(1 kHz to 10 MHz) impedance measurement card that is installed in the 4200-SCS mainframe. The AC test signal (10 mV RMS to 100 mV RMS) can be DC voltage biased from -30 V to +30 V.
Page 27: Measurement Functions
Section 1: Getting Started Most common causes of ABB not locked are: • Mismatched physical cable lengths • Mismatched physical cable lengths versus the programmed cable length in Keithley Interactive Test Environment (KITE) • Improperly torqued SMA cables • Sub-optimal I-range setting •...
Page 28: Test Signal
Section 1: Getting Started Model 4200-SCS User’s Manual Figure 1-13 Vector diagram for impedance (Z) Z = Impedance θ = Phase Angle θ R = Resistance θ X = Reactance   Y = Admittance θ --- - -- - ...
Page 29 Model 4200-SCS User’s Manual Section 1: Getting Started You can also perform a frequency sweep (up or down): • DC bias waveform: The DC bias is set to 0V, but can be set to any valid DC bias level (you specify the number of measurements to perform).
Page 30: Force-Measure Timing
A programmed delay is used in place of the interval. Pulse cards The Keithley Instruments pulse cards are two-channel, high speed, voltage pulse generator cards that provide the following types of output: There are two pulse generator instrument cards available for 4200-SCS: •...
Page 31: About The Pulse Cards
Model 4200-SCS User’s Manual Section 1: Getting Started The 4220-PGU is a 2-channel voltage pulse generator. The Model 4225-PMU is also a 2-channel voltage pulse generator, but includes integrated simultaneous current and voltage measurement with two A/D converters for each channel.
Page 32: Firmware Upgrade For The 4200
The instructions to upgrade the firmware of the 4200-PG2 to KITE V6.2 are available by clicking on the Model 4200-SCS Complete Reference icon on the 4200-SCS desktop. Follow the links for release notes, then look for the firmware upgrade procedure for the pulse card firmware.
Page 33: Segment Arb Waveform
Model 4200-SCS User’s Manual Section 1: Getting Started Segment ARB waveform ® Each channel of a pulse card can be configured to output its own unique Segment ARB waveform. A Segment ARB waveform is composed of user-defined line segments (up to 1024 for the 4205-PG2 or 2048 for the 4220-PGU and 4225-PMU).
Page 34: Full Arb
Section 1: Getting Started Model 4200-SCS User’s Manual High-endurance output relay (HEOR): Each output channel of a pulse card has a high-speed, solid-state output relay. When this relay is closed, the waveform segment is output. When opened, the channel output is electrically isolated (floating) from the DUT. In...
Page 35: Pulse Card Settings
Full arb waveform example KPulse full arb waveforms The Keithley Pulse tool (KPulse) is a virtual front panel software application used to control the optional pulse generator cards. KPulse can be used to create, save and output full arb waveforms, and provides a collection of basic full arb waveform types such as sine, square, triangle, noise, Gaussian, and calculation.
Page 36: Remote Bias Tee (Rbt) And 3-Port Power Divider
Model 4200-SCS User’s Manual Remote bias tee (RBT) and 3-port power divider The 4205-RBT and power divider are used for the Keithley Instrument’s PulseIV-Complete and Demo-PulseIV projects. Two RBT adapters and one 3-port power divider are included with the 4200-PIV-A solution bundle. Also included are two 4200-MAG-BASE mounts (that attach bias tee adapters to the prober platen magnetically).
Page 37: Using An Rbt And Power Divider
Model 4200-SCS User’s Manual Section 1: Getting Started Figure 1-24 3-port power divider Connect to Scope Card SMA Female 16.67W 3-Port Connect to Pulse Power Generator Card 16.67W Divider 16.67W SMA Male Connect Directly to RBT (AC Input) Using an RBT and power divider...
Page 38: Scp2 (Oscilloscope)
2.5 k S / s to 2.5 G S / s (1 channel interleaved) Acquisition time range 250 ns to 3355 s 50 ns to 419 s (2 M sample memory) 1. The ZTEC User’s Manual is on your Model 4200-SCS Complete Reference Product Information CD. 1-28 Return to Section Topics...
Page 39: Scope Card Settings
Reference Manual, Keithley Interactive Test Environment (KITE), page 6-1, for details). For more information about ZTEC, refer to the Model 4200-SCS Complete Reference, ZTEC User’s Manual. Input impedance, input voltage range, and input voltage offset Table 1-3 lists the input impedances, voltage ranges, and voltage offsets that can be set for each input channel.
Page 40 For normal triggering, trigger initiation can be provided by internal and external sources. The scope can be set to be triggered by a leading-edge or falling-edge trigger from the Model 4205-PG2. For more information about trigger and arm controls, refer to the Model 4200-SCS Complete Reference, ZTEC User’s Manual.
Page 41 The scope gathers the necessary number of samples across several triggers. For more information about average equivalent time points command, refer to the Model 4200-SCS Complete Reference, ZTEC User’s Manual. Reference channels Up to four waveforms can be stored in nonvolatile flash memory as reference channels. The stored waveforms are retained when power is removed.
Page 42: Ground Unit (Gndu)
Model 4200-SCS User’s Manual The waveforms for a calculation can be input channels (2) and waveforms that are stored in memory as reference channels (4). For more information about ZTEC, refer to the 4200-SCS Complete Reference, ZTEC User’s Manual, Chapter 2.
Page 43: Ground Unit Dut Connections
Model 4200-SCS User’s Manual Section 1: Getting Started Figure 1-27 Ground unit Internal 4200-SCS connections to each SMU SENSE LO signal SENSE Ground Unit 50kW FORCE CHASSIS COMMON Removable Ground Link Ground unit DUT connections Figure 1-28 shows the connections necessary to use the GNDU in conjunction with a SMU to make full-Kelvin remote sense measurements.
Page 44: Ground Unit Terminals And Connectors
Section 1: Getting Started Model 4200-SCS User’s Manual Figure 1-29 Full-Kelvin preamp/ground unit connections 4200-SMU 4210-SMU 4200-PA FORCE FORCE Note: Not used when PreAmp is attached. SENSE SENSE SENSE LO GNDU FORCE SENSE Ground unit terminals and connectors The locations and configuration of the GNDU terminals are shown in Figure 1-26.
Page 45: Sense Terminal
Model 4200-SCS User’s Manual Section 1: Getting Started SENSE terminal The SENSE terminal is a standard triaxial connector used to apply the ground unit SENSE signal to the DUT in a remote sense application. • The center pin is SENSE •...
Page 46: Connecting Duts
GUARD terminals of the SMUs and preamps should be considered high- voltage, even if they are programmed to a non-hazardous voltage current. Testing with less than ±20 V with SMUs A test fixture equipped with three-lug triax connectors is necessary to connect the 4200-SCS discrete device for testing. Figure 1-31 shows a basic test fixture to use with a two-terminal device.
Page 47: Probers
Model 4200-SCS User’s Manual Section 1: Getting Started The 4200-SCS will function on all current ranges and up to ±20 V without the NOTE interlock being asserted. The maximum voltage on the SMU and preamp terminals is not hazardous when the interlock is not asserted.
Page 48: How To Run A Basic Test
Plug the male end of the line cord into a properly grounded AC line power receptacle. Turn on the Model 4200-SCS by pushing in the POWER switch to the I (in) position. When prompted, simultaneously press Ctrl + Alt + Del.
Page 49 Model 4200-SCS User’s Manual Section 1: Getting Started Figure 1-32 Default project directory From your windows browser, use the following 1. From the File menu, directory path to locate the default.kpr project file: C:\S4200\kiuser\projects\default. click Open Project. 2. Use the...
Page 50: Locate And Run The Vds-Id Test Module
Section 1: Getting Started Model 4200-SCS User’s Manual Figure 1-33 is an example of the KITE interface default project with the vds-id test selected. Figure 1-33 KITE interface default project shown with vds-id test selected Project Navigator Toolbar KITE Workspace...
Page 51: Test Definition
Model 4200-SCS User’s Manual Section 1: Getting Started Test definition The test is defined from the test Definition tab shown in Figure 1-35. As shown in the Definition tab, the device is connected to three SMUs and one Ground Unit (GNDU). In general, SMU3 is used as a voltage step function to provide four different gate voltages (2V, 3V, 4V, and 5V).
Page 52: Run Vds-Id Test
. Also, the ACTIVE indicator light (located on the lower right-hand corner of the front panel of the 4200-SCS will be on while the test is running. When the test is finished, the Run test button turns green.
Page 53: View And Save The Graph Data
Model 4200-SCS User’s Manual Section 1: Getting Started Figure 1-37 Sample data sheet for vds-id test Click to export data** Click to display Settings sheet*. Click to display Data sheet*. Click to display Calc sheet*. * To select more than one sheet for selective printing, hold down the Ctrl key and then click the tab.
Page 54 Section 1: Getting Started Model 4200-SCS User’s Manual Figure 1-38 Sample graph for vds-id test Figure 1-38 you can see that the line colors, line patterns, plot symbols, and line widths are different. To learn how to define the graph line properties see Figure 1-39 below.
Page 55: Firmware Upgrade
When the system software is updated, you should upgrade firmware for each 4200-SCS instrument. Before starting the firmware upgrade, make sure the 4200-SCS is powered by an uninterruptable power source (see warning). Refer to the release notes for detailed instructions on the firmware upgrade of 4200-SCS instruments including the specific versions required for each instrument.
Page 56: Accessing The Release Notes
Section 1: Getting Started Model 4200-SCS User’s Manual Accessing the release notes You can access the release notes by clicking on the Complete Reference icon on the 4200-SCS desktop (refer to Figure 1-42), and then clicking the Release Notes link (see the arrow in Figure 1-43).
Page 57: Model 4200-Scs Software Environment
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Section 2 Model 4200-SCS Software Environment In this section: Topic Page Understanding KITE ........2-3 KITE project structure .
Page 58 Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Opening a Sheet tab ........2-32 Understanding and using the Data worksheet of a Sheet tab .
Page 59: Understanding Kite
The Keithley Interactive Test Environment (KITE) is the main software component of the KTE Interactive software tool set. KITE is the primary user interface for the Keithley Instruments Model 4200 Semiconductor Characterization System (SCS). KITE is a versatile tool that facilitates interactive characterization of an individual parametric test device or automated testing of an entire semiconductor wafer.
Page 60: Graphical User Interface
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual • A sequence of tests for an entire project plan, which may include multiple prober touchdowns for a single semiconductor site (or die): – For one site – For multiple sites •...
Page 61: Project Navigator
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment KITE interface descriptions: Project navigator Where a project plan is assembled, edited, displayed, and executed A project plan defines a series of tests, of various devices, at one or more locations. Double-clicks here open the definition, configuration, and tool screens.
Page 62 Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Figure 2-2 Project navigator Project plan: • Defines and sequences all subsites to be tested. • This node allows resequencing of all subsite nodes. • There is only one project plan per KITE project.
Page 63: Project Defined
As described in context under Sites, each test structure contains a series of devices to be characterized: Transistors, diodes, resistors, capacitors, and so on. A switch matrix is used to connect the Model 4200-SCS sequentially if the SMUs cannot be connected to all devices simultaneously.
Page 64: Itms Versus Utms
UTM tests; you can perform many of your evaluations and recompile it to create a new user module. Keithley with no changes (or very few) to the default Instruments provides the source code for most of the parameters.
Page 65: Defining An Itm
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Figure 2-3 ITMs and UTMs in the project navigator Defining an ITM An ITM is defined by the ITM definition tab (displayed by double-clicking the ITM name in the project navigator) illustrates and explains the ITM definition tab...
Page 66: Defining A Utm
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Figure 2-4 ITM definition tab Graph tab: Graphical Status tab: Test definition test and analysis results. and configuration status. Test Notes tab: Mode box: Timing button and Speed box: Sheet tab: Numerical test and Type in notes about Allows sampling vs.
Page 67: Using The Utm Gui View
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment an edit box, clicking on a drop-down list, or selecting a check box or option button. The UTM GUI view simplifies the presentation of the UTM test parameters by not displaying some of the less- used parameters.
Page 68 Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual information about parameter usage may also be in the Test Notes tab, or in the test device or other graphical illustration area. If a group box has a plus sign (+) in it, then the box is collapsed; click the + to expand the box. A box will only expand when there is sufficient space to show all of the parameters within the group.
Page 69: How To Create Your Own Itms
– Sweeping – Sampling Understanding the ITM forcing functions Table 2-2 summarizes the available ITM “forcing functions,” which tells the 4200-SCS how to apply static or dynamic voltage or current conditions to device terminals. Table 2-2 SMU Forcing function summary...
Page 70 Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Table 2-2 (continued) SMU Forcing function summary General type Name Description and graphical illustrations Sweep Current Increments a series of current values or voltage values at a rate that is determined by the timing and sweep speed settings in the ITM definition tab.
Page 71: Understanding Dual Sweep
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Table 2-2 (continued) SMU Forcing function summary General type Name Description and graphical illustrations Step Current Increments a current or voltage to two or more levels, each of which is held constant during the progress step of a current sweep, a voltage sweep, a current list sweep, or a voltage list sweep at another terminal.
Page 72: Understanding Pulse Mode
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Understanding pulse mode To avoid device overheating in some tests, voltages or currents can be applied to a device only for brief periods at widely spaced intervals. For sweep (linear, log, and list) and bias forcing functions, a SMU can be set to provide pulse output.
Page 73: How To Use The Definition Tab To Configure Itm Parameters
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Figure 2-8 Pulse mode examples: Single and dual sweep Dual Sweep Disabled: (single sweep) Time Stop 4V Time Data Points Time Start 2V Time Time Time Base Voltage 1V Time...
Page 74: Configuring Forcing Functions For Each Device Terminal
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Configuring forcing functions for each device terminal With the definition tab for the ITM open, do the following for each device terminal: On the instrument object for the terminal (Figure 2-4), click the FORCE MEASURE button.
Page 75 Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Figure 2-10 Instrument information, forcing functions, and voltage sweep function parameters Describes the instrument selected for Select whether a sweep or this device terminal and the mode of the step forcing function acts as test being performed.
Page 76 Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Figure 2-12 Measuring Options Check to enable voltage Check to enable current If desired enter measurement options, measurement options, a preferred Check to cause KITE to recording of voltage in the...
Page 77: Basic Test Execution
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Configuring pulse mode With a valid forcing function selected, a SMU can be configured to provide pulse output. Figure 2-13 explains how to use the pulse mode. The settings in the Forcing Functions / Measure...
Page 78: Tests (Itms And Utms)
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Tests (ITMs and UTMs) • A check mark can be inserted or removed for any test. • Inserting a check mark for a test also inserts a check mark for its device plan, its subsite plan, and the project plan.
Page 79: Executing An Individual Test
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Executing an individual test Selecting a test An enabled (check marked) ITM or UTM is selected by clicking the test in the project navigator (see Figure 2-14). The Run Test / Plan button turns green to indicate that the test is enabled and ready to be run.
Page 80: How To Display And Manage Test Results
Data file management Using file and test-result directories KITE application files and test results are stored on the 4200-SCS hard drive by default. However, KITE projects and various other KITE application files can be stored and used on any available hard drive, except CD, CD-R, CD-RW drives and write-protected drives or directories.
Page 81: Default User Director: C:\S4200\Kiuser
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Default user director: C:\S4200\kiuser By default, all of the sample projects and standard libraries included with KTE Interactive are stored in the C:\S4200\kiuser directory, as illustrated in Figure 2-15. This folder, is referred to as the “default user directory.”...
Page 82: Understanding Device Libraries
Each device stored in a Device Library contains the following three types of files: ® ® • A Keithley device (.kdv) file that follows the Microsoft Windows .ini file format. • A small bitmap; 16 x 16 dpi (.bmp) file for the device icon that is displayed in the project navigator.
Page 83: How To Create And Add A New Device
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Figure 2-17 Device files The three files that define the 3terminal-n-fet device How to create and add a new device To create a new device, you must create three files: •...
Page 84: Projects Subdirectory
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Figure 2-18 Contents of the Keithley Device file new-mosfet.kdv Table 2-3 describes each line of the new-mosfet.kdv file that appears in Figure 2-18. Table 2-3 Line-item descriptions for a .kdv file...
Page 85: Tests Subdirectory
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Figure 2-19 KITE project folders The “default” project test results are stored here. For each project, test results files (.xls worksheet and .kgs graph) are stored in a project specific data folder, as illustrated in Figure 2-19.
Page 86 Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual To provide project access to additional test libraries in other directories or to change the KITE test library that appears by default, use the KITE Options window: Select Options in the Tools menu.
Page 87: Usrlib Subdirectory
Manual, Managing user libraries, page 8-39. System directory: C:\S4200\sys All binary and executable files that KTE Interactive needs to control the 4200-SCS are stored in the sys folder (directory). The files stored in the sys folder (directory) must not be modified, not even by NOTE system administrators.
Page 88: How To Manage Numeric Test Results In Sheet Tab
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual How to manage numeric test results in Sheet tab Displaying and analyzing data using Sheet tab The Sheet tab of an ITM or UTM window is used to record and manipulate numerical test data and settings.
Page 89 Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Figure 2-22 Data worksheet of a Sheet tab containing data for multiple sweeps Figure 2-23 Data worksheet of a Sheet tab containing both data and formulator results Formulator results 4200-900-01 Rev. K / February 2017...
Page 90: Understanding And Using The Data Worksheet Of A Sheet Tab
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual NOTE The #REF notation in a cell indicates that a valid value could not be calculated by the formulator. This occurs when a formulator function needs multiple rows as arguments, when a calculated value is out of range, when a divide by zero is attempted, and so on.
Page 91: Understanding The Data-Source Identifier
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Figure 2-24 Displaying a formulator equation using the formula box Click Click / Select Understanding the data-source identifier The ITM or UTM window tab at the bottom of all Sheet tab windows identifies the source of the...
Page 92: Saving A Worksheet
In the Save In edit box of the save as window, select the location for the text file. In the File name edit box of the save as window, Keithley Instruments recommends that you retain the default selection, which contains the data-source identifier (refer to...
Page 93 Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment NOTE You can specify the maximum number of Append executions and worksheets (the maximum value of n). After the maximum number of Append worksheets have been generated, the data from each Append execution replaces the data from the previous Append execution.
Page 94: How To Manage Graphical Test Results In The Graph Tab
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Append executions are not restricted to individual tests. An entire test sequence (device plan or subsite plan) or a project plan may be Append executed “n” times, resulting in “n” separate Append worksheets for each test in the sequence or project plan.
Page 95: Accessing The Graph Tab Windows
Section 2: Model 4200-SCS Software Environment Figure 2-29 Example of an unconfigured Graph tab The vds-id ITM is one of the ITMs that comes installed on your 4200-SCS with sample data, including a configured graph (Reference manual, Figure 6-6). The vds-id ITM has been used for...
Page 96: Understanding The Graph Settings Menu
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Figure 2-30 Graph settings menu The menu, showing Graph Properties The menu submenu • Menu access method II: In the tools menu of the KITE window, select graph settings. The...
Page 97 Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment • Comment: Opens the Comment window, which allows you to add and format a comment. For more information, refer to the Reference Manual, Adding a comment, page 6-272. • Data variables: Opens the Data Variables window, from which you can configure the display of up to four data variables, along with the corresponding names.
Page 98: Defining Data To Be Graphed
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual • Reset: Causes colors, graph size, and graph position to be restored to the defaults. For more information, refer to the Reference Manual, Resetting certain graph properties to KITE defaults, page 6-284.
Page 99: Understanding Buttons In The Graph Definition Window
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment • Column: Lists the parameter’s Data, Calc, or Append worksheet column label (A, B, C, and so on). • X, Y1, and Y2: Are the axes of the graph, as follows: –...
Page 100 Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Figure 2-32 Configured Graph Definition window for a vds-id ITM Click OK. The graph now displays plots of the selected parameters. Figure 2-33, the vds-id graph now displays scaled axes and a series of four plots,...
Page 101: Kite Library Management
Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment KITE library management Submitting devices, ITMs, and UTMs to libraries If you create a customized device or test and wish to reuse it in more than one place in other project plans, you must first submit it to a device or test library.
Page 102 Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Figure 2-35 Subsite plan window containing the device plan to be submitted If you wish to submit the device plan to a Device Library directory other than the default Device Library directory, select the alternate Device Library directory in the Device Library box of the subsite plan window.
Page 103 Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Figure 2-36 Selected device and destination folder Do one of the following: • If you wish to submit the selected device or devices with the original names, click the Submit >> button in the subsite plan window. The selected device or devices is submitted to the chosen folder.
Page 104: Submitting Tests To A Library
Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Submitting tests to a library You may submit one or more ITMs or UTMs to any test library if you submit them with names that do not duplicate test names that are already in the library.
Page 105 Model 4200-SCS User’s Manual Section 2: Model 4200-SCS Software Environment Figure 2-40 Device plan window containing an ITM to be submitted If you want to submit the tests to a test library directory other than the default test library directory, select the alternate test library directory in the Test Library box in the device plan window.
Page 106 Section 2: Model 4200-SCS Software Environment Model 4200-SCS User’s Manual Figure 2-41 Selected ITM and destination folder Do one of the following: • If you wish to submit the selected tests with the original names, click the Submit >> button in the device plan window. The selected tests is submitted to the chosen folder.
Page 107: Common Device Characterization Tests
Why use Pulse IV ........... . 3-26 What PulseIV Packages are available for the Model 4200-SCS ....3-26 Pulse IV for CMOS:Model 4200-PIV-A .
Page 108 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Using the PulseIV-Complete project for the first time ......3-35 Running AutocalScope .
Page 109 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Introduction ............3-95 Theory of operation .
Page 110: How To Perform An I-V Test On My Device
Section 3. Default project overview The Keithley Interactive Test Environment (KITE) default project contains the most common I-V tests a typical user might perform on a regular basis. These tests serve as examples and intended to be copied and modified to work for your own devices.
Page 111: 4- Terminal N-Mosfet Tests
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests 4- terminal n-MOSFET tests By default, the following tests use three source-measure units (SMUs) and one ground unit (GNDU). It is also possible to use four SMUs, one for each device-...
Page 112: Three Terminal Npn Bjt Tests
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Three terminal NPN BJT tests The following tests require three SMUs (see Figure 3-3). Figure 3-3 Three terminal NPN BJT tests Description of three terminal NPN BJT tests: vce-ic: This test runs nested I-V sweeps to generate an n-p-n transistor collector family of curves.
Page 113: Two Wire Resistor Test
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Two wire resistor test By default, the following test uses two SMUs. It is also possible to use one SMU and the GNDU (see Figure 3-4). Figure 3-4 Two wire resistor test...
Page 114: Diode Tests
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Diode tests By default, these tests use two SMUs. It is also possible to use one SMU on the anode and the GNDU on the cathode (see Figure 3-5). Figure 3-5...
Page 115: Connections
Connecting DUTs, page 1-36 Model 4200-SCS Reference Manual, Connections and Configuration, Section In general, the 4200-SCS uses BLACK triax cables for I-V testing, RED SMA cables NOTE for C-V testing, and WHITE SMA cables for pulse testing. 4200-900-01 Rev. K / February 2017...
Page 116: Leveraging The Default Project
All modifications to any KITE Default project will be lost when upgrading the 4200-SCS software to a new version. All customer-created KITE projects and data will not be deleted or modified in any way when upgrading the 4200-SCS software or uninstalling KTE Interactive. See the Model 4200-SCS Release Notes (Installation Instructions) in the Model 4200-SCS Complete Reference for details on all Default KITE projects.
Page 117: Copying Individual Tests Using The Test Library Manager
KITE project. See the How to display and manage test results, page 2-24 or the Reference manual, Keithley Interactive Test Environment (KITE), page 6-1 for further details on managing KITE tests and projects. Figure 3-8 Selecting multiple tests 4200-900-01 Rev. K / February 2017...
Page 118: Changing Kite Startup Behavior
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Changing KITE startup behavior To stop the Default project from opening automatically when starting KITE or to change the project that opens when starting KITE, perform the following steps (see Figure 3-9).
Page 119: How To Perform A C-V Test On My Device
(Definition tab) and tabs for evaluating test results (Sheet, Graph, and Status tabs). The following information explains how to configure an ITM that uses the 4210- CVU. The ITMs provided by Keithley Instruments are documented in Reference manual, C-V project plans, page 15-28.
Page 120 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual ITM timing The ITM Timing window (see Figure 3-11) is used to set measurement speed and the test mode. The ITM Timing window is opened by clicking the Timing button at...
Page 121 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Mode There are two test modes for the 4210-CVU: sweeping and sampling. The sweeping test mode applies to any ITM in which voltage or frequency varies with time. The sampling test mode applies to any ITM in which the forced voltage and frequency are static, with measurements made at timed intervals.
Page 122: Forcing Functions And Measure Options
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Forcing functions and measure options The Forcing Functions / Measure Options (FFMO) window is used to configure the force and measure options for the 4210-CVU. This window is opened by...
Page 123: Setting The Dc Bias Conditions
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-1 Forcing functions: DC bias settings and AC drive settings (continued) FFMO window Forcing Function Test mode DC bias condition AC drive condition ** example CVU voltage list sweep...
Page 124: Test Conditions
Changing the measurement options will change the Column vector names, CAUTION which may then cause any formulator functions to be erased. When using any of the Keithley Instruments-supplied tests or libraries, please leave the measurement option set to Cp-Gp. Test conditions...
Page 125 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-14 Advanced settings for terminal properties Configuration A (default) Use the following settings to source AC drive voltage and DC bias voltage to terminal A and measure AC current at terminal B:...
Page 126: Status
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Status With Status enabled (as shown in Figure 3-12), the following errors will be reported in the sheet and graph tabs when a measurement fault occurs: • ABB fails to lock •...
Page 127: Cvu Itm Examples
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests CVU ITM examples CVU Voltage Bias Figure 3-12 shows an example of a FFMO window with CVU Voltage Bias selected as the forcing function to measure Cp-Gp. The Sampling test mode must...
Page 128: Cvu Voltage Sweep
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual CVU Voltage Sweep Figure 3-17 shows an example of a FFMO window with CVU Voltage Sweep selected as the forcing function to measure Cp-Gp. The Sweeping test mode must be selected for this test (see Figure 3-11).
Page 129: Cvu Voltage List Sweep
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-18 CVU Voltage Sweep output CVU Voltage List Sweep Figure 3-19 shows an example of a FFMO window with CVU Voltage List Sweep selected as the forcing function to measure Cp-Gp. The Sweeping test mode...
Page 130: Cvu Frequency Sweep (Bias)
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual After the built-in system delay and programmed delay, the 4210-CVU makes a measurement. The AC test signal is applied just before the start of the measurement. AC drive is turned off after the measurement is completed.
Page 131 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-21 Forcing Function: CVU Frequency Sweep (bias) When this test is run (see Figure 3-21), the following force-measure sequence occurs: The DC source goes to the PreSoak voltage of 5 V for the hold time period.
Page 132: Cvu Frequency Sweep (Step)
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual CVU Frequency Sweep (step) Figure 3-23 shows an example of a FFMO window with CVU Frequency Sweep (step) selected as the forcing function to measure Cp-Gp. The Sweeping test mode must be selected for this test (see Figure 3-11).
Page 133: How To Perform A Pulsed I-V Test On My Device
= Measure Time How to perform a Pulsed I-V test on my device There are a few ways to perform Pulse I-V testing with the 4200-SCS. One method uses the 4225-PMU with or without the 4225-RPM. The PMU is an integrated solution, with two channels of voltage pulsing and integrated simultaneous voltage and current sampling.
Page 134: What Is Pulse Iv
IV (pulse source with pulse measure) capabilities. What PulseIV Packages are available for the 4200-SCS PIV-A Package – The 4200-PIV-A package provides pulse IV self heating for CMOS SOI for ≤ 45 nm technology node or any device that may benefit from low...
Page 135: Pulse Iv For Cmos: 4200-Piv-A
Pulse IV for CMOS: 4200-PIV-A What is the PIV-A PulseIV Package The PIV-A package is an optional factory-installed kit to the 4200-SCS. The focus for the PIV-A package is testing lower power CMOS transistors that exhibit self- heating or charge trapping effects. Self-heating has been an issue for some...
Page 136: 4200-Piv-A Test Connections
CMOS devices. These tests, as well as initialization steps for scope auto-calibration and cable compensation, are included in a single 4200-SCS test project, Pulse-IV-Complete. There is another Pulse IV test project, Demo-PulseIV. This demo project is a subset of PulseIVComplete and is intended for demonstrating the Pulse IV capabilities using a packaged demonstration DUT.
Page 137: Supplied Tools
Power Divider, Male/Female/Male Connects to Gate side RBT AC IN connector Supplied tools The following tools are supplied with the 4200-SCS or PIV-A package: • #1 Phillips screwdriver • Torque wrench, 8 in./lb, with 5/16 in. head installed The various adapters, cables and hardware used for the pulse projects are shown in...
Page 138: Model 8101- Piv Test Fixture
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-27 Side view of scope card connections Model 8101- PIV test fixture The 4200-PIV-A includes a test fixture and DUTs to verify proper PIV-A setup and operation, and is also useful for troubleshooting.
Page 139: Prober Interconnect
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-28 Model 8101-PIV test fixture Figure 3-29 Model 8101-PIV schematic Prober Interconnect The PIV-A package provides both DC and Pulse capability to the DUT pins without re-cabling or switching. The key to this capability is the RBT which uses passive electrical components to combine the low frequency DC signals with the high frequency pulse signals.
Page 140: Dc Prober Interconnect
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual The cabling from the RBT output is SMA, which will directly connect with RF probe manipulators using the DC probe adapter cables described below. DC Prober Interconnect For DC structures, an adapter cable (4200-PRB-C) is included to convert from the SMA to dual SSMC connections on DC manipulators.
Page 141: Rf Prober Interconnect
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-31 Schematic diagram of the PRB-C adapter cable These SMA to SSMC Y adapter cables are appropriate for on-wafer pulse IV testing of nominally DC structures. Figure 3-32 shows Pulse IV connections from RBTs to DC probes for a DC layout DUT structure, using the PRB-C Y adapter cable.
Page 142 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual • For RF probes, connect the SMA cables from the RBTs to the RF probe manipulators, as shown in Figure 3-33. • To use the supplied 8101-PIV test fixture (see...
Page 143 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-33 Pulse IV connections using RF G-S-G probes Figure 3-34 Pulse IV connections using the 8101-PIV test fixture 4200-900-01 Rev. K / February 2017 Return to Section Topics 3-37...
Page 144: Using The Pulseiv-Complete Project For The First Time
Connect PIV-A as explained above in PIV-A interconnect assembly procedure on page 3-35. If KITE is not running, start KITE by double-clicking the KITE icon on the 4200-SCS desktop. Open the PulseIV-Complete project as follows: a. Click File > Select Open Project.
Page 145: Running Autocalscope
Pulse IV results, the AutocalScope should also be run before the first experiments of the day. To run AutocalScope: The 4200-SCS should be turned on at least 30 minutes before performing any calibration or measurements. Double-click AutocalScope in the project navigator (Figure 3-36).
Page 146: Running Vds-Id Dc Itm
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Click OK on the first dialog box to continue the PulseIVCal (see Figure 3-37, left dialog box). The second dialog box requests that the probe pins be raised from the wafer, breaking contact.
Page 147: Running Vds-Id-Pulse Utm
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests To run vds-id DC ITM: Double-click the vds-id ITM in the project navigator (see Figure 3-36). Click the green Run button. Three vds-id curves will be generated and displayed on the graph.
Page 148: Running Vds-Id-Pulse-Vs-Dc Utm
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-40 Default Definition tab and GUI For vds-id-pulse Running vds-id-pulse-vs-dc UTM The default settings are the same as the vds-id-pulse UTM, with the addition of the DC measurement parameters (see...
Page 149: Running Vgs-Id Dc Itm
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Running vgs-id DC ITM The default settings sweep the pulses on the gate from 0-2 V in 50 mV steps and set the drain voltage to 1 V (see Figure 3-42).
Page 150: Running Vgs-Id-Pulse-Vs-Dc Utm
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-43 Default definition and typical graph for vgs-id-pulse Running vgs-id-pulse-vs-dc UTM Instead of using the separate vgs-id ITM and vgs-id-pulse UTM to compare DC and pulse Vg-Id results, the vgs-id-pulse-vs-DC UTM combines both DC and...
Page 151: Running Scope-Shot
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Running scope-shot The scope-shot test is used to verify proper connection and system setup. The waveform shown in Figure 3-45 is a typical result; actual results should be similar. If waveform has significant ringing or overshoot, the pulse IV tests will not provide good results.
Page 152: Tips For Using Pulse Iv
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual PulsePeriod Vgs pulse period. When using the Pulse IV setup with RBTs, use a PulsePeriod 1000 x PulseWidth, to keep the pulse duty cycle less than or equal to 0.1%. For most cases, it is best to use 200 E-6, which will allow an appropriate duty cycle across the range of supported 40-150 ns pulse widths.
Page 153: Comparing Dc And Pulse Results
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests processing, such as curve fitting, may be required to obtain roughly equivalent results. Comparing DC and pulse results There are two methods for comparing DC and Pulse IV results. The first method uses the UTMs that combine pulse and DC tests: Vds-id-pulse-vs-dc, vgs-id- pulse-vs-dc.
Page 154 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-46 Highlighting all entries in vds-id data sheet Entries Selection Cell - Click to select all entries. Figure 3-47 Data from vds-id pasted into vds-id-pulse calc sheet 3-48 Return to Section Topics 4200-900-01 Rev.
Page 155: Pulse Iv Utm Descriptions
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-48 Graph Definition dialog box and resulting graph that shows the three added curves Pulse IV UTM descriptions The pulse IV user library contains modules required to provide low duty cycle pulsed IV testing.
Page 156: Cal_Pulseiv
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual cal_pulseiv Description The cal_pulseiv module is used to perform a cable compensation routine for the 4200-PIV package. This routine permits the system to compensate for losses in the cabling from the 4200 to the connection to the DUT. Use this routine during initial system setup and whenever changes are made in any part of the interconnect (cables, 4200-RBTs, probe manipulators or pins).
Page 157: Vdsid_Pulseiv
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-6 Return values for cal_pulseiv Value Description -13001 Array Sizes Do Not Match -13002 Arrays Not Large Enough For Data -13003 Invalid Instruments -13004 Unable To Malloc Memory -13005...
Page 158 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Table 3-7 (continued) Inputs for vdsid_pulseiv (continued) Input Type Description VdStep double The sweep step size for the Vd sweep, output by the DrainSMU (defined below). PulseWidth double The Vgs pulse width (PW). The PW can be 40 ns to 150 ns (10 ns resolution).
Page 159: Vdid_Pulse_Dc_Family_Pulseiv
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-9 Return values for vdsid_pulseiv Value Description Invalid value for Vgs Invalid value for VdStart Invalid value for VdStop Invalid value for VdStep Invalid value for PulseWidth Invalid value for PulsePeriod...
Page 160 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Set the appropriate values for the Vds-Id parameters. Inputs, outputs and returned values are provided in Table 3-10, Table 3-11 Table 3-12. Table 3-10 Inputs for VdId_Pulse_DC_Family_pulseiv Input Type Description...
Page 161 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-10 (continued) Inputs for VdId_Pulse_DC_Family_pulseiv (continued) Input Type Description GateSMURange The current measurement range to be used for the SMU on the DUT Gate terminal. Values correspond to the table below. Limited Auto means that the value given is the minimum measurement range used, with automatic ranging for larger currents.
Page 162 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Table 3-10 (continued) Inputs for VdId_Pulse_DC_Family_pulseiv (continued) Input Type Description DrainSMU char * The SMU used for the Drain. This can be SMU1 up to the maximum number of SMUs in the system. This is the SMU that applies the DC bias to the DUT drain during the sweep.
Page 163: Vgsid_Pulseiv
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-12 Return values for Vdid_Pulse_DC_Family_pulseiv (continued) Value Description Invalid VPUId Invalid GateSMU Invalid DrainSMU Unable to initialize PIV solution Invalid GateSMU Range Invalid DrainSMU Range vgsid_pulseiv Description The vgsid_pulse sweep is used to perform a pulsed Vg-Ig sweep using the 4200- PIV package.
Page 164 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Table 3-13 Inputs for vgsid_pulseiv (continued) Input Type Description GateRange double The voltage measure range for the scope channel measuring the Gate. Use 0 for scope autoranging, or specify a voltage value for a fixed range.
Page 165: Vgid_Dc_Pulse_Pulseiv
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-15 Return values for vgsid_pulseiv (continued) Value Description Invalid value for PulseWidth Invalid value for PulsePeriod Invalid value for AverageNum Invalid value for LoadLineCorr Array sizes do not match...
Page 166 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Table 3-16 (continued) Inputs for Vgid_DC_Pulse_pulseiv (continued) Input Type Description VgStop double The final step value for Vg. For DC only sweeps, VgStop must be between -200 V to +200 V dependent on the type of SMU and the current requirements of the DUT.
Page 167 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-16 (continued) Inputs for Vgid_DC_Pulse_pulseiv (continued) Input Type Description DrainSMURange The current measurement range to be used for the SMU on the DUT Drain terminal. Values correspond to the table below. Limited Auto means that the value given is the minimum measurement range used, with automatic ranging for larger currents.
Page 168 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Table 3-17 Outputs for Vgid_DC_Pulse_pulseiv Output Type Description DrainI_DC/Pulse double The measured drain current from channel 2 of the 4200-SCP2 or the DrainSMU. In the case of Pulse, this current is determined by Ω...
Page 169: Scopeshot_Cal_Pulseiv
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests scopeshot_cal_pulseiv Description The scopeshot_cal_pulseiv routine is used to display a single Pulse IV scopeshot_pulseiv. This routine is useful to understand the basic source and measure concepts behind the Pulse IV methods for pulse vds-id and vgs-id.
Page 170: Scopeshot_Pulseiv
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Table 3-20 Outputs for scopeshot_cal_pulseiv Output Type Description Time double * Array of time values from the 4200-SCP2 scope (s). GatePulse double * Array of gate pulse voltages from channel 1 of the 4200-SCP2 scope.
Page 171 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-22 Inputs for scopeshot_pulseiv Input Type Description RiseTime double The gate pulse transition rise time (s). This can be set from 10 e-9 to 300 e-9 in 10 e-9 (10 ns) steps. This value programs the full transition time (0–100%), not the 10–90% time.
Page 172: Vdsid_Pulseiv_Demo
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Table 3-24 Return values for scopeshot_pulseiv Value Description Invalid Pulse Width (minimum 40 ns) Invalid Pulse Period (minimum 40 ns) Invalid Average Num (1 to 1000) Array Sizes Do Not Match Invalid VPU.
Page 173: What Is The Piv-Q Package
PMU and RPM for Pulse I-V testing. What is the PIV-Q package The PIV-Q package is an optional factory-installed kit to the 4200-SCS. The focus for the PIV package is testing RF FETs that exhibit self-heating or charge trapping effects (also called dispersion).
Page 174: How To Perform Reliability (Stress-Measure) Tests On My Device
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual How to perform reliability (stress-measure) tests on my device Connecting devices for stress / measure cycling Devices that are stress / measure cycled in parallel are connected through a switch matrix.
Page 175: Overview Of The Cycling-Related Tabs
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Overview of the cycling-related tabs When you double-click the name of a subsite, KITE displays the tabs shown in Figure 3-50. Use the Subsite Setup tab to configure cyclical tests, the Subsite Data tab to view test results numerically, and the Subsite Graph tab to view results graphically.
Page 176: Configuring The Subsite Setup Tab
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Configuring the Subsite Setup tab To set up cyclical testing, configure the Subsite Setup tab as shown in steps A through E below. Step A: Enable cycling Figure 3-52 Enabling cycling...
Page 177 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-54 Specifying timing (linear and log) for stress / measure mode Want logarithmic or linear stress Linear: After first Log: After first stress cycle all tress stress cycle, all stress times increase logarithmically.
Page 178: Step C2: Specify Number Of Cycles (Cycle Mode Only)
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-55 Specifying timing (List) 1) Select List. 2)Enter a Stress Time. 3)Click the Add button to add the stress time to the Stress Times list. 4)Repeat steps 2 and 3 to add more stress times to the list.
Page 179: Step E: Update And Save The Subsite Setup Configuration
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-57 Setting periodic test intervals For the particular example at left, these were the Stress Times before entering a Periodic Test Interval. In the Rate (s) field, enter the...
Page 180: Configuring Device Stress Properties
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Configuring device stress properties Properties for device stressing are set from the Device Stress Properties windows (see Figure 3-59). This window is opened by clicking the Device Stress Properties button on the Subsite Setup tab. The button is shown in Figure 3-51.
Page 181: Setting Ac Stress Properties
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-25 Setup steps for the first device in the Subsite Plan (continued) Step Description Use the lists to control Stress Measurements. Options include: • Do Not Measure • First Stress Only •...
Page 182 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual NOTE If the gate is connected to Channel 1instead of the VPU, the pin assignment must be set to 1. – The 1 pin assignment, and the unchecked box for VPU indicates that the drain is connected to SMU1.
Page 183 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-60 AC stress properties settings Figure 3-61 VPU common settings window 4200-900-01 Rev. K / February 2017 Return to Section Topics 3-77...
Page 184: How To Perform Ac Stress For Wafer Level Reliability (Wlr)
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual How to perform AC stress for wafer level reliability (WLR) AC, or pulsed, stress is a useful addition to the typical stress-measure tests for investigating both semiconductor charge trapping and degradation behaviors.
Page 185 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-63 AC Pulse stress-measure—hardware matrix card simplified schematic 4200-SCS 4200-SMU (1) 4200-SMU (2) 4200-SMU (3) Pulse Generator 4205-PG2 Drain Substrate Gate Source 4200-900-01 Rev. K / February 2017 Return to...
Page 186 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-64 AC Pulse stress-measure—hardware connections KEITHLEY 708A SWITCHING SYSTEM 1 2 3 4 5 6 7 8 9 10 11 12 TALK Black BNC Cable LSTN COPY (male-to-male) OPEN...
Page 187: Device Stress Properties Configuration Notes
One or two device terminals can also be stressed with AC voltage by each Keithley Instruments pulse card. Each pulse card has two output channels allowing two devices to be stressed by AC voltage. Current stressing: When setting the current stress level for each device in the subsite...
Page 188 SMUs: If your voltage stress system is using a switch matrix, the 4200-SCS will try to maximize the amount of SMU sharing in order to allow parallel testing. It determines what pins can share SMUs in the following fashion.
Page 189 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests For example, if you have set the terminals to the settings in the following table, on stress, source is powered on first, gate second, drain third, and bulk fourth. Power off for the stress is in the order drain, gate, source and bulk.
Page 190 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-66 Example of “First Stress Only” measurement 10.00 41.8017E-10 Drop-down menus to control Stress Measurements. Do Not Measure: Do not Make the specified measurement. First Stress Only: Take the specified measurement on the first stress cycle only.
Page 191: Segment Stress / Measure Mode
• During a measure phase, the SMUs perform DC measurements on the DUT. ® • During a stress phase, the Keithley pulse card provide stress using Segment ARB waveforms, and the SMUs provide voltage bias and current limit. There are no measurements performed during the stress phase.
Page 192: Segment Arb Stressing
During a stress phase, the matrix shown in Figure 3-67 connects the channels of the Keithley pulse card to the drain and gate of the DUT. The pulse generator stresses the drain and gate by outputting Segment ARB waveforms.
Page 193: Segment Stress / Measure Mode Configuration
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-68 Segment stressing: Stress phase example Pulse Card Drain Pulse Card Substrate 4200-SMU (1) 4200-SMU (2) Gate Source Segment Stress / Measure Mode configuration The Segment Stress / Measure Mode is configured from the subsite setup tab.
Page 194 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Select Enable Cycles. Select the Segment Stress / Measure Mode. Select and configure Stress / Measure Cycle Times: Linear cycle counts: After setting the first and total stress counts, and the number of stresses, the linear Stress Counts will be automatically calculated and displayed when Apply is clicked (Step 5).
Page 195: Configure Device Stress Properties
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Configure Device Stress Properties To configure the device stress properties for the Segment / Stress Measure Mode (see Figure 3-71): Figure 3-71 Segment Stress / Measure Mode: Device Stress Properties Active Site selection: •...
Page 196 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual NOTE A setting of 0 indicates no connection to the DUT (PG2-1 Channel not used). SMU settings: • A DC bias voltage and current limit is set for each SMU being used in the stress test: –...
Page 197: Executing Subsite Cycling
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Executing subsite cycling With the Subsite Plan in the project navigator selected and enabled, subsite cycling is started by clicking the Run Test/Plan and Cycle Subsites button (see Figure 3-72): •...
Page 198 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-73 Subsite Data sheet: Cycle Mode 291.1666E-15 2.2350E-3 2.9236E-3 4.8939E-12 293.2366E-15 2.2360E-3 2.9259E-3 4.8436E-12 290.9966E-15 2.1390E-3 2.9186E-3 4.8989E-12 289.1465E-15 2.2325E-3 2.9200E-3 4.8900E-12 Output Value readings Output Value readings from test named IgLeak from test named Id The above subsite data is for device 4terminal-n-fet.
Page 199 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests % Change = ABS[(Post-Stress Rdg: Pre-Stress Rdg) / Pre-Stress Rdg x 100] For the example in Figure 3-74, the following shows how % Change IDOFF for Cycle 2 is calculated: % Change IDOFF= ABS[(82.2013e-15: 291.1666e-15)/291.1666e-15 x...
Page 200: Settings Window
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-74 Subsite Data sheet: Stress / Measure Mode The above subsite data is for device 4terminal-n-fet. For a multi-device Subsite Plan, there would be a separate tab for each device. The data for other devices are displayed by clicking the corresponding label.
Page 201 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-75 Subsite Data: Settings window for Cycle Mode Subsite cycling setup 4200-900-01 Rev. K / February 2017 Return to Section Topics 3-95...
Page 202: Subsite Cycling Graphs
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-76 Subsite Data: Settings window for Stress / Measure Mode Subsite cycling setup Output Values and Target information: Lists Output Values Identifies enabled Targets Lists the Target % Values...
Page 203: Stress/Measure Mode
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-77 Subsite graph tab: cycle mode NOTE For a single-device subsite plan, the Device select buttons and the checkbox to Overlay All Devices are disabled. For a single-test subsite plan, the Test select buttons are disabled.
Page 204: Configuration Sequence For Subsite Cycling
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-78 Subsite Graph tab: Stress / Measure Mode NOTE For a single-device subsite plan, the Device select buttons and the checkbox to Overlay All Devices are disabled. For a single-test...
Page 205 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Select the Output Values to be exported to the subsite data sheet for interstressing monitoring. • To select output values, click the Output Values button in the ITM or UTM Definition tab.
Page 206: How To Perform A Flash Memory Test On My Device
How to perform a flash memory test on my device Introduction There are several projects included with the 4200-SCS FLASH package that facilitate testing of floating gate transistors (NOR, NAND), as well as other types of Non-volatile Memory (NVM). The package consists of two pulse cards (four...
Page 207 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-80 Cross section of a floating gate transistor in both the erased and programmed states Floating Gate Tunnel Oxide - - - Erased state Programmed state Figure 3-81 Graph of shifted voltage threshold, V...
Page 208 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-82 shows examples of tunneling to move charge to and from the FG. • The electric field and the preferred direction of electron flow are indicated by the black arrows.
Page 209 (1) to fully erased (0). The 4200-SCS FLASH package does not include the ability to measure the pulse waveform or pulse response.
Page 210 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-84 Block diagram of an example flash test setup using a switch matrix Figure 3-85 Block diagram of a flash test setup without using a switch matrix (direct connect)
Page 211 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests The pulse waveforms are a program pulse (see Figure 3-86), an erase pulse (see Figure 3-87), or a waveform made up of both program and erase pulses (see Figure 3-88). All of these waveforms are implemented by using the Segment ®...
Page 212: Endurance Testing
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-88 Program + Erase pulse waveforms for a floating gate DUT, with separate pulse waveforms for the DUT gate, drain, source, and bulk. The block diagram for the Flash setup is shown in Figure 3-89.
Page 213: Disturb Testing
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests The endurance test is performed a set number of program and erase cycles (see Figure 3-88), while periodically measuring V for both the programmed and erased state. Figure 3-90 shows typical degradation on a NOR cell for both V and V as the number of applied program/erase cycles increases.
Page 214: Using A Switch Matrix
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Disturbed cell testing – The outputs for the PG2s are turned off and their output relays are opened. SMU1 and SMU2 are then used to perform a DC Vg-Vd sweep...
Page 215: Pulse Waveforms For Nvm Testing
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Pulse waveforms for NVM testing A pulse card has several attributes that support NVM testing. To perform the multi-level pulse waveforms for the typical program / erase waveform (see Figure 3-88), each pulse card channel has the Segment ARB capability.
Page 216 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual – Hold down the Shift key while using the cursor arrow keys to highlight all the cells in ® the Segment ARB waveform. – Press Ctrl-c to copy. c. Place the entry cell into an undefined channel (Row 1, Start (V) column) and press Ctrl-v to copy.
Page 217 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Table 3-28 Segment ARB parameter values for example waveforms PMU1 Channel 1 Segment Start V Stop V Time (s) Trigger HEOR* 20.00 E-8 50.00 E-4 20.00 E-8 10.00 E-4 20.00 E-8 5.00 E-2...
Page 218 Enter the channel names for the number of channels specified above. • The names are VPUnCHm, where n is the number of the VPU card (numbered right to left when viewing the back of the 4200-SCS chassis) and m is the channel number (one or two), resulting in VPU1CH1,VPU1CH2.
Page 219 The interconnection information below is for a typical two card (4 pulse channel) 4200-SCS FLASH configuration, using four Source Measure Units (SMUs). In addition to the cabling there are corresponding parameters in the Segment ARB table that must be set. This is also covered in the...
Page 220 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-93 Flash-NAND Project Definition Tab, including arrows for the 6 input arrays Figure 3-94 Flash-NAND pulsevoltages array entry and prepulsedelays entry Pulsevoltages array PrePulseDelays array 3-114 Return to Section Topics...
Page 221: Flash Connections
Also included is an 8 in-lb torque wrench for tightening the SMA connections. The 4200-SCS Flash package has four channels of multi-level pulse capability. The number of SMUs is configurable. For a system without switching, it is best to have four SMUs, to match the number of pulse channels to connect to a three or four terminal DUT.
Page 222 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-95 Flash connections – program/erase and endurance testing using direct connection to a single, stand-alone 4-terminal device 5' (1.5 m) 5' (1.5 m) 4200-SMU/ 4210-SMU Force 5' (1.5 m) 4200-SMU/ 5' (1.5 m) BNC...
Page 223 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-96 shows connections to an array test structure, where one of the four SMU+PG2 channels was split to provide a total of five test signals to provide the minimum necessary channels for the select pins (Bit Line Select, Bit Lines 1 and 2), to the pulse DUT (circled in blue), and the measure DUTs (circled in dashed purple).
Page 224 SMA male to BNC female SMU: BL1 probe manipulators . Instrument Connectors Triax female to BNC female LEMO Triax Connector SMA Connector Figure 3-98 Supplied items for 4200-SCS Flash package 3-118 Return to Section Topics 4200-900-01 Rev. K / February 2017...
Page 225 Pre-torquing eliminates any non-axial stress on the bulkhead connectors on the SMU or pulse cards, which could cause damage to the cards installed in the 4200-SCS chassis, requiring repair. To remove the LEMO triax-to-SMA adapter from a SMU, pull on the knurled silver portion of the connector to release the latches and permit the adapter to separate from the SMU connector.
Page 226: Direct Connection To Single Dut
These instructions are compatible with the following projects in the Projects\_Memory folder: • Flash-NAND • Flash-NOR • FlashDisturb-NAND • FlashDisturb-NOR • FlashEndurance-NAND • FlashEndurance-NOR Set up the 4200-SCS, referring to the Getting Started, page 1-1, Reference manual, Installation, page 2-1, and Reference manual, Connections and Configuration, page 4-1.
Page 227: Direct Connection To Array Dut For Disturb Testing
• FlashDisturb-NOR • FlashEndurance-NAND • FlashEndurance-NOR NOTE In all of the following steps, when necessary torque both connections using the wrench. Set up the 4200-SCS, referring to the Getting Started, page 1-1, Reference manual, Installation, page 2-1, and Reference manual, Connections and Configuration, page 4-1.
Page 228: Switch Matrix Connection To Array Dut
• Flash-Switch • FlashDisturb-Switch • FlashEndurance-Switch Unlike the direct connect methods described above, the use of a switch matrix permits the use of SMU preamp. Set up the 4200-SCS, referring to the Getting Started, page 1-1, Reference manual, Installation, page...
Page 229 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Connect this assembly to the right-most PG2 card, that is, the PG2 card in the lowest numbered slot. First connect one of the SMA cables to TRIGGER OUT and connect the SMA tee to TRIGGER IN.
Page 230: Memory Projects
Each type of project has three different sets of defaults for common setups: • NAND device (direct connect) • NOR device (direct connect) • Switch (using a Keithley 707A/708A switch matrix and compatible cards). This results in the projects in the Projects\_Memory folder shown in Figure 3-100.
Page 231 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests program and erase state dependencies on pulse parameters. There are three different waveform types available: • Program Erase • Fast Program • Erase The Program waveform and Erase waveform output pulses with a single set of...
Page 232: Nvm_Examples
The difference between the Flash-NAND and Flash-NOR are the typical pulse widths and levels specific to the DUT type. The Flash-switch is a generic example of the Flash testing described above, but adds support for an external Keithley switch matrix.
Page 233 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-102 Parameters for Program or Erase UTMs (using single_pulse_flash module) PulseWidths PulseVoltages PrePulseDelays PostPulseDelays TransitionTimes Figure 3-103 Parameters for Fast Program-Erase pulse waveform (using double_pulse_flash module) Pulse1Widths Pulse2Widths Pulse1Voltages...
Page 234 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Erase test – This test uses the partially pre-defined waveform shown in Figure 3-102 to erase a flash memory device. Figure 3-105 shows the Definition tab. Figure 3-105 Flash-NAND project – Erase definition tab Fast-Program-Erase test –...
Page 235 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests SetupDC test – The Definition tab for this test is shown in Figure 3-107. This test isolates the VPU outputs from the DUT, allowing the SMUs to perform a DC without signal interference from the pulse outputs.
Page 236: Flash-Nor Tests
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-108 Flash-NAND project – Vt-MaxGm definition tab Program-8 test – This test uses Segment ARB waveforms to program an 8- terminal flash memory device. ® Erase-8 test – This test uses Segment ARB waveforms to erase an 8-terminal flash memory device.
Page 237 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-109 Flash-Switch project ConPin-Pulse or ConPin-DC test – This test is used to connect pulse or SMUs to the DUT. Figure 3-110 shows the definition tab for ConPin-Pulse. The parameters are typed into the UTM parameter table, with the Pin1, Pin2, and so on determining where the instrument (SMU, VPU) signals connect.
Page 238 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-110 ConPin-Pulse test Definition tab Figure 3-111 ConPin-Pulse test GUI definition dialog 3-132 Return to Section Topics 4200-900-01 Rev. K / February 2017...
Page 239: Running Any Flash Project For The First Time
Running any Flash Project for the first time. If KITE is not running, start KITE by double-clicking the KITE icon on the 4200-SCS desktop. Open the appropriate KITE Flash project. a. Within KITE, click FILE > Open Project. If the dialog window is not displaying the _Memory folder, move up one or two levels to the display the Projects directory.
Page 240: Running The Program Or Erase Utm
Enter which pulse channels will be used into PulseTerminals. This is a string of channels, in the form VPU1CH1,VPU1CH2,VPU2CH1,VPU2CH2. VPU1 is the 4205-PG2 in the lowest- numbered slot (right-most slot when looking at back of 4200-SCS chassis). a) The characters are all capitalized and each channel is separated by a comma.
Page 241 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests a) PulseVoltages: Use a positive value for a waveform similar to Figure 3-102. If a negative pulse is required, use a negative voltage value. To put a pulse channel into a disconnected, or high impedance, state, use -999.
Page 242: Running The Fast-Program-Erase Utm
VPU1CH1,VPU1CH2,VPU2CH1,VPU2CH2. VPU1 is the 4205-PG2 in the lowest- numbered slot (right-most slot when looking at back of 4200-SCS chassis). The characters are all capitalized and each channel is separated by a comma. No spaces are allowed in the PulseTerminal string.
Page 243: Running The Setupdc Utm
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests NOTE The SMA tees on each of the top three SMUs that incorporate both a pulse channel and a SMU signal into a single cable to a DUT terminal. Supplying the shared SMU information allows the software to open the SMU relay during the pulse output, which is necessary to permit good pulse fidelity.
Page 244: Running The Conpin-Pulse Or Conpin-Dc Utm (Switch Projects Only)
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Running the ConPin-Pulse or ConPin-DC UTM (Switch projects only) This test routes the desired pulse or SMU signals to the DUT by closing switches on a switch matrix card. See Switch matrix connection to array DUT connection and switch matrix setup instructions.
Page 245: Flashendurance-Nand Tests
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests described above, but adds support for an external Keithley switch matrix. Example results for the Endurance tests are shown in Figure 3-113 Figure 3-90. FlashEndurance-NAND tests FlashEndurance-NAND tests consist of the following test: •...
Page 246 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-113 FlashEndurance-NAND project – Subsite Plan tab Figure 3-114 FlashEndurance-NAND project – Device Stress Properties 3-140 Return to Section Topics 4200-900-01 Rev. K / February 2017...
Page 247 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-115 FlashEndurance-NAND project – Subsite Graph tab Program test – The Definition tab for this test is shown in Figure 3-116. This test ® uses a partially predefined Segment ARB...
Page 248 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-116 FlashEndurance-NAND project – Program Definition tab SetupDC-Program test – The Definition tab for this test is shown in Figure 3-117. This test isolates the VPU outputs from the DUT. It does this by opening the HEOR for each VPU channel.
Page 249 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-117 FlashEndurance-NAND project – SetupDC Definition tab Vt-MaxGm-Program test – This test is used to perform a DC voltage sweep on the gate of the DUT and measure the drain current at each sweep step. The...
Page 250 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-118 FlashEndurance-NAND project – Vt-MaxGm-Program Definition tab Figure 3-119 FlashEndurance-NAND project – Vt-MaxGm-Program Graph tab 3-144 Return to Section Topics 4200-900-01 Rev. K / February 2017...
Page 251: Flashendurance-Nor Tests
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests ® Erase test – This test uses Segment ARB waveforms to program a flash memory device. The default Definition tab for this test is shown in Figure 3-120. Figure 3-120 FlashEndurance-NAND project –...
Page 252: Running A Flashendurance Or Flashdisturb Project
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual VPU channels will not be inadvertently connected to a device terminal when the SMU testing is performed. Figure 3-121 FlashEndurance-Switch project Running a FlashEndurance or FlashDisturb project This section explains how to use the following Flash projects: •...
Page 253 Projects directory. Double-click the _Memory folder, then double-click the appropriate Flash test folder, then double-click the appropriate *.kpr file to open the 4200-SCS Flash project. KITE should resemble Figure 3-116.
Page 254: Running Endurance Or Disturb Looping
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual The following link to procedures for these UTM and ITM tests: Running the Program or Erase UTM Running the Fast-Program-Erase UTM Running the SetupDC UTM Running the Vt-MaxGm ITM Running the ConPin-Pulse or ConPin-DC UTM (Switch projects only) Running endurance or disturb looping The Endurance or Disturb testing is essentially a stress / measure test.
Page 255: Flashdisturb Tests
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Before running the test for the first time, it is recommended to try out the project on a scrap device: a) Ensure that the project navigator is showing the FlashEndurance entry highlighted,...
Page 256 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual The Segment ARB waveform files (Flash-NAND-Vg.ksf and Flash-NAND-Vd.ksf) used for stressing are loaded into the device stress properties window shown in Figure 3-123. The stress properties window is opened by clicking the Device...
Page 257: Explanation Of Flash Utm Parameters
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Explanation of flash UTM parameters NumPulseTerminals(int) The number of pulse terminals, or pulse channels, to use for the test. The number of pulse terminals ranges from one to eight. PulseTerminals(char *) A string representation of all the VPU channels being used in the test, matching the number given in NumPulse.
Page 258 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual PrePulse2Delays(double) Array of time values used as a delay before the second pulse is output. This delay happens after the PostPulse1Delays. Valid values range from 20 ns to 1 s in 10 ns increments (s).
Page 259: Error Codes
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests SharedPulseTerminals(int) Number of pulse channels that are paired with a SMU. This parameter is used with SharedPulseTerminals. Figure 3-89 Figure 3-95 for examples of a SMU and VPU sharing a cable to a DUT terminal.
Page 260: Troubleshooting
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Troubleshooting Check the Error codes for additional information. No pulse output If pulses are not being output, please check the following: Ensure proper cabling. The trigger interconnections between the pulse cards must match...
Page 261: How To Perform Charge Pumping
CP results can be used to determine the amount of degradation caused by typical reliability test methods, employing either DC or pulsed stress. The 4200-SCS provides pre-configured tests to perform Charge Pumping. These tests are included in the KITE project plan for Charge Pumping.
Page 262: How To Perform A Charge Trapping Test
Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual How to perform a Charge Trapping test The chargetrapping project uses the 4205-PG2 pulse generator card and NOTE 4200-SCP2 scope card. The 4225-PMU can also be used for charge trapping (see Reference manual, chargepumping user library, page 16-124).
Page 263: Charge Trapping Procedure
Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Charge trapping procedure Perform cable correction (open and through, if necessary), with calibration substrate. Open and through correction measurements are taken and inputted into correction algorithm to calculate cable losses.
Page 264 Section 3: Common Device Characterization Tests Model 4200-SCS User’s Manual Figure 3-126 Slow single pulse—hardware connection Model 4200-SMU (1) Model 4200-PG2 Model 4200-SMU (2) Scope Card Splitter White SMA Cable (2m, 6ft) Model 4200-SCS (male-to-male) Instrument Slots 1 of 6...
Page 265 Model 4200-SCS User’s Manual Section 3: Common Device Characterization Tests Figure 3-128 Single slow pulse example data plot 4200-900-01 Rev. K / February 2017 Return to Section Topics 3-159...
Page 266 Section 3: Common Device Characterization TestsModel 4200-SCS User’s Manual This page left blank intentionally. 3-160 Return to Section Topics 4200-900-01 Rev. K / February 2017...
Page 267: How To Control Other Instruments With The Model 4200-Scs
Controlling external equipment overview ....4-2 Keithley Configuration Utility (KCON) ....4-5 How to control a switch matrix .
Page 268: How To Control External Equipment
To complete the tutorials in this section and obtain data that functionally correlates with the sample data and projects provided, you will need the following equipment: • 1 - Keithley 4200-SCS with a total of three SMUs (preamps not required) • 1 - Keithley Model 590 CV Analyzer •...
Page 269 User modules are used to access these communication interfaces and control external equipment. User modules are stored in user libraries, which are created and maintained with the Keithley User Library Tool (KULT). For information about creating and maintaining user libraries refer to the Reference Manual, Advanced KULT features, page 8-39.
Page 270 KITE window displaying UTM definition KULT window User library Keithley Instruments provides a number of standard user libraries to control external equipment used in semiconductor characterization applications. Standard libraries of user modules for the following equipment are provided in Table...
Page 271: Keithley Configuration Utility (Kcon)
Instrument Bus (GPIB), probe stations, and so on. You must properly configure the system so that KITE and Keithley External Control Interface (KXCI) can use these resources. Also, if you need remote operation of the Model 4200-SCS, through KXCI, you must further configure the system.
Page 272 Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Figure 4-3 Keithley CONfiguration Utility Overview Internal instruments: Factory- installed SMUs, preamps, 4200- PG2, 4200- SCP2 and ground unit. External Instruments: User-installed Selected instrument for which this configuration information is displayed...
Page 273: How To Control A Switch Matrix
This tutorial demonstrates how to use a switch matrix to connect any instrument terminal to any test system pin automatically. The ivswitch sample project will be used to illustrate this functionality. Before loading and running the ivswitch project, the 4200-SCS, switch matrix, and component test fixture must be connected as illustrated in Figure 4-7.
Page 274 Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual The switch matrix is controlled by the 4200-SCS using the GPIB bus. Use a 7007 GPIB cable to connect the 707 Switching Matrix to the 4200-SCS. For connection details, refer to the...
Page 275: Kcon Setup
Select the KI 707/707A Switching Matrix - MTRX1 item in the configuration navigator (tree control on left side of screen) and add a Keithley 7174 Low Current Matrix Card to Slot 1 of the switch matrix. Add the switch card using the pull-down menu on the Properties tab.
Page 276 Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Figure 4-10 Add a switch card to the system configuration Select the KI 7174 Matrix Card - CARD1 item in the configuration navigator. Connect the...
Page 277: Open Kite And The Ivswitch Project
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Figure 4-12 Save the system configuration Open KITE and the ivswitch project To open KITE and the ivswitch project: On the desktop, double-click the KITE icon to open KITE.
Page 278: Running Test Sequences
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Running test sequences NOTE For detailed information about test and sequence execution, refer to the Reference Manual, Run execution of individual tests and test sequences, page 6-162.
Page 279 Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Figure 4-16 Signal paths for 2-wireresistor tests Resistor SMU1 SMU2 SMU3 GNDU 10 11 12 Figure 4-17 Signal paths for diode tests Diode SMU1 SMU2...
Page 280: The Connect Test
When a UTM is executed, the parameters will be passed from the UTM to the user module and the user module will be executed. User libraries and user modules are created and managed using the Keithley User Library Tool (KULT). For more information about user libraries refer to the Reference Manual, Keithley User Library Tool (KULT), page 8-1.
Page 281: How To Control A Probe Station
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Figure 4-20 Connect parameters for 4terminal-n-fet device Opens all relays Connects SMU1 to pin 3 of test fixture Connects SMU2 to pin 4 of test fixture...
Page 282: Prober Control Overview
Probe Pads Subsite 1 Subsite 2 Prober control overview A probe station, like any other external instrument, is controlled by the 4200-SCS through user modules. Basic system connections are illustrated in Figure 4-1. A library of user modules, called , is provided with the 4200-SCS to facilitate prober control. This generic prober user library,...
Page 283 In all cases, this prober control software provides the ability to define a list of wafer locations to be probed. The Model 4200-SCS relies on the prober controller, and associated software, to maintain this probe list. The...
Page 284: Test System Connections
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Test system connections A typical test system for this tutorial is shown in Figure 4-22. As shown, the 4200-SCS and probe station are connected to a 7174A matrix card. The matrix card is installed in the switch matrix, and the switch matrix and probe station are controlled through the GPIB bus.
Page 285: Kcon Setup
Start KCON. Double-click the KCON icon on the desktop or use the Start menu, and select Start > Programs > Keithley > KCON. Add the Keithley Model 707/707A Switching Matrix to the system configuration using the KCON Tools menu as illustrated in Figure 4-23.
Page 286 Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Figure 4-25 Adding a probe station Connect the instrument terminals and probe station pins to the switch matrix by selecting the KI 7174 Matrix Card - CARD1 in the configuration navigator and configuring it as...
Page 287: Probe Station Configuration
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Probe station configuration Before KITE can begin controlling a probe station, the probe station must be properly configured. The probe station configuration includes: Making test system measurement and communication connections.
Page 288: Open The Project Plan Window
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Open the project plan window In the project navigator, double-click probesubsites to open the project plan window. For this tutorial, five sites on a wafer are to be tested. As shown in...
Page 289 Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Table 4-5 probesubsites test descriptions probesubsites Project Test Description InitializationSteps Initializes the prober driver (see Figure 4-30). prober-init Subsite1 Connects the SMUs to the probes for the N-channel MOSFET (see...
Page 290 Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Figure 4-31 Connect SMUs to N-channel MOSFET Drain Collector Bulk Base Gate Source Emitter Transistor Figure 4-32 Connect SMUs to NPN transistor Drain Collector Bulk...
Page 291: Running The Test Sequence
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Figure 4-33 prober-separate Line 1 : Parameter value 0 separates the prober pins from the wafer. Figure 4-34 prober-prompt test and dialog window A. Prober-prompt test window B.
Page 292: Test Data
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual The test sequence is shown in Figure 4-35. After the prober is initialized by the prober-init command, the tests for subsite 1 and subsite 2 are performed at site 1. The last test for site 1 (probe-ss-move) moves the prober to site 2, where the subsite tests are repeated.
Page 293: Running Individual Plans Or Tests
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Figure 4-36 Site Navigator Click to increment or to decrement site number The title bar at the top of the KITE panel indicates which test is presently being displayed. In Figure 4-37, test vce-ic-2x for Site 2 is displayed.
Page 294: Test System Connections
The 7174A matrix card is installed in the 707/707A or 708/708A Switching Matrix. The switch matrix and PGU are controlled through the GPIB. Use the 7007 GPIB cables to connect the switch matrix and PGU to the 4200-SCS. For details about GPIB connections, refer to the Reference Manual, GPIB connections, page B-7.
Page 295 GPIB Address on the Properties & Connections tab. This is illustrated in Figure 4-40. Figure 4-40 Pulse generator configuration Add the Keithley Model 707/707A Switching Matrix to the system configuration using the KCON Tools menu as illustrated in Figure 4-41. Figure 4-41 Adding a switch matrix...
Page 296 Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Figure 4-42 Configuring the switch matrix Add a manual probe station to the system configuration using the KCON Tools menu as illustrated in Figure 4-43. If a test fixture is already part of the configuration, it must be removed before the probe station can be added.
Page 297: Open The Ivpgswitch Project
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Figure 4-44 Connecting the switch matrix Save the configuration using the KCON File menu, as illustrated in Figure 4-45. Figure 4-45 Saving the system configuration Open the ivpgswitch project Open the ivpgswitch project from the File menu (select Open Project).
Page 298: Description Of Tests
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Description of tests First connect test The first test, connect, is a UTM that connects the device to the four SMUs. In the project navigator, double-click the first connect UTM to open it.
Page 299: Second Connect Test
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Second connect test This connect UTM connects the device to the PGU and the GNDU. In the project navigator, double-click the second connect test to open it.
Page 300: Pgu-Trigger Test
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual pgu1-setup test In the project navigator, double-click pgu1-setup to open the test. The complete parameter listing for the test is shown in Figure 4-52. These parameters to configure the PGU are explained in the description area of the definition tab.
Page 301: Compare The Test Results
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Running the test sequence To run the test sequence, select (click) the 4terminal-n-fet device in the project navigator, and then click the green Run button .
Page 302: Overlaying Graphs
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Figure 4-55 id-vg graphs A. Before-stress graph B. After-stress graph Scale settings: To effectively compare the two graphs, they must both have the same scale settings.
Page 303: How To Control An External Cv Analyzer
How to control an external CV analyzer This tutorial demonstrates how to control a Keithley Model 590 CV Analyzer to acquire capacitance verses voltage (CV) data from a MOS capacitor. This tutorial also demonstrates how to create a new KITE project.
Page 304: Connections
Analyzer. The INPUT and OUTPUT connectors of the 590 are connected to the capacitor using 4801 (RG-58) BNC cables. The 590 is controlled by the 4200-SCS through the GPIB bus. Use a 7007 GPIB cable to connect the 590 to the 4200-SCS.
Page 305: Create A New Project
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Figure 4-60 Setting the Model 590 GPIB address Save the configuration using the KCON File menu as illustrated in Figure 4-61. Figure 4-61 Saving the system configuration...
Page 306: Add A Subsite Plan
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual With the project defined as shown in Figure 4-63A, click the Ok button at the bottom of the window. The project name will appear in the project navigator as shown in Figure 4-63B.
Page 307: Add A Device Plan
Model 4200-SCS User Manual Section 4: How to Control Other Instruments with the Model 4200-SCS Figure 4-65 Add a new subsite plan A. Window to specify the B. Project navigator subsite plan name Add a device plan To add a device plan: A device plan is a collection of tests to be performed on a particular device.
Page 308: Add A Utm
Section 4: How to Control Other Instruments with the Model 4200-SCS Model 4200-SCS User Manual Add a UTM To add the cvsweep UTM to the new project by copying it from the default test library (C:\S4200\kiuser\tests): In the project navigator, double-click the Capacitor device to open the device plan window.
Page 309: Modifying The Cvsweep Utm
To run the cvsweep test, click the green Run button. After the test is finished, use the sheet and graph tabs to view and analyze the results. The 4200-SCS also supports the Keithley Instruments Model 595 Quasistatic C-V Meter NOTE and the Keithley Instruments Model 82-WIN Simultaneous C-V System.
Page 310: What If My Equipment Is Not Listed In Kcon
PC station. The 4200-SCS parameter analyzer eliminated the need for a dedicated PC. Its interactive test environment, KITE, allows users to use the 4200-SCS both as a parameter analyzer and an external instrument controller, making it a “command-and-control center” of the entire instrument rack.
Page 311 Page Keithley Pulse Application (KPulse) ....5-2 KPulse: Getting started ....... .5-2 Starting KPulse .
Page 312: How To Generate Basic Pulses
• Standard pulse waveforms Segment ARB waveforms: Pulses are configured and run from the VPU or PMU tabs of KPulse. There is a tab for every Keithley pulse card installed in the Model 4200-SCS. • Custom file arb waveforms (full-arb): Pulses are configured and saved as a .kaf file using the Arb Generator tab of KPulse.
Page 313: Triggering
KPulse options Triggering With a Keithley pulse card selected as the trigger master, its Trigger Out can be used to start (trigger) itself or other PG2s in the system. For details about using a pulse card as the trigger master, see the Reference Manual, Pulse output synchronization, page 11-33.
Page 314: Standard Pulse Waveforms
Section 5: How to Generate Basic Pulses Model 4200-SCS User’s Manual Standard pulse waveforms Standard pulse waveforms are configured and controlled from the pulse card tabs in the GUI. Figure 5-3 explains how to use the GUI for Standard Pulse output.
Page 315 9) Turn on all enabled channels – Click the green triangle to turn on enabled channels for all pulse cards installed in the Model 4200-SCS. With the output on, the square box will turn red. Clicking the red box turns off the outputs.
Page 316: Segment Arb Waveforms
Section 5: How to Generate Basic Pulses Model 4200-SCS User’s Manual Segment ARB waveforms ® Segment ARB waveforms are configured and controlled from the PG2 tabs in the GUI. Figure 5- explains how to use the GUI for standard pulse output.
Page 317 8) Turn on all enabled channels – Click the green triangle to turn on enabled channels for all pulse installed in the Model 4200-SCS. With the output on, the square box will turn red. Clicking the red box turns off the outputs.
Page 318: Exporting Segment Arb Waveform Files
For Segment ARB stress/measure testing, the .ksf file can be imported using the KITE Device Stress Properties dialog box shown in Model 4200-SCS Reference Manual, Section 6, Figure 6-393. details about Segment ARB stress/measure testing, see the Reference Manual, Segment stress/ measure mode, page 6-321.
Page 319 Model 4200-SCS User’s Manual Section 5: How to Generate Basic Pulses To create custom file arb waveforms (full-arb): Select and configure waveforms: • After selecting an available waveform type, configuring its settings, and naming it, the waveform is placed in the Scratch Pad.
Page 320 Section 5: How to Generate Basic Pulses Model 4200-SCS User’s Manual 4) Configure the Settings for the selected waveform type. 5) Click Preview to update the preview of the waveform. 6) Type in a name for the waveform. You cannot use a name that is already used in the Scratch Pad.
Page 321 4) Set the Time per Point (in seconds). This is the time interval between each point in the waveforms. 5) Save the waveforms as a Keithley Arb File (.kaf). By default, .kaf files are saved in a folder named “ArbFiles” at the following path: C: S4200\kiuser\KPuIse\ArbFiles.
Page 322: Waveform Types
7) Turn on all enabled channels - Click the green triangle to turn on enabled channels for all installed pulse cards in the Model 4200-SCS. With the output on, the square box will turn red. Clicking the red box turns off the outputs of all pulse cards...
Page 323 Model 4200-SCS User’s Manual Section 5: How to Generate Basic Pulses Figure 5-10 Sine waveform (default settings) Square waveform An example of a square waveform, using the default settings, is shown in Figure 5-11. The waveform for this example is named SQUARE1, but can be any name that is not already used in the Scratch Pad.
Page 324 Section 5: How to Generate Basic Pulses Model 4200-SCS User’s Manual Figure 5-12 Triangle waveform (default settings) Custom waveform An example of a custom waveform is shown in Figure 5-13. The waveform for this example is named CUSTOM1, but can be any name that is not already used in the Scratch Pad.
Page 325 Model 4200-SCS User’s Manual Section 5: How to Generate Basic Pulses Figure 5-14 Creating a .txt or .csv file for a custom waveform .txt file format .csv file format The custom waveform in Figure 5-13 is a simple 6-point waveform made up of these voltage values: 0 V, 4 V, 1 V, 3 V, 2 V, 0 V.
Page 326 Section 5: How to Generate Basic Pulses Model 4200-SCS User’s Manual After changing one or more settings, click Preview to display the waveform. Clicking Ok places the waveform in the Scratch Pad. Figure 5-16 Noise waveform (default settings) Gaussian waveform...
Page 327 Model 4200-SCS User’s Manual Section 5: How to Generate Basic Pulses Figure 5-18 Ramp waveform (default settings) Sequences waveform An example of a sequences waveform is shown in Figure 5-19. The waveform for this example is named SEQ1, but can be any name that is not already used in the Scratch Pad.
Page 328 Section 5: How to Generate Basic Pulses Model 4200-SCS User’s Manual 5-18 Return to Section Topics 4200-900-01 Rev. K / February 2017...
Page 329: Running The Test Sequence Test Data
..4-9 Description of tests ........4-32 Add the “cvsweep” UTM ........4-42 “pgu1-init” test ........4-33 Adding a Keithley 590 CV Analyzer to the system “pgu1-setup” test ........ 4-34 configuration ..........4-38 “pgu-trigger” test ........ 4-34 Adding a probe station ......4-20...
Page 330 ..........3-99 Overviewing KITE How do I perform a charge pumping? ....3-156 Defining a UTM ........2-10 How do I… Use the 4200-SCS to perform a Pulsed I-V Defining an ITM ........2-9 test on my device? ........3-27 KITE interface ........2-3 How to control a probe station ......4-15...
Page 331 Index Model 4200-SCS User’s Manual configuring for each device terminal 2-18 Project Navigator - “ivswitch” project ....4-11 Project Navigator - probesubsites project ..4-21 KITE interface overview ........2-4 Project Navigator Checkboxes ......2-21 KITE ITM configuration ........3-13 Pulse generator card ..........
Page 332 Model 4200-SCS User’s Manual Index Ground unit connections ....1-32 Supported external equipment table ....4-4 Supported probers ..........4-17 Ground unit DUT connections ..1-33 Sweep mode (triggering) ........1-30 Ground unit terminals and connectors 1-34 System configuration for the “probesubsites” project Chassis ground .......1-35...
Page 333 Index Model 4200-SCS User’s Manual What if my equipment is not listed in KCON ..4-44 What is the PIV-A PulseIV Package ....3-29 4200-900-01 Rev. K / February 2017 Index-5...
Page 334 Model 4200-SCS User’s Manual Index Index-6 4200-900-01 Rev. K / February 2017...
Page 335 All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • www.tek.com/keithley A Gre ater Me a s ur e of Co nf id en c e...

Keithley 4200-SCS User Manual

Table of Contents

Section 2 Model 4200-Scs Software Environment

Model 4200-SCS Software Environment

KITE Project Structure

Understanding KITE

Itms Versus Utms

How to Create Your Own Itms

Basic Test Execution

How to Display and Manage Test Results

KITE Library Management

Section 3 Common Device Characterization Tests

Common Device Characterization Tests

Default Project Overview

How to Perform an I-V Test on My Device

KITE ITM Configuration

How to Perform a C-V Test on My Device

Definition Tab

Forcing Functions and Measure Options

Selecting the Forcing Function

CVU ITM Examples

CVU Voltage Sweep

CVU Voltage List Sweep

CVU Frequency Sweep (Bias)

CVU Frequency Sweep (Step)

Introduction (PIV-A and PIV-Q)

How to Perform a Pulsed I-V Test on My Device

4200-PIV-A Test Connections

Using the Pulseiv-Complete Project for the First Time

Pulse IV UTM Descriptions

Cal_Pulseiv

Vdsid_Pulseiv

Vdid_Pulse_Dc_Family_Pulseiv

Vgsid_Pulseiv

Vgid_Dc_Pulse_Pulseiv

Scopeshot_Cal_Pulseiv

Scopeshot_Pulseiv

Scopeshot_Pulseiv_Demo

How to Perform a Quiescent-Point Pulsed I-V Test (PIV-Q) on My Device

Vdsid_Pulseiv_Demo

Vgsid_Pulseiv_Demo

Q-Point Pulse IV - Model 4200-PIV-Q

What Is the PIV-Q Package

Connecting Devices for Stress / Measure Cycling

How to Perform Reliability (Stress-Measure) Tests on My Device

Configuring Subsite Cycling

Configuring Device Stress Properties

How to Perform AC Stress for Wafer Level Reliability (WLR)

Segment Stress / Measure Mode

Segment ARB Stressing

Segment Stress / Measure Mode Configuration

Subsite Cycling Data Sheets

Executing Subsite Cycling

Subsite Cycling Graphs

Configuration Sequence for Subsite Cycling

How to Perform a Flash Memory Test on My Device

Introduction

Theory of Operation

Flash Connections

Direct Connection to Single DUT

Direct Connection to Array DUT for Disturb Testing

Switch Matrix Connection to Array DUT

Memory Projects

Nvm_Examples

Flash-NAND Tests

Flash-NOR Tests

Flash-Switch Tests

Running the Flash-NAND, Flash-NOR or Flash-Switch Project

Running any Flash Project for the First Time

Running the Program or Erase UTM

Running the Fast-Program-Erase UTM

Running the Vt-Maxgm ITM

Running the Setupdc UTM

Running the Conpin-Pulse or Conpin-DC UTM (Switch Projects Only)

Flashendurance-NAND Tests

Running a Flashendurance or Flashdisturb Project

Running Endurance or Disturb Looping

Flashdisturb Tests

Explanation of Flash UTM Parameters

Error Codes