Keithley 4200-SCS Reference Manual page 1529

Model 4200-SCS Reference Manual
4.
5.
6.
Figure H-28
pa200 Chuck Navigator: save
7.
Figure H-29
pa200 WaferMap: save
4200-901-01 Rev. S / May 2017
Click the Read button (contact height value will change to the present height).
Click Apply and Close.
Save the Chuck Navigator settings
Save the WaferMap configuration
Return to
(Figure H-28).
(Figure H-29).
Section Topics
Appendix H: Suss MicroTec PA-200 Prober
H-21