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2. Insert the ion cartridge sleeve into the source holder.
Figure 52. Inserting the Sleeve into the Source Holder
3. Align the long tooth of lens 3/RF lens with the notch on the bottom of the sleeve and
drop the lens into the sleeve.
Figure 53. Inserting Lens 3/RF Lens into the Source Sleeve
1
Performing Routine Maintenance
Removing the Ion Source Cartridge for Cleaning
Long Tooth on Lens 3/RF Lens
Tooth Fits Here
TSQ 9610 Hardware Manual
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