Thermo Scientific TSQ 9610 Hardware Manual page 456

3
Advanced Troubleshooting
Replacing the Turbomolecular Pump
426 TSQ 9610 Hardware Manual
8. Disconnect the turbo pump cable from the distribution board.
Figure 466. Disconnecting the Turbo Pump Cable from the Distribution Board
9. Remove the N25 connector that connects the foreline adapter to the turbomolecular
pump.
10. Pull the adapter away from the turbomolecular pump.
11. Use a 13 mm wrench to loosen the four clamps at the top of the turbomolecular pump.
12. Remove the two clamps that hold the turbomolecular pump to the manifold on the
transfer line side.
Turbo Pump
Cable
Connector
Thermo Scientific