Thermo Scientific TSQ 9610 Hardware Manual page 79

Thermo Scientific
5. Evacuate the VPI.
a. Confirm that the source removal tool is properly engaged in the VPI.
b. Press the blue Evacuate button on the front of the instrument.
c. The Evacuate light will begin to flash green and should continue to flash green for
approximately 20 seconds.
d. If the pressure has returned to an acceptable value after the 20-30 second wait, the
evacuate light will turn off and the Ready to Open light will be solid green. At that
point, the air has been evacuated from the ball valve and it is safe to open the vacuum
interlock valve.
Note If the evacuate light flashes for only a short time then returns to a solid light
without the Ready to Open light turning green, there is a leak in the VPI seal. The
source removal tool connection should be checked or field service contacted.
Figure 38. Evacuating the Instrument
Vacuum
Interlock
Handle
Evacuate
Button
6. Twist, then loosen the top part of the vacuum interlock handle to allow the entire handle
to swing up and down. This handle controls the interior ball valve, which seals the
vacuum chamber.
1
Performing Routine Maintenance
Removing the Ion Source Cartridge for Cleaning
TSQ 9610 Hardware Manual 49