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6. Use a T20 Torxhead screwdriver to remove the two screws holding the power supply
system to the top of the back panel.
Figure 465. Removing the Power Module Screws
Screws
7. Grasp the power supply system and lift it out of the instrument. It fits snugly, so you may
have to gently shake it as you lift it out.
3
Advanced Troubleshooting
Replacing the Turbomolecular Pump
TSQ 9610 Hardware Manual
425
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Troubleshooting
