Semi F47 Function - YASKAWA SGD7C-***AMAA*** Product Manual

5.21 SEMI F47 Function

5.21

SEMI F47 Function

The SEMI F47 function detects an A.971 warning (Undervoltage) and limits the output current if
the DC main circuit power supply voltage to the SERVOPACK drops to a specified value or
lower because the power was momentarily interrupted or the main circuit power supply voltage
was temporarily reduced.
This function complies with the SEMI F47 standards for semiconductor manufacturing equip-
ment.
You can combine this function with the allowable momentary power interruption hold time
(Pn509) to allow the Servomotor to continue operating without stopping for an alarm or without
recovery work even if the power supply voltage drops.
Execution Sequence
This function can be executed either with an instruction from the SVD or with the Servo Sec-
tion. Use Pn008 = n.X (Function Selection for Undervoltage) to specify whether the func-
tion is executed by the SVD or by the Servo Section.
The default setting (Pn008 = n.  0  ) disables detection of an A.971 warning (Undervoltage).
Pn008
 Execution with the SVD (Pn008 = n.1)
The SVD limits the torque in response to an A.971 warning (Undervoltage).
The SVD removes the torque limit after the Undervoltage warning is cleared.
ervo
ection
VD
5-66
Parameter
 
n. 0
Do not detect undervoltage.
(default setting)
Detect undervoltage warning and limit
 
n. 1
torque in the SVD.
Detect undervoltage warning and limit
 
n. 2 torque with Pn424 and Pn425 (i.e., only in
the Servo Section).
Main circuit input
power upply
280 V
Main circuit
bu voltage 200 V
A.971 warning
(Undervoltage)
Torque limit
0%
Undervoltage
warning tatu
Torque limit
reference
0%
Meaning
Main circuit power interruption time
The output torque i limited to uppre
drop in the main circuit bu voltage.
Torque limit tart .
The torque i limited when
the Undervoltage warning
i received.
Torque limit end .
When Enabled Classification
After restart Setup
the
The main circuit bu voltage
increa e when the main
circuit power upply recover .