Semi F47 Function - YASKAWA SGD7S-****20A Series Product Manual

6.3

SEMI F47 Function

The SEMI F47 function detects an A.971 warning (Undervoltage) and limits the output current if
the DC main circuit power supply voltage to the SERVOPACK drops to a specified value or
lower because the power was momentarily interrupted or the main circuit power supply voltage
was temporarily reduced.
This function complies with the SEMI F47 standards for semiconductor manufacturing equip-
ment.
You can combine this function with the momentary power interruption hold time (Pn509) to
allow the Servomotor to continue operating without stopping for an alarm or without recovery
work even if the power supply voltage drops.
Execution Sequence
This function can be executed either with the host controller or with the SERVOPACK. Use
Pn008 = n.X (Function Selection for Undervoltage) to specify whether the function is exe-
cuted by the host controller or by the SERVOPACK.
The default setting (Pn008 = n.0) disables detection of an A.971 warning (Undervoltage).
Parameter

n.
(default set-
ting)
n.
Pn008 

n.
 Execution with the Host Controller (Pn008 = n.1)
The host controller limits the torque in response to an A.971 warning (Undervoltage).
The host controller removes the torque limit after the Undervoltage warning is cleared.
Main circuit input
power upply
Main circuit
bu voltage
ERVOPACK
A.971 warning
(Undervoltage)
Torque control
Undervoltage
warning tatu
Ho t controller
Torque limit
reference
Description

0
Do not detect undervoltage.
Detect undervoltage warning and limit torque
1

at host controller.
Detect undervoltage warning and limit torque

2 with Pn424 and Pn425 (i.e., only in SERVO-
PACK).
280 V
200 V
0%
0%
Main circuit power interruption time
The output torque i limited to uppre
the drop in the main circuit bu voltage.
Torque limit tart .
The torque i limited when the
Undervoltage warning i received.
Torque limit end .

6.3 SEMI F47 Function

When Enabled Classification
After restart Setup
The main circuit bu voltage increa e when
the main circuit power upply recover .
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