Semi F47 Function - YASKAWA SGD7S Product Manual

6.3 SEMI F47 Function

6.3

SEMI F47 Function

The SEMI F47 function detects an A.971 warning (Undervoltage) and limits the output current if
the DC main circuit power supply voltage to the SERVOPACK drops to a specified value or
lower because the power was momentarily interrupted or the main circuit power supply voltage
was temporarily reduced.
This function complies with the SEMI F47 standards for semiconductor manufacturing equip-
ment.
You can combine this function with the momentary power interruption hold time (Pn509) to
allow the Servomotor to continue operating without stopping for an alarm or without recovery
work even if the power supply voltage drops.
Execution Sequence
This function can be executed either with the host controller or with the SERVOPACK. Use
Pn008 = n.X (Function Selection for Undervoltage) to specify whether the function is exe-
cuted by the host controller or by the SERVOPACK.
 Execution with the Host Controller (Pn008 = n.1)
The host controller limits the torque in response to an A.971 warning (Undervoltage).
The host controller removes the torque limit after the Undervoltage warning is cleared.
SERVOPACK
Host controller
 Execution with the SERVOPACK (Pn008 = n.2)
The torque is limited in the SERVOPACK in response to an Undervoltage warning.
The SERVOPACK controls the torque limit for the set time after the Undervoltage warning is
cleared.
SERVOPACK
6-16
Main circuit input
power supply
280 V
Main circuit
bus voltage
200 V
A.971 warning
(Undervoltage)
Torque control
0%
Undervoltage
warning status
Torque limit
reference
0%
Main circuit input
power supply
280 V
Main circuit
200 V
bus voltage
A.971 warning
Torque limit starts.
(Undervoltage)
Torque
Setting of Pn424
control
0%
Main circuit power interruption time
The output torque is limited to suppress
the drop in the main circuit bus voltage.
Torque limit starts.
The torque is limited when the
Undervoltage warning is received.
Torque limit ends.
Main circuit power interruption time
The output torque is limited to suppress the
drop in the main circuit bus voltage.
The main circuit bus voltage increases when
the main circuit power supply recovers.
The main circuit bus voltage
increases when the main
circuit power supply recovers.
Setting of Pn425