Table of Contents
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2
List of Fine Matching Items
Item name
Model
register
Diff. image
disp.
Measurement
Output
parameter
226
Fine Matching
This item registers the pattern characteristic of the measurement image as a model.
Model parameter values can be changed as needed to address unstable measurement results or to
increase the processing speed.Normally, the factory default value will be used.
Reference:
Model Registration (Fine Matching) (p.227)
Modify this setting as necessary when defects cannot be detected successfully.This sets the
reference grayscale used when calculating differences between the model and the inspected object
image.Normally, the factory default value will be used.
Reference:
Difference Image Display (Fine Matching) (p.228)
This item specifies the judgement condition for measurement results.Specify the criteria to judge the
measurement result if the X and Y coordinates and the correlation with the model are OK.
Measurement parameters can be changed as needed to address unstable measurement results or
to increase the processing speed.
Reference:
Measurement Parameters (Fine Matching) (p.230)
This item can be changed if necessary.Normally, the factory default value will be used.
Use the output parameter to specify how to handle the coordinates.
Reference:
Output Parameters (Fine Matching) (p.233)
Description
FZ3 Processing Items List Manual
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