14-3. Control Unit .....................................................................................................14-19
14-3-1.
14-3-2.
14-3-3.
14-3-4.
14-3-5.
14-3-6.
14-3-7.
14-3-8.
14-3-9.
(KE-3020VR Only) ...............................................................................14-27
14-4-1.
14-5. X-Y Unit...........................................................................................................14-31
14-5-1.
14-5-2.
14-6. Z-θ Unit ...........................................................................................................14-33
14-6-1.
14-6-2.
LED Indications....................................................................................14-34
14-7. Transport Unit..................................................................................................14-35
14-7-1.
14-7-2.
14-7-3.
14-8. Head Unit ........................................................................................................14-41
14-8-1.
14-8-2.
14-9. Covers.............................................................................................................14-44
14-9-1.
14-9-2.
14-9-3.
14-10.
14-11.
ETF Power Supply (Option for M and L Board Specifications ) ................14-53
14-11-1. Replacing the ETF Power Supply Unit.................................................14-53
Maintenance Guide
Rev. 2.0