[3]
3-1-1.
3-1-2.
Replacing the Filter ..................................................................................3-2
3-1-3.
3-2-1.
Sensor Assembly .....................................................................................3-3
3-2-2.
3-2-3.
Amplifier...................................................................................................3-5
3-2-4.
3-2-5.
3-3. Replacing the HMS .............................................................................................3-6
3-3-1.
3-3-2.
3-4-1.
3-4-2.
[4]
OCC ASSEMBLY..................................................................................................4-1
4-5. Adjusting the Focus.............................................................................................4-6
[5]
BOARD TRANSPORT UNIT ................................................................................5-1
5-2-1.
5-2-2.
5-5-1.
5-5-2.
Maintenance Guide
Rev. 2.0