Thermo Scientific TSQ 9000 Hardware Manual page 442

3
Advanced Troubleshooting
Replacing the Turbomolecular Pump
414 TSQ 9000 Hardware Manual
Figure 440. Removing the Turbomolecular Pump
13. Lift the turbomolecular pump away from the remaining clamps.
14. Remove the turbomolecular pump from the chassis. You may have to tilt the turbo pump
to get it out of the chassis.
15. Insert a new turbomolecular pump into the chassis.
Note There is a centering ring with an o-ring seal that must be correctly placed between
the pump and the vacuum manifold.
Figure 441. Installing the Turbomolecular Pump
Clamps
N25 Connector
Thermo Scientific