6) Close the Process Unit, and then fix it with 4 pieces of screw (12).
7) Bring up the Internal Transportation Unit (13) and lock it at the operation position.
13
NOTE
Make sure to close and lock both the Process Unit and the Internal Transportation Unit before
measurement.
If these units are not locked at the correct positions, it is impossible to measure the gap
correctly.
12
5-162
12
K115sm5eB.doc