Multi-Site Execution - Keithley 4200-SCS Reference Manual

Section 6: Keithley Interactive Test Environment (KITE)
CAUTION
Specify the Start Execution at Site and the Finish Execution at Site numbers as explained
in the callouts of
of Sites, which specifies the maximum number of sites that can be tested. Apply these
specifications to the Project Plan by clicking Apply.
NOTE

Multi-site execution

A multi-site test sequence is selected to run by clicking the Project Plan name in the Project
Navigator (Project Plan name appears in the Test/Plan Indicator box). The test sequence is started
by clicking the green Run Test/Plan toolbar button or selecting Run in the Run menu.
Figure 6-15
sites. At the start, the InitializationSteps are performed, and then the two Subsite Plans are
executed for site 1. Then the prober moves to site 2, and the two Subsite Plans are executed
again. This move prober −> run Subsite Plans process repeats for sites 3, 4, and 5. After the
second Subsite Plan is finished at site 5, the TerminationSteps park the prober.
6-34
In the Project window, do not change the settings on the Project
Initialization Steps or Project Termination Steps checkboxes. They are to
be used only when building or modifying a Project Plan. Typically, UTMs
under InitializationSteps and TerminationSteps in the Project Plan perform
such tasks as external instrument initialization and prober setup and
parking. Unchecking Project Initialization Steps or Project Termination
Steps checkboxes, and then clicking Apply, deletes the UTMs. Checking
these checkboxes does not add UTMs.
Figure 6-14. Finish Execution at Site must be less than or equal to Number
As described in Figure 6-14, you must specify, in the Project window, the site
numbers with which collected data are to be labeled. Before execution, you must also
independently position the prober such that the first site to be evaluated on the wafer
is identical to the first site that is specified in the Project window. This requirement
applies whether you use a manual or semi-automatic prober and whether you
evaluate one site or several.
If you use a semi-automatic prober, understand that a KITE probe-step UTM only
triggers movements that are already programmed in the prober controller. Each
execution of the UTM advances the probe to the next site in this programmed
sequence. Site numbers are not communicated between the prober and KITE.
Therefore, if you evaluate multiple sites, the range of site numbers that you specify in
the KITE Project window must agree with the sequence of site numbers in the prober-
controller program.
shows the test sequence for the example Project Plan, which is configured to test five
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Model 4200-SCS Reference Manual
4200-901-01 Rev. S / May 2017