Introduction; Basic Source-Measure Connections - Keithley 4200-SCS Reference Manual

Semiconductor characterization system

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Model 4200-SCS Reference Manual

Introduction

This section contains detailed information about connecting and configuring the Keithley

Instruments Model 4200-SCS Semiconductor Characterization System. The following topics are

Basic information on connecting source-measure units (SMUs), the preamp, and the ground unit

to DUTs is covered in the following paragraphs. This information includes:

4200-901-01 Rev. S / May 2017

Basic source-measure connections: Provides basic information on making connections

to the Model 4200-SMU/4210-SMU, 4200-PA, and ground unit (GNDU). Both local and

remote sensing are discussed.

Test equipment connections: Discusses connecting the Model 4200-SCS system to a

switch matrix, test fixture, and prober.

Control and data connections: Discusses connecting the Model 4200-SCS system to the

test fixture or prober safety interlock, the IEEE-488 bus, printer and serial ports, and a local

area network.

Details for the Keithley pulse cards and scope card (Models 4200-SCP2 or

4200-SCP2HR) are provided in the

Measure Concepts." Section 16

4225-PMU pulse cards. It also documents the Model 4225-RPM.

Connection considerations

SMU connections

Preamp connections

Using the ground unit

Circuit COMMON connections

Reference Manual, Section 11 "Pulse Source-

provides details about the Models 4220-PGU and

Section Topics

Section 4: Connections and Configuration

Connections and Configuration

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