Remote Sensing; Sensing Overview; Test Fixture Guarding - Keithley 4200-SCS Reference Manual

Semiconductor characterization system
Hide thumbs Also See for 4200-SCS:
Table of Contents

Advertisement

Model 4200-SCS Reference Manual
Figure 5-3

Test fixture guarding

SMU or PreAmp
A. Unguarded
SMU or PreAmp
B. Guarded

Remote sensing

Sensing overview

As shown in
(Figure
FORCE (COMMON). With remote sensing
the DUT, along with both FORCE terminals.
NOTE
4200-901-01 Rev. S / May 2017
FORCE
I-Meter
V-Source
COMMON
FORCE
I-Meter
GUARD
V-Source
x1
COMMON
Figure
5-4, there are two types of sensing: local and remote. With local sensing
5-4A), only two terminals are connected to the DUT: SMU FORCE and GROUND UNIT:
See
Basic source-measure connections
various connection methods. GUARD connections are not shown in
sake of clarity.
Return to
Insulator
I
D
DUT
R
L1
I
L
Metal Mounting
I
= Measured current
M
I
= DUT current
D
I
= Leakage current
L
I
D
DUT
R
0V
L1
Metal Mounting Plate
Connect to safety earth ground
using #18 AWG wire or larger.
(Figure
5-4B), both SENSE terminals are connected to
in Section 4 for detailed information on
Section Topics
Section 5: Source-Measure Concepts
Insulator
I
= I
+ I
M
D
L
R
L2
Insulator
I
= I
M
D
Figure 5-4
for the
5-7

Advertisement

Table of Contents
loading

Table of Contents