Keithley S530 Administrative Manual
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Keithley S530 Administrative Manual

Keithley S530 Administrative Manual

Parametric test system
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S530 Parametric Test System
Administrative Guide
S530-924-01 Rev. D / September 2017
*PS530-924-01D*
S530-924-01D
A Tektronix Company

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  • Page 1 S530 Parametric Test System Administrative Guide S530-924-01 Rev. D / September 2017 *PS530-924-01D* S530-924-01D A Tektronix Company...
  • Page 2 Keithley Instruments is strictly prohibited. These are the original instructions in English. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments. Other brand names are trademarks or registered trademarks of their respective holders.

  • Page 3: Safety Precautions

    Keithley Instruments products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages.
  • Page 4 (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.
  • Page 5 S530 system ....................... 1-1 Introduction .......................... 1-1 System description ....................... 1-1 Optional accessories ......................... 1-3 S530 site preparation and installation ..............2-1 Site preparation checklist ..................... 2-1 Unpacking the S530 system ....................2-2 Unpacking system components ....................2-3 Unpacking the S530 system accessories ................2-10 Keithley field service engineer installation tasks ..............
  • Page 6 Model 2636B System SourceMeter Instrument ................. 5-3 Optional instrumentation ...................... 5-3 Typical matrix connections ....................5-4 S530 standard 4-wire low-current on 7530-based system ............5-4 S530 low-current using DMM7510 .................... 5-6 S530 high-voltage system using DMM7510 ................5-7 S530 low-current using 4220-PGU pulse generator card ............5-8 S530 high-voltage system using 4220-PGU pulse card ............

  • Page 7: S530 System

    S530 low-current parametric test system S530 high-voltage parametric test system The S530 systems have flexible hardware configurations that allow you to customize them to your specific needs. See the following table for a description of the main system configuration options, and...
  • Page 8 Each system contains: Computer inside cabinet External 24-inch flat-panel monitor and keyboard tray mounted on exterior of cabinet S530 system software – Keithley Test Environment (KTE) or Automated Characterization Suite (ACS) LO patch panel Interlock system (high-voltage systems only) Adjustable cable support arm...

  • Page 9: Optional Accessories

    S530 Parametric Test System Administrative Guide Section 1: S530 system Optional accessories Optional items and accessories that may accompany the S530 system: Cables to connect to the test fixture or the probe card adapter 9139A-PCA (probe card adapter) Advanced seismic securement kit...

  • Page 10: S530 Site Preparation And Installation

    Site preparation checklist The following table provides a site preparation checklist to help you prepare your site for the S530 system in your facility. If you find that an item listed is not valid for your site, you can indicate it with "N/A."...

  • Page 11: Unpacking The S530 System

    Did you prepare power outlets for service, testing, or maintenance? Unpacking the S530 system The Keithley field service engineer (FSE) is responsible for unpacking the S530 system cabinet and the accessories. However, it is recommended that the customer move the crate and the accessories box to the area where the system is going to be used.

  • Page 12: Unpacking System Components

    While unpacking, make sure there is no component damage. Please reuse or recycle packaging materials in accordance with your local requirements. You will need at least two people to unpack and move the S530 system cabinet. S530-924-01 Rev. D / September 2017...
  • Page 13 Section 2: S530 site preparation and installation S530 Parametric Test System Administrative Guide To unpack the system components: 1. Remove the crate clamps from the crate using a standard screwdriver. Figure 5: Removing the crate clamps 2. Open the front of the crate. The front is identified by the wooden ramp support attached across the panel (see the following figure).
  • Page 14 S530 Parametric Test System Administrative Guide Section 2: S530 site preparation and installation Figure 6: Opening the front of the crate 4. Attach the ramp using the two bolts that are attached to the bottom front of the crate. Figure 7: Front of the crate with ramp down...
  • Page 15 Section 2: S530 site preparation and installation S530 Parametric Test System Administrative Guide 5. Remove the padding from the front of the S530 system cabinet. Figure 8: Removing the padding S530-924-01 Rev. D / September 2017...
  • Page 16 S530 Parametric Test System Administrative Guide Section 2: S530 site preparation and installation 6. Remove the crate clamps and slide the outer box cover off the crate. Figure 9: Sliding the outer box off the crate 7. Make sure that you retract the leveling feet on the bottom of the system (next to the casters) to put weight on the casters and prepare the system to be rolled down the ramp.
  • Page 17 Section 2: S530 site preparation and installation S530 Parametric Test System Administrative Guide 8. Remove the four bolts from the bottom of the crate that are attached to the bottom of the S530 system cabinet using a 19 mm socket head on a socket wrench.
  • Page 18 S530 Parametric Test System Administrative Guide Section 2: S530 site preparation and installation 10. Unlock the two wheels (casters) that are on the front of the S530 system cabinet by moving the locks up. Figure 14: System caster brakes 11. With two people, slide the S530 system cabinet down the ramp.

  • Page 19: Unpacking The S530 System Accessories

    Section 2: S530 site preparation and installation S530 Parametric Test System Administrative Guide 12. Remove the tape from the packing material using scissors, taking care not to scratch the S530 system cabinet. Figure 16: Cutting the wrap off the system 13.
  • Page 20 S530 Parametric Test System Administrative Guide Section 2: S530 site preparation and installation The accessories box contains a computer monitor, keyboard, and mouse. It also includes required installation hardware, USB extension cables, cable support arm, connectors for the keyboard and...
  • Page 21 Section 2: S530 site preparation and installation S530 Parametric Test System Administrative Guide Figure 20: S530 keyboard tray and arm accessory Figure 21: Cable support arm S530-924-01 Rev. D / September 2017 2-12...

  • Page 22: Keithley Field Service Engineer Installation Tasks

    A set of chuck cables is included with the optional PCA-9139A probe card adapter. Model numbers of cables vary based on the prober you are using. For example, the Keithley Field Service Engineer (FSE) will install the cables shown in the following table for Tel P8 probers.
  • Page 23 Section 2: S530 site preparation and installation S530 Parametric Test System Administrative Guide Example S530 System Installation Form Figure 22: Example S530 System Installation Form page 1 S530-924-01 Rev. D / September 2017 2-14...
  • Page 24 S530 Parametric Test System Administrative Guide Section 2: S530 site preparation and installation Figure 23: Example S530 System Installation Form page 2 S530-924-01 Rev. D / September 2017 2-15...

  • Page 25: System Cabinet Size And Weight

    Section 2: S530 site preparation and installation S530 Parametric Test System Administrative Guide Figure 24: Example S530 System Installation Form page 3 System cabinet size and weight The size and weight specifications for the system cabinet are listed in the next table. See Floor plan (on page 2-20) for details about designing a floor plan for the system cabinet.

  • Page 26: Power And Operating Conditions

    S530 systems that are configured to operate between 100 V AC and 120 V AC must use a 20 A circuit; systems that are configured to operate between 200 V AC and 240 V AC must use 15 A circuit.

  • Page 27: System Power Dissipation

    S530 Parametric Test System Administrative Guide System power dissipation The total power dissipated by the S530 depends on the type and number of instruments in the test system. The power distribution unit (PDU) limits the incoming power to these instruments. Though the PDU ensures electrical safety and compliance to the required standards, it does not prevent the system from overheating.

  • Page 28: Lockout And Tagout

    S530 Parametric Test System Administrative Guide Section 2: S530 site preparation and installation Lockout and tagout For maximum safety while power is applied, always perform a lockout and tagout procedure. Remove power from the entire test system and discharge capacitors before connecting or disconnecting cables or any instrument, including the device under test.

  • Page 29: Installation And Connections

    The system cabinet requires a floor space of approximately 1.2 m × 2.1 m (4 ft × 7 ft). The following figures show a top view of the floor plan and the typical S530 system cabinet weight distribution and center of gravity.
  • Page 30 S530 Parametric Test System Administrative Guide Section 2: S530 site preparation and installation Figure 28: S530 floor plan, top view S530-924-01 Rev. D / September 2017 2-21...
  • Page 31 Section 2: S530 site preparation and installation S530 Parametric Test System Administrative Guide Figure 29: S530 weight distribution and center of gravity S530-924-01 Rev. D / September 2017 2-22...

  • Page 32: System Securement

    Section 2: S530 site preparation and installation System securement Securement is required for the S530 system cabinet. You must bolt the system to the floor for safety purposes and to ensure the cabinet will not tip over. The following figure shows a label on the keyboard tray that indicates a tip-over hazard. The maximum weight capacity for the keyboard tray is 12 kg (25 lb).
  • Page 33 The following figure shows the restraint brackets and bolt installation dimensions for the system cabinet. Figure 31: S530 system securement dimensions The following figure shows how a floor-mounting bracket is installed. Keithley part numbers are included for the required hardware. Figure 32: S530 system cabinet floor mount S530-924-01 Rev.

  • Page 34: Optional Advanced Seismic Securement

    S530 Parametric Test System Administrative Guide Section 2: S530 site preparation and installation Optional advanced seismic securement If you ordered a system with the advanced seismic fastening option, follow these mounting instructions. To install advanced seismic securement: You must supply the washers (flat and lock), threaded insert anchors, and mounting bolts that attach the mounting brackets to the floor (16 of each).
  • Page 35 Section 2: S530 site preparation and installation S530 Parametric Test System Administrative Guide 5. Mark the position of the mounting holes to the floor with a marker. 6. Remove the mounting brackets and also mark the location of the cabinet leveling legs.

  • Page 36: Equipment Startup

    On the front of the system, turn the POWER switch to the ON position. The POWER switch is on the front door of the cabinet. Make sure the system computer and monitor are also turned on before attempting to use the S530 system and any software.

  • Page 37: Initial Equipment Startup

    4. Wait for all of the instruments to power up. 5. Log onto your computer. Before starting system software The S530 system includes one of two system software options:  Automated Characterization Suite (ACS) ...

  • Page 38: Using Telnet

    To avoid instrument errors, never start the system software until all of the instruments have finished self-testing. Using Telnet Telnet is not enabled by default on the S530 system; you must to enable it to use it. To enable Telnet: 1. From the command prompt (as root user), type su and the root password.

  • Page 39: Ic Process Log Messages

    2. In the dialog box that opens, click Yes that you want to shut down the S530 tester. The message in the following figure opens after you click Yes to shut down the S530. You must wait until the 4200-SCS and the system computer shut down before you press the power button on the system cabinet.

  • Page 40: Shut Down Using Kte

    S530 Parametric Test System Administrative Guide Section 3: Equipment startup Shut down using KTE To shut down using the Keithley Test Environment (KTE) software: 1. Close all KTE programs. ® 2. In the LINUX terminal, type the following command: $KIBIN/shutdown_S530.pl 3.

  • Page 41: Recovering From An Emergency Shut Down

    3. Toggle the power switch from ON to OFF, and then back to ON again. All of the system instruments should power up. 4. Open the front cabinet door and press the power/standby switch on the host computer. Figure 40: S530 system cabinet front view S530-924-01 Rev. D / September 2017...

  • Page 42: Safety Interlocks

    For operator safety, the S530 has interlocks on both the front and back cabinet doors and at the device under test (DUT). Also, the optional probe card adapter (PCA) has an interlock that provides protection for connections to a prober.

  • Page 43: Prober Safety

    IP address is determined by you (the customer). When setting up the computer for the S530 system, do not change the computer name. Software licenses are tied to the computer name. If you change the computer name, the Keithley Interactive Test Tool (KITT), Keithley Test Execution Engine (KTXE), and other Keithley Test Environment (KTE) tools will not work.

  • Page 44: Maintenance

    Power distribution and emergency off ........4-6 Data hub license ..............4-10 LO patch panel ............... 4-11 Decommissioning an S530 test system ......... 4-12 Hardware replacement The information in this section is intended only for qualified service personnel. Because some of these procedures may cause exposure to hazardous voltages that could result in personal injury or death, service personnel must wear personal protective equipment (PPE) suitable for voltages greater than 40 V AC.

  • Page 45: Special Handling Of Static-Sensitive Devices

    Electrical hazard tasks Definitions of electrical hazard tasks (as defined in the SEMI S2-0715a standard) are listed in this section. For S530 systems, Type 3 electrical hazard tasks are typically performed. For additional information about diagnostics, troubleshooting, or maintenance of specific Keithley instruments, refer to the documentation for that instrument for details before attempting to repair it.

  • Page 46: Types Of Electrical Hazard Tasks

    SEMI S2, Appendix 5, Table A5-1. Repair and replacement Keithley Instruments offers a fee-based service agreement with all S530 systems. Under this agreement, a field service engineer will either repair or replace equipment. For more information about this service agreement, contact Keithley Instruments at 1-800-935-5595.

  • Page 47: General Replacement Procedure

    4. Place the main circuit breaker on the power distribution unit (PDU) (on the back of the cabinet) in the OFF position. 5. Disconnect the source power to the S530 system (power cord on back of PDU). 6. Place the lock and tag on the main circuit breaker of the PDU.

  • Page 48: Restore System Power

    1. Remove the lock and tag placed on the main circuit breaker of the power distribution unit (PDU). 2. Connect the source power to the S530 system (power cord on back of PDU). 3. Place the main circuit breaker on the PDU (on the back of the cabinet) in the ON position.

  • Page 49: Power Distribution And Emergency Off

    S530 Parametric Test System Administrative Guide Power distribution and emergency off The following figure contains a simplified example layout of various components in the S530 system (the LO patch panel and the interlock are shown for reference only; they are behind the source-measure units (SMUs)).

  • Page 50: Power Distribution Unit Connections And Power Distribution Basics

    S530 Parametric Test System Administrative Guide Section 4: Maintenance Power distribution unit connections and power distribution basics The 42000-PDU consists of: 24 V DC output to emergency off (EMO) circuits and cabinet fans with power 24 V DC output through banana jacks...
  • Page 51 Section 4: Maintenance S530 Parametric Test System Administrative Guide 42000-PDU connection descriptions Connection Description To PDU box DB-25 Connector providing control of the PDU box. Connect the PDU box cable connector to the EMO box with the supplied DB-25 male-to-female cable.

  • Page 52: System Emergency Off Circuit

    S530 Parametric Test System Administrative Guide Section 4: Maintenance System emergency off circuit The following figure shows a simplified schematic of the 42000-PDU power distribution unit (PDU) emergency off (EMO) circuit. Figure 43: 42000-PDU simplified schematic S530-924-01 Rev. D / September 2017...

  • Page 53: Data Hub License

    S530 Parametric Test System Administrative Guide Data hub license The data hub license allows the Keithley Test Environment (KTE) software to communicate with a prober. This license is installed on all systems when they are shipped. If you upgrade or reinstall the KTE software, you may need to reinstall the data hub license.

  • Page 54: Lo Patch Panel

    Keithley recommends that a high-quality, low-impedance connection between low and protective earth (safety ground) be made at the prober used with the S530. Because this is not always possible, the LO patch panel provides alternative connections. The LO patch panel provides:...

  • Page 55: Decommissioning An S530 Test System

    Any cleaning solutions used during the life of the system (such as isopropyl alcohol (IPA)) should be disposed of separately and properly. The S530 system may be used with other equipment such as automatic probers and third-party probe card adapters. Tektronix is not in control of these products and the original equipment manufacturer should always be contacted for proper recycling procedures.

  • Page 56: Instrument Specifications And Documentation

    S530 ACS communications diagrams ........5-14 Introduction This section contains an overview of the instruments used in S530 parametric test systems and examples of typical connection schemes. For more specific information about instruments used in the S530 Parametric Test System, refer to...

  • Page 57: Switching

    Section 5: Instrument specifications and documentation S530 Parametric Test System Administrative Guide Switching The following components provide the switching capabilities of the S530. Model 707B Switch Matrix Mainframe The 707B Semiconductor Switch Matrix Mainframe is a programmable switch for connecting signal paths in a matrix structure.

  • Page 58: Sourcing And Measuring

    The cards and columns of each instrument connection shown in the following diagrams may differ from your actual system. The flexibility of the S530 configuration allows for various numbers and combinations of instruments. Attempting to show examples of every possible scenario would be prohibitive.

  • Page 59: Typical Matrix Connections

    The 2010 DMM is only connected to the force side of the matrix, however, both the force and sense connections need to be configured in the icconfig_<QMO>.ini file. S530 low-current using 4220-PGU pulse generator card S530 high-voltage system using 4220-PGU pulse generator card S530 low-current using 4200-SCP2HR scope card S530 high-voltage system using 4220-SCP2HR scope card Typical matrix connections Typical matrix connections for standard instrumentation are shown in the next figure.
  • Page 60 S530 Parametric Test System Administrative Guide Section 5: Instrument specifications and documentation Figure 48: S530 standard 4-wire low-current S530-924-01 Rev. D / September 2017...

  • Page 61: S530 Low-Current Using Dmm7510

    Section 5: Instrument specifications and documentation S530 Parametric Test System Administrative Guide S530 low-current using DMM7510 Figure 49: S530 low-current using Model DMM7510 S530-924-01 Rev. D / September 2017...

  • Page 62: S530 High-Voltage System Using Dmm7510

    S530 Parametric Test System Administrative Guide Section 5: Instrument specifications and documentation S530 high-voltage system using DMM7510 Figure 50: S530 high-voltage system using Model DMM7510 S530-924-01 Rev. D / September 2017...

  • Page 63: S530 Low-Current Using 4220-Pgu Pulse Generator Card

    Section 5: Instrument specifications and documentation S530 Parametric Test System Administrative Guide S530 low-current using 4220-PGU pulse generator card Figure 51: S530 low-current using Model 4220-PGU pulse generator card S530-924-01 Rev. D / September 2017...

  • Page 64: S530 High-Voltage System Using 4220-Pgu Pulse Card

    S530 Parametric Test System Administrative Guide Section 5: Instrument specifications and documentation S530 high-voltage system using 4220-PGU pulse card Figure 52: S530 high-voltage system using Model 4220-PGU pulse generator card S530-924-01 Rev. D / September 2017...

  • Page 65: S530 Low-Current Using 4200-Scp2Hr Scope Card

    Section 5: Instrument specifications and documentation S530 Parametric Test System Administrative Guide S530 low-current using 4200-SCP2HR scope card Figure 53: S530 low-current using Model 4200-SCP2HR scope card S530-924-01 Rev. D / September 2017 5-10...

  • Page 66: S530 High-Voltage System Using 4200-Scp2Hr Scope Card

    S530 Parametric Test System Administrative Guide Section 5: Instrument specifications and documentation S530 high-voltage system using 4200-SCP2HR scope card Figure 54: S530 high-voltage system using Model 4200-SCP2HR scope card S530-924-01 Rev. D / September 2017 5-11...

  • Page 67: S530 Kte Communications Diagrams

    S530 Parametric Test System Administrative Guide S530 KTE communications diagrams The S530 KTE System uses both ethernet and GPIB to communicate with and control the instruments. The diagrams shown in the following figure show how the instruments are connected to each other and what type of communications are used.
  • Page 68 S530 Parametric Test System Administrative Guide Section 5: Instrument specifications and documentation Figure 56: S530 KTE communications diagram 3 S530-924-01 Rev. D / September 2017 5-13...

  • Page 69: S530 Acs Communications Diagrams

    Section 5: Instrument specifications and documentation S530 Parametric Test System Administrative Guide S530 ACS communications diagrams The following figure shows three and four 2636A/B source-measure units. However, the system only requires one 2636A/B (you can have up to four). Figure 57: S530 ACS communications diagrams S530-924-01 Rev.
  • Page 70 All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • www.tek.com/keithley 3/17...

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