Alarm Code:
Possible Cause
Alarm Name
The servo was turned
ON after the position
d01h:
deviation exceeded
the setting of Pn526
Position Devia-
(2526h) (Excessive
tion Overflow
Position Deviation
Alarm at Servo
Alarm Level at Servo
ON
ON) while the servo
was OFF.
If position deviation
remains in the devia-
tion counter, the set-
ting of Pn529 (2529h)
or Pn584 (2584h)
(Speed Limit Level at
d02h:
Servo ON) limits the
Position Devia-
speed when the servo
tion Overflow
is turned ON. This
Alarm for Speed
alarm occurs if a posi-
Limit at Servo ON
tion reference is input
and the setting of
Pn520 (2520h)
(Excessive Position
Deviation Alarm Level)
is exceeded.
The motor direction
and external encoder
installation orientation
d10h:
are backward.
Motor-Load Posi-
tion Deviation
Overflow
There is an error in the
connection between
the load (e.g., stage)
and external encoder
coupling.
d30h:
The position data
Position Data
exceeded
±1,879,048,192.
Overflow
E00h:
EtherCAT Module
A failure occurred in
the SERVOPACK.
Interface Initializa-
tion Timeout Error
The EtherCAT trans-
mission cycle fluctu-
ated.
E02h:
EtherCAT Inter-
nal Synchroniza-
tion Error 1
A failure occurred in
the SERVOPACK.
Noise caused an error
in communications
E03h:
between the SERVO-
EtherCAT Mod-
PACK and EtherCAT
ule Interface
Network Module.
Communications
Data Error
A failure occurred in
the SERVOPACK.
Confirmation
Check the position
Optimize the setting of
deviation while the
Pn526 (2526h).
servo is OFF.
Optimize the setting of
Pn520 (2520h). Or, set
–
Pn529 (2529h) or Pn584
(2584h) to an appropriate
value.
Install the external
encoder in the opposite
Check the motor direc-
direction, or change the
tion and the external
setting of Pn002 (2002h)
encoder installation ori-
= n.X (External
entation.
Encoder Usage) to
reverse the direction.
Check the coupling of
Check the mechanical
the external encoder.
coupling.
Check the input refer-
Reconsider the operating
ence pulse counter.
specifications.
Replace the SERVO-
–
PACK.
Remove the cause of
transmission cycle fluctu-
–
ation at the host control-
ler.
Turn the power supply to
the SERVOPACK OFF and
ON again. If an alarm still
–
occurs, the SERVOPACK
may be faulty. Replace the
SERVOPACK.
Implement countermea-
–
sures against noise.
Replace the SERVO-
–
PACK.
16.2 Alarm Displays
16.2.2 Troubleshooting Alarms
Continued from previous page.
Correction
Reference
page 9-8
page 11-6
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–
–
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Continued on next page.
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