Thermo Fisher Scientific
3. Disconnect electrical connections from the top of the flow controllers
noting their positions for reconnection
Figure 7-4. Replacing a Mass Flow Controller
4. Remove plumbing from flow controllers.
5. Disconnect fan electrical connector.
6. Remove four screws holding flow controller bracket to floor plate.
7. Remove flow controller assembly.
8. Remove defective flow controller from bracket by removing the two
screws holding flow controller to bracket.
9. Install new flow controller by following the above directions in reverse.
10. Leak check system and recalibrate. Refer to "Leak Test and Pump
Checkout" in this chapter.
Mass Flow Controller Replacement
(Figure
7-4).
Model 146i Instruction Manual
Servicing
7-15