Setting Scan Step When Registration Marks Are Scanned - GRAPHTEC FCX4000 SERIES User Manual

3
Press the POSITION ( ) key twice.
ARMS SETTING screen (4/5) is displayed.
4
Press the [3] key (SENSING METHOD).
SENSING METHOD screen is displayed.
5
Press the [1] key (ISM) or the [2] key(NORMAL).
The SENSING METHOD is selected.
6
Confirm the setting and press the [ENTER] key (SET).
Setting will be set, and it will return to ARMS SETTING screen (4/5).
7
Press the [PAUSE/MENU] key.
It will return to the default screen.

Setting Scan Step When Registration Marks Are Scanned

If the line segments are fine, the registration marks may not be sensed even when the slowest registration mark
sensing speed has been set. If the interval has been set to 0-step, the registration marks are sensed through
sampling during movement. If the interval is set to 5 to 15 μm, the registration marks are sensed at the specified
interval.
It is valid only when the TYPE 3 or TYPE 4 of the registration mark is specified.
Operation
1
Press the [PAUSE/MENU] key.
MENU screen is displayed.
Supplement
It will return to ARMS SETTING screen (4/5)
without changing the settings when you
press the [ESC] key (CANCEL).
Supplement
It will return to ARMS SETTING screen
without changing the settings when you
press the [ESC] key (PREVIOUS).
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