Guarding For Measurement Of Low Capacitance Values - Keysight E4980A User Manual

Measurement Procedure and Examples
Measurement Contacts

Guarding for Measurement of Low Capacitance Values

Use a guard plate to minimize measurement errors caused by stray
capacitance when measuring low capacitance values, such as low-capacitance
chip capacitors.
using a guard plate in the four-terminal pair measurement configuration.
Figure 7-14 Example DUT Guard Plate Connection
202
Figure 7-14 shows an example of measurement contacts
GROUND
4TP Test Leads
DUT
Shield Conductor
of the Test Leads
Connect here
Guard Plate
(Should not be Grounded)
Keysight E4980A/AL Precision LCR Meter