3
Advanced Troubleshooting
Replacing the Turbomolecular Pump
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TSQ 8000 Evo Hardware Manual
Figure 404. Removing the Turbomolecular Pump
13. Lift the turbomolecular pump away from the remaining clamps.
14. Remove the turbomolecular pump from the chassis. You may have to tilt the turbo pump
to get it out of the chassis.
15. Insert a new turbomolecular pump into the chassis.
Note There is a centering ring with an o-ring seal that must be correctly placed between
the pump and the vacuum manifold.
Clamps
N25 Connector
Thermo Scientific