Setting item
Upper
Lower
Handling Coordinates
8
The processing items for measuring positions have a setting item called "Output parameter" with which
you can select how to handle coordinates.
In "Output parameter", you can set "Output coordinates" or "Calibration".
Output Coordinates
Select coordinate types to be output to external devices.
Before position compensation
Coordinate values before position compensation are output.
After position compensation (with factory settings)
Coordinate values after position compensation are output.
588
Measurement Mechanism
Specify the upper and lower limits of defect detection size based on the size of scratch or
contamination to be detected.
The larger the difference between upper and lower limits, the easier it is to detect scratches or
contamination of various sizes.
For both upper and lower limits, higher values for defect detection size limits leads to weaker
detection sensitivity and shorter processing time.
Description
FZ4 User's Manual