Setting item
Specify the upper and lower limits of defect detection size based on the size of scratch or
contamination to be detected.
The larger the difference between upper and lower limits, the easier it is to detect scratches or
contamination of various sizes.
For both upper and lower limits, higher values for defect detection size limits leads to weaker
detection sensitivity and shorter processing time.
Upper
Lower
Handling Coordinates
The processing items for measuring positions have a setting item called "Output parameter" with which
you can select how to handle coordinates.
In "Output parameter", you can set "Output coordinates" or "Calibration".
Output Coordinates
Select coordinate types to be output to external devices.
Before position compensation
Coordinate values before position compensation are output.
FZ3 User's Manual
Description
Measurement Mechanism
8
269