Agilent Technologies 93000 SOC Series Training Manual page 40

Hardware Overview
Available Manipulators
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• It has a floating pogo plane to allow for minor non-planarity to the
docking surface.
There are four different manipulators available:
• a special manipulator designed for use in a lab environment
This manipulator type holds the testhead at table top height for
manual DUT insertion. The manipulator can be moved on wheels
and allows the testhead to be rotated for convenient accessibility
and maintenance.
• a special zero-footprint manipulator for final testing on a handler
This model provides linear movement of the testhead in X- and Z-
direction for precise and repeatable connection of the testhead to a
handler. Required floorspace is very small to ensure a high handler
density on the production floor.
• a special zero-footprint manipulator for wafer probing
This model allows movement of the testhead in Z-direction and a
90 degree tilt of the testhead. It is suited for clean room applica-
tions. Its zero-footprint design allows for the maximum possible
wafer prober density, saving valuable clean room floorspace.
• a general purpose manipulator with 6 degrees of freedom
This model is suitable for precise and repeatable connection
between the testhead and both, handlers and wafer probers.
Cooling Unit
The SOC Series relies on water cooling technology. This technology
enhances reliability and lifetime of the electronics as well as repeat-
ability by keeping the components of the pin channels at a constant
temperature. The operating temperature of the SOC Series is around
40 °C lower than that of a comparable air cooled system.
The cooling unit is connected to the support rack (see
via two flexible water hoses. Two more flexible water hoses conduct
the cooling water from the support rack to the testhead and back.
To adapt to various environments, Agilent Technologies offers several
types of cooling unit solutions. The cooling unit in
example, is a liquid/liquid cooling system.
Agilent 93000 SOC Series User Training Part 1, October 2004
3-1 Major Components
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