Thermal Fuses .................................................................................................... 315
Chamber Thermocouple ...................................................................................... 319
Z Motor ............................................................................................................ 321
Removing the Z motor .................................................................................... 321
Installing the Z motor ..................................................................................... 324
Z Stage............................................................................................................. 325
Removing the Z stage .................................................................................... 326
Installing the Z stage...................................................................................... 327
Offset Calibrations ...................................................................................................... 338
Z Calibration ................................................................................................ 338
Z tip to base (ZT2B)....................................................................................... 338
Z tip to tip (ZT2T) .......................................................................................... 339
XY Tip Calibration ......................................................................................... 340
Part Based Calibration................................................................................................. 343
nostic Software ............................................................................................. 352
agnostics Software ........................................................................................ 371