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DC SC2020
Version 1.1
Chain-Link NVM Name
752-873
Correction Vdeve Upper Limit_PS_Upper Limit Value
[K][PS0]
752-874
Correction Vdeve Upper Limit_PS_Upper Limit Value
[K][PS1]
752-875
Correction CF Lower Limit_Lower Limit Value [YMC]
752-876
Correction CF Lower Limit_Lower Limit Value [K]
752-877
Correction CF Lower Limit_Upper Limit Value [YMC]
752-878
Correction CF Lower Limit_Upper Limit Value [K]
752-879
Correction CF Upper Limit_Lower Limit Value [YMC]
752-880
Correction CF Upper Limit_Lower Limit Value [K]
752-881
Correction CF Upper Limit_Upper Limit Value[YMC]
752-882
Correction CF Upper Limit_Upper Limit Value
752-883
Ghost supported DeltaV[YMC]
752-884
Ghost supported DeltaV[K]
752-885
VH Set Point[YMC]
752-886
VH Set Point[K]
752-887
Delta VHVB Correction Amount [Y]
752-888
Delta VHVB Correction Amount [M]
752-889
Delta VHVB Correction Amount [C]
752-890
Delta VHVB Correction Amount [K]
752-891
BCR Altitude Offset [Y]
752-892
BCR Altitude Offset [M]
752-893
BCR Altitude Offset[C]
752-894
BCR Altitude Offset [K]
752-895
BCR Altitude Coefficient [Y]
752-896
BCR Altitude Coefficient [M]
752-897
BCR Altitude Coefficient [C]
752-898
BCR Altitude Coefficient [K]
752-899
Delta LPH Environment Correction PR Correction
Amount [Y]
752-900
Delta LPH Environment Correction PR Correction
Amount [M]
752-901
Delta LPH Environment Correction PR Correction
Amount [C]
752-902
Delta LPH Environment Correction PR Correction
Amount [K]
752-903
Delta LPH Environment Correction Amount [YMC]
752-904
Delta LPH Environment Correction Amount [K]
05/2014
6-124
Table 1 NVM 752_Process Control 1 List
Default
Minimum
Maximum
Value
value
value
Description
420
0
1023
PS individual Correction Vdeve Upper Limit_Upper Limit Value
420
0
1023
PS individual Correction Vdeve Upper Limit_Upper Limit Value
100
1
1023
Correction CF Lower Limit_Lower Limit Value
100
1
1023
Correction CF Lower Limit_Lower Limit Value
120
1
1023
Correction CF Lower Limit_Upper Limit Value
120
1
1023
Correction CF Lower Limit_Upper Limit Value
100
1
1023
Correction CF Upper Limit_Lower Limit Value
100
1
1023
Correction CF Upper Limit_Lower Limit Value
120
1
1023
Correction CF Upper Limit_Upper Limit Value
120
1
1023
Correction CF Upper Limit_Upper Limit Value
0
0
255
Ghost supported DeltaV Offset Value
0
0
255
Ghost supported DeltaV Offset Value
1023
0
1023
Ghost Supported VH Set Point
1023
0
1023
Ghost Supported VH Set Point
0
0
255
Delta VHVB Correction Amount
0
0
255
Delta VHVB Correction Amount
0
0
255
Delta VHVB Correction Amount
0
0
255
Delta VHVB Correction Amount
0
-1024
1023
BCR Altitude Offset Value
0
-1024
1023
BCR Altitude Offset Value
0
-1024
1023
BCR Altitude Offset Value
0
-1024
1023
BCR Altitude Offset Value
1024
0
2047
BCR Altitude Coefficient
1024
0
2047
BCR Altitude Coefficient
1024
0
2047
BCR Altitude Coefficient
1024
0
2047
BCR Altitude Coefficient
0
0
255
Film Thickness Correction of Environment Correction Amount
0
0
255
Film Thickness Correction of Environment Correction Amount
0
0
255
Film Thickness Correction of Environment Correction Amount
0
0
255
Film Thickness Correction of Environment Correction Amount
0
-1024
1023
Delta LPH Environment Correction Amount
0
-1024
1023
Delta LPH Environment Correction Amount
General
6.3.13 NVM 752_Process Control 1 List
Write
Allowed/
Can be
Unit
Protected
initialized
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
-
O
O
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