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Table 8-2 Common PurIon Error Codes and Resolutions
The splitter valve
seals have exceeded
their recommended
life. The PurIon will
continue to operate,
but there is an
increased possibility
of leakage at the
splitter valve and loss
of PurIon detection
during a separation.
No ion source is
detected on the
PurIon. Please
ensure that the ion
source is properly
installed and
connected. If the
source is still not
detected, contact a
qualified service
technician. Error 309
A plug has occurred in
the PurIon fluid lines.
The separation can
be continued without
PurIon detection or
continued if the plug
is corrected. Error
310
The PurIon inlet cone
may be plugged
which could prevent
detection. Continued
operation will not
cause damage.
Please contact a
qualified service
technician to clean
the cone; Pirani
Pressure: [s1] mbar.
Error 315
The splitter valve supplier has stated that typical
valve life exceeds
1,000,000 actuations. After that time, there is no
method of deter- mining when it will leak. The
valve can be rebuild using the valve
rebuild kit (PN:60-5234-629) or continue to use and
monitor for leakage. Leakage should not drip out
the bottom of the fluid interface front cover.
The PurIon has reported that the ion source high
voltage cable is not properly plugged into its
socket. This is the cable with the round connector
and is to the right and behind the ion source.
This generally occurs upon changing or cleaning
probes.
This error message is displayed if a plug is
detected during a separation.
During normal operation, the Pirani pressure
should be >1.5E-3 mbar. Anything less is an
indication of either partial or complete plugging of
the capillary cone entrance to the vacuum area.
See cleaning the cone capillary.
Section 8 Maintenance
8-21
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