Judgement Condition (Calc Axis Move) - Omron FH-3 Series Reference Manual

Judgement Condition (Calc Axis Move)

This item specifies the judgement condition for measurement results.
1
When the setting has been changed,
click [Measure] to verify whether
measurements can be made correctly.
2
In the "Judgement condition" area, set
each item.
The following parameters are displayed in this menu based on the stage type.
Displayed content
X axis movement
amount
Judgement upper/lower
limit values
Y axis movement
amount
Judgement upper/lower
limit values
θ axis angle movement
amount
Judgement upper/lower
limit values
θ axis linear movement
amount
Judgement upper/lower
limit values
U axis movement
amount
Judgement upper/lower
limit values
V axis movement
amount
Judgement upper/lower
limit values
W axis movement
amount
Judgement upper/lower
limit values
R axis movement
amount
Judgement upper/lower
limit values
: Show, : Hide
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FH/FZ5 Processing Item Function Reference Manual
Not
XY XYθ θXY
selected
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(θ axis (θ axis


direct direct
drive) drive)
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(θ axis (θ axis
 
linear linear
drive) drive)
  
  
  
  
If the reference data is the XYθ stage
UVW UVWR X(Y)
 
 
   

  

  
 
 
 
 
   

  
Xθ(Yθ) θX(θY) 3 axes 4 axes
   
   
 
(θ axis (θ axis


direct direct
drive) drive)
 
(θ axis (θ axis
 
linear linear
drive) drive)
   
   
   
   
Calc Axis Move
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