Transfer Position Data; Settings Flow (Transfer Position Data) - Omron FH-3 Series Reference Manual

Transfer Position Data

Calculates the post movement position/angle data when each axis of a stage or robot is moved for a given
distance. Use this when you want to measure the stage after moving a given distance and obtain the pre-
movement position/angle data.
At least 2 or 3 measurement points are needed to calculate axis movement amounts. Axis movement amounts
can usually be stably calculated by installing a camera at each measurement point and measuring 4 or 5
measurement points.
The basic approach is to calculate movement amounts at high precision with the same number of cameras as
there are measurement points. But it is also possible to measure multiple measurement points contained in a
single camera's field of view.
Used in the Following Case
• When you want to position the FPD panel
This is used when a stage or robot moves a mark that is
outside the camera field of view to a position within the
camera field of view to measure it.
U axis motor
The mark position before stage
movement is obtained as the
filtered position.
Filtered axis position: U2, V2, W2, R2

Settings Flow (Transfer Position Data)

The position/angle conversion should be set up with the following procedure.
Make sure to set
Start
Machine Setting (Transfer Position Data)
Transfer Parameter (Transfer Position Data)
Settings complete
Test measurement
776

Transfer Position Data

Before stage movement
(X2, Y2, TH2)
W axis motor
Filtered position: (X2, Y2, TH2)
Position before filtering: (X1, Y1, TH1)
After stage movement
U axis motor
ΔR
(X1, Y1, TH1)
W axis motor
Axis position before filtering: U1, V1, W1, R1
(V1 = V2 + ΔV R1 = R2 + ΔR)
Set as necessary.
Output Parameter (Transfer Position Data)
Check results/make adjustments
FH/FZ5 Processing Item Function Reference Manual
ΔV