Omron FH-3 Series Reference Manual page 760

Error detection values
This value is for confirming the accuracy of calibration result.
Output the error detection values when the Stage has θ-axis.
This value is calculated using a calibration data calculated in Master calibration and a measurement result
sampled rotation movement.
If a problem of magnification, axis angle or center position of rotation is occurred, this value may be larger.
In the followings, describe the calculation method in the case of sampling time is 2 as an example.
Rotation center position of machine
Calculated position
of rotation center
Rotation center position of machine
Sampling position
(x1,y1)
Calculated
position
of rotation
center
Rotation center position of machine
758
Vision Master Calibration
Sampling position1
(x1,y1)
Sampling position2
(x2,y2)
Sampling position1
(x1,y1)
Sampling position2
(x2,y2)
Sampling position2
(x2,y2)
Reversed position from
position 1 and calculated
rotation center (Sx1,Sy1)
Reference position
(SX,SY)
1) Rotation sampling is executed based on
sampling settings. A reference position
may change depending on sampling
method.
Reference position
(SX,SY)
2) Calculates the center position of rotation
from sampling result.
Reference position
(SX,SY)
3) Calculates the reverse rotation point from
the calculated rotation point each of
sampled points.
Reversed position
from position 2
and calculated
rotation center
(Sx2,Sy2)
FH/FZ5 Processing Item Function Reference Manual