Omron FH-3 Series Reference Manual page 723

Setting item
Rotation poiarity
Setting the Data for Each Stage (XY Stage)
You can set 2-axis stage, i.e. XY stage in this function.
1
If XY stage is selected, the XY stage
setting area is displayed.
2
Click [...] in [X-axis limit] in the XY stage setting area to set the upper and lower limit values.
3
Likewise click [...] in [Y-axis limit] to set the upper and lower limit values.
Setting item
X-axis limit
Y-axis limit
FH/FZ5 Processing Item Function Reference Manual
Setting value
[Factory default]
Select the rotation direction defined in the equipment is positive or
negative compared to the rotation direction in the stage coordinate
system.
Polarities are as follows:
Positive polarity/negative polarity
Y
• [Positive]
• Negative
Stage coordinate system
Setting value
[Factory default]
99999.9999 to 99999.9999
[-99999.9999] to [99999.9999]
-99999.9999 to 99999.9999
[-99999.9999] to [99999.9999]
Description
When positive rotation
direction of the device is
A: positive polarity
B: negative polarity
A
B
X
Set the upper and lower limit values for the X axis
movement range of the XY stage. Units of the
coordinate system set in calibration is used.
Set the upper and lower limit values for the Y axis
movement range of the XY stage. Units of the
coordinate system set in calibration is used.
Description
Stage Data
4
721