Omron FH-3 Series Reference Manual page 722

Setting item
Stage type
720
Stage Data
Setting value
[Factory default]
Usable "Stage types" are displayed. Select a stage.
Usable "Stage types" are as follows:
XY stage
XYθ stage
• [XY stage]
• XYθ stage
θXY stage
• θXY stage
• UVW stage
• UVWR stage
• X(Y) stage
• Xθ(Yθ) stage
• θX(θY) stage
UVW stage
When XY stage, UVW stage, UVRW stage or X(Y) stage is
selected, the rotation polarity selection becomes disabled.
Description
UVWR stage
X(Y) stage
When you select [X-axis]
as measurement axis,
[X-stage] is set.
When you select [Y-axis]
as measurement axis,
[Y-stage] is set.
Xθ(Yθ) stage
When you select [X-axis]
as measurement axis,
[Xθ-stage] is set.
When you select [Y-axis]
as measurement axis,
[Yθ-stage] is set.
θX(θY) stage
When you select [X-axis]
as measurement axis,
[θX-stage] is set.
When you select [Y-axis]
as measurement axis,
[θY-stage] is set.
FH/FZ5 Processing Item Function Reference Manual