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Measurement Definition
Parametric Sweep Measurement Definitions
Measurement procedure is as follows:
This measurement is divided into two parts. The first part is to create a micro track and the
second part is to measure the track profile of the micro track.
Create Micro Track
Micro track is created by erasing both sides of the track as shown in Figure 5-40, resulting
to a narrowed track. Refer to the programming manual "hpe5022_configMicroTrack" for
details.
Figure 5-40
Micro Track
In order to create a micro track, the erase start offset, erase step (width) and its ratio (how
much of the original TAA of a track is to be transformed to a micro track) have to be
specified. Refer to Figure 5-41.
Chapter 5
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