Maintaining the roughing pump
You can use the mass spectrometer with an Oerlikon Leybold oil-filled
roughing pump or an Edwards XDS46i oil-free roughing pump.
•
For information on connecting the Oerlikon Leybold roughing pump to
the mass spectrometer, see
•
For information on connecting the Edwards XDS46i roughing pump to
the mass spectrometer, see
Maintaining the Oerlikon Leybold oil-filled roughing
pump
Requirement:
detailed here, refer to the manufacturer's documentation provided with the
instrument.
Oerlikon Leybold roughing pump:
Oil filler plug
Oil level sight
glass
Oil drain plug
page
page
In addition to the roughing pump maintenance requirements
Maintaining the roughing pump
275.
280.
Gas ballast valve
April 2, 2015, 715004496 Rev. B
115