3.3.1
I/O signal list ........................................................................................................................... 3 - 18
3.3.2
I/O signal details ..................................................................................................................... 3 - 20
3.4
Buffer Memory List......................................................................................................................... 3 - 24
3.4.1
Module status area (address: 0 to 20) .................................................................................... 3 - 24
3.4.2
3.4.3
3.4.4
3.4.5
3.4.6
3.4.7
3.4.8
3.4.9
3.5
Directory Structure ......................................................................................................................... 3 - 57
3.6
CSV File Format ............................................................................................................................ 3 - 58
3.6.1
CSV format specification ........................................................................................................ 3 - 58
3.6.2
Data logging file ...................................................................................................................... 3 - 58
3.6.3
Event logging file .................................................................................................................... 3 - 62
3.7
Binary File Format ......................................................................................................................... 3 - 66
3.7.1
Data logging file ...................................................................................................................... 3 - 66
3.7.2
Event logging file .................................................................................................................... 3 - 69
3.8
Recipe File Format ........................................................................................................................ 3 - 73
3.9
CHAPTER 4
4.1
Handling Precautions....................................................................................................................... 4 - 1
4.2
4.2.1
4.2.2
4.2.3
4.3
Parts Names .................................................................................................................................. 4 - 10
4.4
Wiring............................................................................................................................................. 4 - 12
4.4.1
Wiring...................................................................................................................................... 4 - 12
4.4.2
Wiring precautions .................................................................................................................. 4 - 12
4.5
4.6
Self-Diagnostics Tests ................................................................................................................... 4 - 18
4.6.1
Self-loopback test ................................................................................................................... 4 - 18
4.6.2
Hardware test ......................................................................................................................... 4 - 19
A
- 22
4 - 1 to 4 - 20