Semi F47 - Omron R88D-KTA5L User Manual

1-5 Applicable Standards

SEMI F47

 Some Servo Drives conform to the SEMI F47 standard for momentary power interruptions
(voltage sag immunity) for no-load or light-load operation.
 This standard applies to semiconductor manufacturing equipment.
Note 1. It does not apply to Servo Drivers with single-phase 100-V specifications or with
Note 2. Always perform evaluation testing for SEMI F47 compliance in the actual system.
1
1-17
24-VDC specifications for the control power input.
OMNUC G5-SERIES AC SERVOMOTOR AND SERVO DRIVE USER'S MANUAL