Table Of Contents - Newport ESP6000 User Manual

Motion controller/driver
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i v
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Warranty ................................................................................................................ ii
EC DECLARATION OF CONFORMITY ................................................................ iii
List of Figures ....................................................................................................... ix
List of Tables ....................................................................................................... xii
1.1 Scope .................................................................................................... 1-1
1.2 Safety Considerations ........................................................................ 1-2
1.3 Conventions And Definitions ............................................................ 1-3
1.3.1 Definitions and Symbols ........................................................ 1-3
1.3.2 Terminology ............................................................................. 1-5
1.4 System Overview ................................................................................ 1-6
1.4.1 Features .................................................................................... 1-7
1.4.2 Specifications .......................................................................... 1-8
1.4.2.1 ESP6000 Controller Card........................................... 1-8
1.4.2.3 Environmental Limits ................................................ 1-9
2.1 Unpacking ............................................................................................ 2-1
2.2 PC Hardware and Software Requirements ...................................... 2-2
2.3 Equipment Controls and Indicators ................................................ 2-2
2.4 Installation and Connection .............................................................. 2-5
Software Driver ....................................................................... 2-5
2.4.2 Installing Windows Software ................................................. 2-9
and the PC .............................................................................. 2-15
2.4.4 Selecting The UniDrive6000 Line Voltage .......................... 2-16
2.4.5 Connecting Stages ................................................................. 2-18
ESP6000 Controller Card ...................................................... 2-19
3.1 General Description ........................................................................... 3-1
3.2 Motor On .............................................................................................. 3-1
3.3 Homing a Stage ................................................................................... 3-3
3.4 Jog ......................................................................................................... 3-4
3.5 System Shut-Down .............................................................................. 3-6
4.1 Motion Utility ...................................................................................... 4-1
4.1.1 General Description ................................................................ 4-1
4.1.2 Features .................................................................................... 4-1
...................................................................... 1-1
..................................................................... 2-1
......................................................................... 3-1
........................................................... 4-1

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Unidrive6000

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