Table 7.2-1 - Servo Parameter Functions - Newport ESP6000 User Manual

Parameter
Kp
Kd
Ki
Vff
Aff
Section 7 — Servo Tuning
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A summary of servo parameter functions is listed in Table 7.2-1.
Table 7.2-1 — Servo Parameter Functions
Function Value Set Too Low
Determines Servo loop too soft
stiffness of with high following
servo loop errors
Main damping Uncompensated
factor, used to oscillation caused by
eliminate oscillation other parameters
being high
Reduces following Stage does not
error during long reach or stay at the
motions and at stop desired stop position
Reduces following Negative following
error during the error during the
constant velocity constant velocity
phase of a motion phase of a motion.
Stage lags the
desired trajectory
Reduces following Negative following
error during the error during the
acceleration and acceleration phase of
deceleration phases a motion. Stage lags
of a motion the desired
trajectory
Value Set Too High
Servo loop too tight
and/or causing oscillation
Higher-frequency oscillation
and/or audible noise in the
motor caused by large ripple
in the motor voltage
Oscillations at lower frequency
and higher amplitude
Positive following error during
the constant velocity phase of
a motion. Stage is ahead
of the desired trajectory.
Positive following error during
the acceleration phase of a
motion. Stage is ahead of
the desired trajectory.
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