Newport ESP6000 User Manual page 12

Figure 4.1-18 - Position Status Menu ..............................................................................................................................4-14
Figure 4.1-19 - Help Menu ..............................................................................................................................................4-14
Figure 4.1-20 - About Screen ..........................................................................................................................................4-15
Figure 4.2-1 - Servo Tuning Main Screen ...................................................................................................................... 4-16
Figure 5.4-1 - VI Front Panel .........................................................................................................................................5-105
Figure 6.1-1 -Typical Motion Control System ..................................................................................................................6-1
Figure 6.2-1 - Position Error Test .....................................................................................................................................6-3
Figure 6.2-2 - High Accuracy for Small Motions .............................................................................................................. 6-4
Figure 6.2-3 - Low Accuracy for Small Motions ...............................................................................................................6-4
Figure 6.2-4 - Effect of Stiction and Elasticity on Small Motions ................................................................................... 6-5
Figure 6.2-5 - Error Plot ....................................................................................................................................................6-5
Figure 6.2-6 - Error vs. Motion Step Size ......................................................................................................................... 6-6
Figure 6.2-7 - Hysteresis Plot ............................................................................................................................................6-7
Figure 6.2-8 - Real vs. Ideal Position ...............................................................................................................................6-7
Figure 6.2-9 - Pitch, Yaw, and Roll Motion Axes ............................................................................................................. 6-8
Figure 6.2-10 - Pitch, Yaw and Roll ..................................................................................................................................6-8
Figure 6.2-11 - Wobble ......................................................................................................................................................6-8
Figure 6.2-12 - Position, Velocity, and Average Velocity ................................................................................................6-9
Figure 6.3-1 - Servo Loop ................................................................................................................................................6-11
Figure 6.3-2 - P Loop .......................................................................................................................................................6-12
Figure 6.3-3 - PI Loop ......................................................................................................................................................6-13
Figure 6.3-4- PID Loop ....................................................................................................................................................6-13
Figure 6.3-5 - Trapezoidal Velocity Profile .................................................................................................................... 6-14
Figure 6.3-6 - PID Loop with Feed-Forward ................................................................................................................... 6-14
Figure 6.3-7 - Tachometer-Driven PIDF Loop ................................................................................................................ 6-15
Figure 6.4-1- Trapezoidal Motion Profile ...................................................................................................................... 6-16
Figure 6.4-2 - Position and Acceleration Profiles .......................................................................................................... 6-16
Figure 6.4-3 - Origin Switch and Encoder Index Pulse ................................................................................................. 6-17
Figure 6.4-4 - Slow-Speed Origin Switch Search ........................................................................................................... 6-18
Figure 6.4-5 - High/Low-Speed Origin Switch Search ................................................................................................... 6-18
Figure 6.4-6 - Origin Search From Opposite Direction ................................................................................................. 6-18
Figure 6.5-1 - Encoder Quadrature Output .................................................................................................................... 6-19
Figure 6.5-2 - Optical Encoder Scale ..............................................................................................................................6-20
Figure 6.5-3 - Optical Encoder Read Head .................................................................................................................... 6-20
Figure 6.5-4 - Single-Channel Optical Encoder Scale and Read Head Assembly ....................................................... 6-20
Figure 6.5-5 - Two-Channel Optical Encoder Scale and Read Head Assembly .......................................................... 6-21
Figure 6.6-1 - Stepper Motor Operation ......................................................................................................................... 6-22
Figure 6.6-2 - Four-Phase Stepper Motor ....................................................................................................................... 6-22
Figure 6.6-3 - Phase Timing Diagram ............................................................................................................................ 6-23
Figure 6.6-4 - Energizing Two Phases Simultaneously ................................................................................................. 6-23
Figure 6.6-5 - Timing Diagram, Half-Stepping Motor .................................................................................................... 6-24
Figure 6.6-6 - Energizing Two Phases with Different Intensities ................................................................................. 6-24
Figure 6.6-7 - Timing Diagram, Continuous Motion (Ideal) ........................................................................................ 6-24
Figure 6.6-8 - Timing Diagram, Mini-Stepping .............................................................................................................. 6-24
Figure 6.6-9 - Single Phase Energization ....................................................................................................................... 6-25
Figure 6.6-10 - External Force Applied .......................................................................................................................... 6-25
Figure 6.6-11 - Unstable Point ........................................................................................................................................6-25
Figure 6.6-12 - Torque and Tooth Alignment................................................................................................................. 6-26
Figure 6.6-13 - DC Motor .................................................................................................................................................6-27
Figure 6.7-1 - Simple Stepper Motor Driver ................................................................................................................... 6-29
Figure 6.7-2 - Current Build-up in Phase ........................................................................................................................6-29
Figure 6.7-3 - Effect of a Short ON Time on Current ..................................................................................................... 6-29
Figure 6.7-4 - Motor Pulse with High Voltage Chopper ................................................................................................. 6-30
Figure 6.7-5 - DC Motor Voltage Amplifier .................................................................................................................... 6-30
Figure 6.7-6 - DC Motor Current Driver ......................................................................................................................... 6-31
Figure 6.7-7 - DC Motor Velocity Feedback Driver ........................................................................................................ 6-31
Figure 6.7-8 - DC Motor Tachometer Gain and Compensation .................................................................................... 6-32
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