Edwards STP Series Manuals

Manuals and User Guides for Edwards STP Series. We have 27 Edwards STP Series manuals available for free PDF download: Instruction Manual

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (167 pages)

Brand: Edwards | Category: Water Pump | Size: 7 MB

Table of Contents

Table of Contents
3
Introduction
11
Scope and Definitions
11
Applied Standards
12
Limited Warranty
13
Warranty Period
13
Item Warranted
13
Disclaimer
14
Spare Parts
14
Precautions for Safe Operation of the STP Pump
15
Usable Gases
15
Maintenance and Inspection Precautions
16
Labels
16
STP Pump Installation Warning Label
16
Hot Surface Warning Label
16
Heavy Product Caution Label
17
High Voltage Device Caution Label
17
Rotation Instruction Label
17
Operation Principle of the STP Pump
18
Cross Sectional View of the STP Pump
18
STP Pump Specification
20
Technical Data
21
STP Pump Specifications
21
Control Unit
22
External Appearance of the STP Pump
23
External Appearance of STP-Ix457
23
External Appearance of STP-Ix457C
24
External Appearance of STP-Ixu457
25
External Appearance of STP-Ixu457C
26
Label Affixing Positions
27
Installation of the Stp Pump
29
Precautions before Installation
29
Operating Environment
29
Environmental Requirements for Installation
30
Installation Area
31
Space Around the STP Pump
31
Space Around the STP Pump (with Air-Cooling Unit [Optional Accessory])
31
Bench
32
Insulation Test
32
Unpacking and Installation
33
Example of Lifting the STP Pump
33
Eyebolt Size
33
Example of Lifting the STP Pump (Horizontal Positioning)
34
Jack-Up the STP Pump
35
Control Unit Bottom Face
35
STP Pump with Eyebolts
36
Name and Function of each Part
37
Name and Function of the Pump
37
Configuration of the STP Pump
37
Pump Functions
37
Name and Function of the Control Unit
38
Control Unit
38
Control Unit Front Panel Functions
39
How to Install the STP Pump
40
Installation of the STP Pump to the Vacuum Equipment
40
Cleaning the Seal
41
STP Pump Installation Positions
42
Positions of the Outlet Port on the Horizontally
42
Secure the STP Pump
43
Tightening Torque of Bolt
43

Advertisement

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (177 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
3
Introduction
11
Scope and Definitions
11
Applied Standards
12
Limited Warranty
12
Warranty Period
12
Item Warranted
12
Disclaimer
13
Spare Parts
13
Precautions for Safe Operation of the STP Pump
14
Usable Gases
14
Maintenance and Inspection Precautions
15
Labels
15
STP Pump Installation Warning Label
15
Hot Surface Warning Label
15
Tip over Caution Label
16
Heavy Product Caution Label
16
High Voltage Device Caution Label
16
Water Caution Label
17
Rotation Instruction Label
17
Operation Principle of the STP Pump
18
STP Pump Specification
20
Technical Data
23
STP Pump Specifications
23
Maximum Gas Flow-Rate
24
Water Cooling Use Condition
24
Control Unit
25
Power Unit
26
External Appearance of the STP Pump
27
External Appearance of STP-Ixa2205C(V): VG250/ISO250F/ICF305
27
External Appearance of STP-Ixa2205Cp(V): VG250/ISO250F/ICF305
28
External Appearance of STP-Ixa2205Cip: VG250/ISO250F/ICF305
29
External Appearance of the Power Unit
30
External Appearance of Power Unit Ips-1200
30
Label Affixing Positions
31
Installation of the Stp Pump
33
Precautions before Installation
33
Operating Environment
33
Installation Area
35
Bench
36
Insulation Test
36
Unpacking
37
Unpacking the STP Pump
37
Example of Lifting the STP Pump
37
Eyebolt Size
37
Example of Lifting the STP Pump (Horizontal Positioning)
38
Name and Function of each Part
42
Name and Function of the Pump
42
Control Unit (Front Panel)
42
Power Unit (Connector Panel)
42
Power Unit (Front Panel)
42
(STP-Ixa2205C[V])
42
(STP-Ixa2205Cp[V]/Cip)
42
Pump Functions
42
Name and Function of the Control Unit
43
Control Unit Front Panel Functions
44
Name and Function of the Power Unit
45

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (163 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 5 MB

Table of Contents

Advertisement

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (173 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
7
Introduction
15
Scope and Definitions
15
Electromagnetic Compatibility
16
Limited Warranty
16
Item Warranted
16
Disclaimer
17
Spare Parts
17
Precautions for Safe Operation of the STP Pump
18
Usable Gases
18
STP Pump Installation Warning Label
19
Hot Surface Warning Label
19
Maintenance and Inspection Precautions
19
Labels
19
Heavy Product Caution Label
20
High Voltage Device Caution Label
20
Operation Principle of the STP Pump
21
STP Pump Specification
23
Technical Data
25
STP Pump Specifications
25
Maximum Gas Flow-Rate
27
Water Cooling Use Condition
28
Control Unit
29
External Appearance of STP-Is1607/Is1607C/Is1607B
31
External Appearance of the STP Pump
31
External Appearance of STP-Is1607S/Is1607Cs/Is1607Bs
32
Label Affixing Positions
33
Installation of the Stp Pump
35
Precautions before Installation
35
Operating Environment
35
Space Around the STP Pump
37
Installation Area
37
Bench
38
Insulation Test
38
Example of Lifting the STP Pump
39
- Eye Nut Size
  39
Unpacking and Installation
39
Example of Lifting the STP Pump (Horizontal Positioning)
40
STP Pump with Eyebolts
42
Configuration of the STP Pump
43
Control Unit (Front Panel)
43
- Pump Functions
  43
Name and Function of each Part
43
Name and Function of the Pump
43
Name and Function of the Control Unit
44
- Control Unit Front Panel Functions
  46
- Control Unit Front Panel Functions (Continued)
  47
Installation of the STP Pump to the Vacuum Equipment
48
How to Install the STP Pump
48
Cleaning the Seal
49

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (169 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 4 MB

Table of Contents

Table of Contents
3
Introduction
11
Scope and Definitions
11
Applied Standards
12
Limited Warranty
13
Warranty Period
13
Item Warranted
13
Disclaimer
14
Spare Parts
14
Precautions for Safe Operation of the STP Pump
15
Usable Gases
15
Maintenance and Inspection Precautions
16
Labels
16
STP Pump Installation Warning Label
16
Hot Surface Warning Label
16
Heavy Product Caution Label
17
High Voltage Device Caution Label
17
Operation Principle of the STP Pump
18
STP Pump Specification
20
Technical Data
21
STP Pump Specifications
21
Maximum Gas Flow-Rate
22
Water Cooling Use Condition
23
Control Unit
24
External Appearance of the STP Pump
26
External Appearance of STP-Ixr1606
26
Label Affixing Positions
27
Installation of the Stp Pump
29
Precautions before Installation
29
Operating Environment
29
Installation Area
31
Space Around the STP Pump
31
Bench
32
Insulation Test
32
Unpacking and Installation
33
Example of Lifting the STP Pump
33
Eyebolt Size
33
Example of Lifting the STP Pump (Horizontal Positioning)
34
STP Pump with Eyebolts
36
Name and Function of each Part
37
Name and Function of the Pump
37
Configuration of the STP Pump
37
Control Unit (Front Panel)
37
Pump Functions
37
Name and Function of the Control Unit
38
Control Unit Front Panel Functions
39
Control Unit Front Panel Functions (Continued)
40
How to Install the STP Pump
41
Installation of the STP Pump to the Vacuum Equipment
41
Cleaning the Seal
42

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (165 pages)

TURBOMOLECULAR PUMP

Brand: Edwards | Category: Water Pump | Size: 7 MB

Table of Contents

Table of Contents
3
Introduction
11
Scope and Definitions
11
Applied Standards
12
Limited Warranty
13
Warranty Period
13
Item Warranted
13
Disclaimer
14
Spare Parts
14
Precautions for Safe Operation of the STP Pump
15
Usable Gases
15
Maintenance and Inspection Precautions
16
Labels
16
STP Pump Installation Warning Label
16
Hot Surface Warning Label
16
Heavy Product Caution Label
17
High Voltage Device Caution Label
17
Operation Principle of the STP Pump
18
STP Pump Specification
20
Technical Data
21
STP Pump Specifications
21
Maximum Gas Flow-Rate
22
Water Cooling Use Condition
23
Control Unit
24
External Appearance of the STP Pump
26
External Appearance of STP-Is2207
26
External Appearance of STP-Is2207C
27
Label Affixing Positions
28
Installation of the Stp Pump
29
Precautions before Installation
29
Operating Environment
29
Installation Area
31
Space Around the STP Pump
31
Bench
32
Insulation Test
32
Unpacking and Installation
33
Example of Lifting the STP Pump
33
Eye Nut Size
33
Example of Lifting the STP Pump (Horizontal Positioning)
34
STP Pump with Eyebolts
36
Name and Function of each Part
37
Name and Function of the Pump
37
Configuration of the STP Pump
37
Control Unit (Front Panel)
37
Pump Functions
37
Name and Function of the Control Unit
38
Control Unit Front Panel Functions
40
Control Unit Front Panel Functions (Continued)
41
How to Install the STP Pump
42
Installation of the STP Pump to the Vacuum Equipment
42

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (118 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (120 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (63 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
9
Spare Parts
9
Precautions for Safe Operation of the STP Pump
10
Usable Gases
10
STP Pump Installation Warning Label
11
Hot Surface Warning Label
11
Maintenance and Inspection Precautions
11
Labels
11
Heavy Product Caution Label
12
Connector Caution Label
12
Caution Label
12
TMS Heater Caution Label
13
Prohibition of Gripping and Pulling Label
13
Water Cooling Pipe Connection Caution Label
14
Operation Principle of the STP Pump
15
Temperature Management System
16
Name of the STP Pump
17
Installation of the Stp Pump
19
Precautions before Installation
19
Operating Environment
19
Installation Area
21
Bench
22
Example of Lifting the STP Pump
23
Unpacking
23
Unpacking the STP Pump
23
Example of Lifting the STP Pump (Horizontal Positioning)
24
How to Install the STP Pump
26
Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
STP Pump Installation Positions
29
Secure the STP Pump
30
Precautions of Vacuum Piping
30
Vacuum Piping Method
31
Positions of the Cooling Water Port and Baking Heater
32
Connecting the Purge Port
32
Connecting the Water Cooling Pipe
32
Attaching a Baking Heater
33
Installation of the Air Cooling Unit
33
2.3.10 Installation of the TMS Unit
33
Installation of the Stp Control Unit
35
STP Control Unit
35
SCU-350 Series
35
Scu-800
36

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (63 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
9
Spare Parts
9
Precautions for Safe Operation of the STP Pump
10
Usable Gases
10
STP Pump Installation Warning Label
11
Hot Surface Warning Label
11
Maintenance and Inspection Precautions
11
Labels
11
Heavy Product Caution Label
12
Connector Caution Label
12
Caution Label
12
TMS Heater Caution Label
13
Prohibition of Gripping and Pulling Label
13
Water Cooling Line Notice Label
14
Operation Principle of the STP Pump
15
Temperature Management System
16
Name of the STP Pump
17
Installation of the Stp Pump
19
Precautions before Installation
19
Operating Environment
19
Installation Area
21
Bench
22
Example of Lifting the STP Pump
23
Unpacking
23
Unpacking the STP Pump
23
Example of Lifting the STP Pump (Horizontal Positioning)
24
How to Install the STP Pump
26
Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
STP Pump Installation Positions
29
Secure the STP Pump
30
Precautions of Vacuum Piping
30
Vacuum Piping Method
31
Positions of the Cooling Water Port and Baking Heater
32
Connecting the Purge Port
32
Connecting the Water Cooling Pipe
32
Attaching a Baking Heater
33
Installation of the Air Cooling Unit
33
2.3.10 Installation of the TMS Unit
33
Installation of the Stp Control Unit
35
STP Control Unit
35
SCU-350 Series
35
Scu-800/801
36

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (59 pages)

STP Series Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Table of Contents
3
1 Introduction

7
- Scope and Definitions
  7
- Applied Standards
  8
- Limited Warranty
  8
  - Warranty Period
    8
  - Item Warranted
    8
  - Disclaimer
    9
  - Spare Parts
    9
- Precautions for Safe Operation of the STP Pump
  10
  - Usable Gases
    10
- Maintenance and Inspection Precautions
  11
- Labels
  11
  - STP Pump Installation Warning Label
    11
  - Hot Surface Warning Label
    11
  - Heavy Product Caution Label
    12
  - Connector Caution Label
    12
  - Caution Label
    12
  - TMS Heater Surface Caution Label
    13
  - Rotation Instruction Label
    13
- Operation Principle of the STP Pump
  14
  - Cross Sectional View of the STP Pump
    14
- Temperature Management System
  15
- Name of the STP Pump
  16
  - Configuration of the STP Pump (Typical Pump Model)
    16
2 Installation of the Stp Pump

19
3 Installation of the Stp Control Unit

33
- STP Control Unit
  33
  - Scu-800
    33
  - Scu-750
    34
  - Scu-1400
    34
  - Scu-1500
    35
  - Scu-1600
    35
- Cable Connection
  36
  - STP Connection Cable
    36
    
    SCU-1400/SCU-1500/SCU-1600 STP Connection Cable
    36
    
    SCU-750/SCU-800 STP Connection Cable
    36
    
    Power Cable
    37
    
    SCU-1400/SCU-1500/SCU-1600 Power Cable
    37
    
    SCU-750 Power Cable
    37
    
    SCU-800 Power Cable
    37
- How to Connect the Cables
  38

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (63 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Table of Contents
3
Introduction
7
Scope and Definitions
7
Electromagnetic Compatibility
8
Limited Warranty
8
Item Warranted
8
Disclaimer
9
Spare Parts
9
Precautions for Safe Operation of the STP Pump
10
Usable Gases
10
STP Pump Installation Warning Label
11
Hot Surface Warning Label
11
Maintenance and Inspection Precautions
11
Labels
11
Heavy Product Caution Label
12
Connector Caution Label
12
Caution Label
12
TMS Heater Caution Label
13
Operation Principle of the STP Pump
14
Temperature Management System
15
Name of the STP Pump
16
Installation of the Stp Pump
19
Precautions before Installation
19
Operating Environment
19
Installation Area
21
Bench
22
Example of Lifting the STP Pump
23
Unpacking
23
Unpacking the STP Pump
23
Example of Lifting the STP Pump (Horizontal Positioning)
24
How to Install the STP Pump
26
Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
STP Pump Installation Positions
29
Secure the STP Pump
30
Precautions of Vacuum Piping
30
Vacuum Piping Method
31
Positions of the Cooling Water Port and Baking Heater
32
Connecting the Purge Port
32
Connecting the Water Cooling Pipe
32
Attaching a Baking Heater
33
Installation of the Air Cooling Unit
33
2.3.10 Installation of the TMS Unit
33
Installation of the Stp Control Unit
35
STP Control Unit
35
SCU-350 Series
35
Scu-800/801
36
Scu-800
36
Scu-801
36

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (63 pages)

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Table of Contents
3
Title Page

4
1 Introduction

7
- Scope and Definitions
  7
- Electromagnetic Compatibility
  8
- Limited Warranty
  8
- Item Warranted
  8
- Disclaimer
  9
- Spare Parts
  9
- Precautions for Safe Operation of the STP Pump
  10
- Usable Gases
  10
- Maintenance and Inspection Precautions
  11
- Labels
  11
- Operation Principle of the STP Pump
  15
  - Cross Sectional View of the STP Pump
    15
- Temperature Management System
  16
- Name of the STP Pump
  17
  - Configuration of the STP Pump (Typical Pump Model)
    17
2 Installation of the Stp Pump

19

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (30 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (37 pages)

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (37 pages)

Turbomolecular pump & control unit

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Table of Contents
3
Introduction
5
Scope and Definitions
5
General Description
6
User Connections and Indicator for the Ethercat Interface
7
Technical Data
9
Ethercat Network Connectors
9
USB Connector
9
Operating and Storage Data
9
Installation
11
Unpacking
11
Precautions before Installation
11
Ethercat Interface Panel
11
Ethercat in and out Connector
12
Mini-USB Connector
12
Operation
15
Setting Communication Parameters
15
Led's
16
DEVICE ID Rotary Switches
16
Taking and Releasing Control
17
Using Turbo Low Speed (Available for SCU-1600/1601 Only)
18
Rotation INHIBIT (Available for SCU-1600/1601 Only)
19
Protocol
20
Alternate PDO Mapping
20
Firmware Update over Ethercat
20
Maintenance
33
Inspect the Electrical Connections
33
Service, Spares and Accessories
35
Introduction
35
Service
35
Spares
35

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (33 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (23 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (31 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (23 pages)

Turbomolecular pump

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (27 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (27 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (25 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (25 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (23 pages)

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (10 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Edwards STP Series Instruction Manual

Edwards STP Series Instruction Manual (6 pages)

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents

Advertisement

Related Products

Edwards Categories

Water Pump Control Unit Industrial Equipment Measuring Instruments Controller

More Edwards Manuals