Edwards STP-XA2703 Series Instruction Manual
Turbomolecular pumps
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Also See for STP-XA2703 Series:
- Instruction manual (59 pages) ,
- Instruction manual (63 pages)
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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-XA2703/XA3203 Series
Pump Specific Information
Model name
STP-XA2703/XA3203 series
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STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
FOR SALES AND SERVICE PLEASE CALL:
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STP pump generic Instruction Manual
Supplied with STP pump
STP pump specific information
Supplied with STP pump
STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
Voltage
200 - 240 Va.c.
MT-66E-101-B
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Table of Contents
Related Manuals for Edwards STP-XA2703 Series
Summary of Contents for Edwards STP-XA2703 Series
- Page 1 Supplied with STP pump Instruction Manual (B): STP pump specific information (This Instruction Manual) Supplied with STP pump Instruction Manual (C): STP control unit Instruction Manual Supplied with STP control unit Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
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- Page 3 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...
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Page 5: Table Of Contents
STP-XA2703/XA3203 Series Turbomolecular Pump CONTENTS PAGE Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.2 Condition for the water-cooling unit External appearance of the STP pump Label affixing positions Accessories HOW TO SECURE THE STP PUMP TEMPERATURE MANAGEMENT SYSTEM (TMS) Configuration of the STP pump with the TMS TMS connection cable... - Page 6 TMS sensor cable TABLES Table Title Page Tightening torque of bolt Maximum torque predicted and recommended securing bolt for inlet port flange (STP-XA2703 series) Maximum torque predicted and recommended securing bolt for inlet port flange (STP-XA3203 series) Aug. 08 Issue 1-b...
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Page 7: Technical Data
STP-XA2703/XA3203 Series Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-XA2703/XA3203 series Extreme Advanced throughput type SCU-1500/SCU-1400 Applicable control unit: There are different performance specifications between SCU-1500 and SCU-1400. Refer to Section 1.1.1, "STP pump specifications" for the differences. Naming convention: •... -
Page 8: Stp Pump Specifications
STP-XA2703/XA3203 Series Turbomolecular Pump 1.1.1 STP pump specifications The values shown below are typical. They are not guaranteed. Item XA2703 series XA3203 series Flange size Inlet port flange VG250/ISO250F/ VG300/ISO320F/ ICF305 (DN250CF) ICF356 (DN320CF) Outlet port flange KF40 KF40 Pumping speed 2650 3200 2050... -
Page 9: Condition For The Water-Cooling Unit
(pumping speed: 1,300 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. Contact Edwards for details of additional cooling pipe. -
Page 10: External Appearance Of The Stp Pump
STP-XA2703/XA3203 Series Turbomolecular Pump External appearance of the STP pump (10) φA φ335 φ358 (7) *1 (6) *1 (13) φ326 (12) Figure 1 - STP-XA2703 series: VG250/ISO250F/ICF305 (DN250CF) Item Description Inlet ICF305 port VG250 ISO250F (DN250 Center of gravity flange Height of the purge port φA... -
Page 11: Stp-Xa3203 Series: Vg300/Iso320F/Icf356 (Dn320Cf)
STP-XA2703/XA3203 Series Turbomolecular Pump (10) φA φ335 φ358 (7)*1 (6)*1 (12) φ326 (11) Figure 2 - STP-XA3203 series: VG300/ISO320F/ICF356 (DN320CF) Item Description Inlet ICF356 Center of gravity port VG300 ISO320F (DN320 flange Height of the purge port φA Height of water cooling port 28.5 TMS sensor 415.5... -
Page 12: Label Affixing Positions
STP-XA2703/XA3203 Series Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 7. Figure 3 - Label affixing positions for the STP pump STP pump installation warning label Hot surface warning label Heavy product caution label Connector caution label STP pump/control unit caution label... -
Page 13: Accessories
STP-XA2703/XA3203 Series Turbomolecular Pump Accessories Item Q’ty Remarks Inlet port cover Outlet port cover STP connector cover Blank flange for purge port KF10 Clamping ring for purge port KF10 O-ring washer for purge port KF10 Instruction Manual (B) This manual Aug. - Page 14 STP-XA2703/XA3203 Series Turbomolecular Pump This page intentionally blank. Aug. 08 Issue 1-b...
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Page 15: How To Secure The Stp Pump
Use a material that has a tensile strength of 600N/mm or more. When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. Aug. 08 Issue 1-b... - Page 16 STP-XA2703/XA3203 Series Turbomolecular Pump The generated destructive torque depends on the presence of a torque reduction mechanism that can be built into the flange, according to the pump model and flange type. This mechanism, shown in Figure 5, is designed to absorb energy and also buffer the destructive torque. There are two installation methods for the pump, as shown in Figure 4.
- Page 17 STP-XA2703/XA3203 Series Turbomolecular Pump CAUTION Install the flange securing bolts in the proper position with the special square washer shown in Figure 5. Failure to do so may cause abnormal operation of the torque reduction mechanism and damage the pump. CAUTION When any internal abnormality/error results in high rotational torque, causing the torque reduction mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at...
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Page 18: Maximum Torque Predicted And Recommended Securing Bolt
STP-XA2703/XA3203 Series Turbomolecular Pump Pump model STP-XA2703 series Flange type ISO250F VG250 Toque reduction Not Equipped Equipped (standard) Not Equipped Equipped (optional) mechanism (standard) Destructive Torque 48.1 48.1 71.2 [kNm] Base (8 positions) securing Shape Standard Standard Standard Standard Standard... -
Page 19: Maximum Torque Predicted And Recommended Securing Bolt
STP-XA2703/XA3203 Series Turbomolecular Pump Pump model STP-XA3203 series Flange type ISO320F VG300/VG350 Toque reduction Not Equipped Not Equipped Equipped (optional) Equipped (optional) mechanism (standard) (standard) Destructive Torque 48.1 71.2 48.1 71.2 [kNm] Base (8 positions) securing Shape Standard Standard Standard Standard Standard Standard... - Page 20 STP-XA2703/XA3203 Series Turbomolecular Pump This page intentionally blank Aug. 08 Issue 1-b...
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Page 21: Temperature Management System (Tms)
STP-XA2703/XA3203 Series Turbomolecular Pump TEMPERATURE MANAGEMENT SYSTEM (TMS) WARNING The STP pump operates at high temperatures while the Temperature Management System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral equipment while TMS unit are in operation. Operators can burn hands. Moreover, NEVER remove the TMS cover while the Temperature Management System (TMS) unit is in operation. -
Page 22: Tms Connection Cable
STP-XA2703/XA3203 Series Turbomolecular Pump TMS connection cable The components of the TMS connection cables are as follows: (see Figure 7) Item Description Function Connector X5A For the STP control unit CON1 HEATER OUT connector For the TMS heater CON2 COOLING VALVE OUT connector For the TMS valve CON3 TC IN connector For the TMS sensor cable... -
Page 23: Tms Heater
STP-XA2703/XA3203 Series Turbomolecular Pump TMS heater The TMS heater heats the base of the STP pump. It’s fitted with the STP-XA2703CV/XA3203CV series at the factory. TMS valve The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP pump. -
Page 24: Installation Of The Tms Unit
STP-XA2703/XA3203 Series Turbomolecular Pump Installation of the TMS unit CAUTION DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other unstable environment. CAUTION DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables excessively. -
Page 25: Condition For The Tms Unit
STP-XA2703/XA3203 Series Turbomolecular Pump Condition for the TMS unit The values shown below are typical. They are not guaranteed. Item Condition Ambient temperature range °C 0 to 40 Storage temperature range °C -20 to 55 Input voltage Same voltage as the STP control unit 200 to 240 Vac Temperature control method Control ON/OFF of the TMS heater and cooling water Setting temperature... - Page 26 STP-XA2703/XA3203 Series Turbomolecular Pump This page intentionally blank Aug. 08 Issue 1-b...
- Page 27 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8822 International +81-47-458-8822 Facsimile: Domestic 047-458-8833 International +81-47-458-8833 Copyright 2008 Edwards Japan Limited. All rights reserved.