Connecting The Purge Port (For The Chemical Specific Pump, Type C); Figure 4.8 Connecting The Purge Port - Edwards STP-L301 Series Instruction Manual

STP-L301/L451 Series Instruction Manual
4.3.6

Connecting the Purge Port (For the Chemical Specific Pump, Type C)

When pumping reactive or corrosive gases, introduce a dry N gas or other gas into the STP
2
pump in order to protect the inside of the STP pump.
As shown in Figure 4.8, introduce a dry N gas through the electromagnetic vent valve, needle
2
valve or similar valve (must be prepared by the customer) from the purge port.
For instructions on how to introduce the purge gas, see Section 5.3, "Gas Suction".
◇ When not introducing the purge gas, close the purge port with the blank flange
(attached at delivery).

Figure 4.8 Connecting the Purge Port

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