Connecting The Purge Port; Connecting The Water Cooling Pipe; Positions Of The Cooling Water Port And Baking Heater - Edwards STP-XF803 Series Instruction Manual

2.3.6

Connecting the purge port

2
When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N
into the STP pump in order to protect the inside of the STP pump. Introduce a dry N
electromagnetic vent. valve, needle valve or similar valve (must be prepared by the customer) from
the purge port.
For instructions on how to introduce the purge gas, see Section 4.3.2.
Note: When not introducing the purge gas, close the purge port with the blank flange. Refer to
"TECHNICAL DATA" in the STP Pump Instruction Manual (B) for the position of a purge port.
2.3.7

Connecting the water cooling pipe

Secure the connection pipe to prevent water leakage and use cooling water under the conditions
provided in the STP Pump Instruction Manual (B). Install a secondly containment for liquids or a
water leak detector in the place (ex. cooling water ports) where cooling water may leak. Figure 19
shows the position of the cooling water ports. The STP pump in Figure 19 is a typical pump model.
Refer to the STP Pump Instruction Manual (B) for the configuration of each STP pump.
MT-00E-2A1-C
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STP Series Turbomolecular Pump
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2
1. Baking heater
Figure 19 - Positions of the cooling water port and baking heater
2. Cooling water port
gas or other gas
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gas through the
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