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Edwards STP Series Instruction Manual

Turbomolecular pumps
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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-A2203 Series
Pump Specific Information
Model name
STP-A2203 series
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
Voltage
200 - 240 Va.c.
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-41E-101-I
2023.08

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  • Page 1 STP pump consists of the three-volumed Instruction Manuals. Instruction Manual (A): STP pump generic Instruction Manual Instruction Manual (B): STP pump specific information (This Instruction Manual) Instruction Manual (C): STP control unit Instruction Manual 2023.08 Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 2 Declaration of Conformity This declaration of conformity is issued under the sole responsibility of the manufacturer: Edwards Japan Limited Documentation Officer 1078-1,Yoshihashi, Jana Sigmunda 300 Yachiyo-shi Lutín , 78349 Chiba, 276-8523 Czech Republic Japan T: +42(0) 580 582 728 documentation@edwardsvacuum.com...
  • Page 3 -Oct-2022 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Edwards Ltd Martin Tollner Petr Tochacek President, Semiconductor Chamber Solutions...
  • Page 4 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION RoHS (EU, UK): Material Exemption Information This product is compliant with the following Exemptions Annex III: • 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight • 6(c) Copper alloy containing up to 4% lead by weight •...
  • Page 5 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 六价铬 多溴联苯 多溴二苯醚 Part name 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 铸铝及铝合金制品 × 〇 〇 〇 〇 〇...
  • Page 6 The description of this product consists of the three-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...

  • Page 7: Table Of Contents

    STP-A2203 Series Turbomolecular Pump CONTENTS PAGE Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.2 Condition for the water-cooling unit External appearance of the STP pump Label affixing positions Accessories HOW TO SECURE THE STP PUMP When securing the inlet port with bolts When securing the inlet port flange with claw clamps When installing the damper in the inlet port flange...
  • Page 8 STP-A2203 Series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page STP-A2203 series: VG250/ISO250F/ICF305 Label affixing positions for the STP pump Bolt position for securing the flange Example of securing the STP pump (when securing the inlet port with bolts) Shape of reduced diameter shank bolts Example of securing the STP pump (when securing the inlet port flange with claw clamps) Example of securing the STP pump...

  • Page 9: Technical Data

    STP-A2203 Series Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-A2203 series High-throughput type SCU-1600/1601 Naming convention: • "C" following a pump model name indicates a corrosion resistant type (e.g. STP-A2203C). • "CV" indicates an enhanced corrosion resistant type with TMS (e.g.

  • Page 10: Stp Pump Specifications

    STP-A2203 Series Turbomolecular Pump 1.1.1 STP pump specifications The values shown below are typical. They are not guaranteed. Item A2203 series Flange size Inlet port flange VG250/ISO250F/ICF305 Outlet port flange KF40 Pumping speed 2,200 1,700 Compression ratio >10 2.5×10 Ultimate pressure Pa (Torr) ) order [after baking] Maximum gas flow-rate...

  • Page 11: Condition For The Water-Cooling Unit

    1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. Consult Edwards about conditions. *2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.

  • Page 12: External Appearance Of The Stp Pump

    STP-A2203 Series Turbomolecular Pump External appearance of the STP pump (A) With original TMS sensor connecter (B) With alternative TMS sensor connecter Figure 1 - STP-A2203 series: VG250/ISO250F/ICF305 MT-41E-101-I Page 4...
  • Page 13 STP-A2203 Series Turbomolecular Pump Inlet Item Description port VG250 ISO250F ICF305 Height of purge port flange φA Height of cooling water port Caster TMS sensor connector Optional accessory 373.5 383.5 413.5 Screw hole for casters TMS heater Optional accessory STP cable connector Outlet port flange Purge port *1 ISO...

  • Page 14: Label Affixing Positions

    STP-A2203 Series Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 7. Figure 2 - Label affixing positions for the STP pump STP pump installation warning label Hot surface warning label Heavy product caution label Connector caution label STP pump/control unit caution label...

  • Page 15: Accessories

    STP-A2203 Series Turbomolecular Pump Accessories Item Q’ty Remarks Inlet port cover Outlet port cover STP connector cover Blank flange for purge port KF10 Clamping ring for purge port KF10 O-ring washer for purge port KF10 Leg with a caster adjustable Instruction Manual (B) This manual MT-41E-101-I...
  • Page 16 STP-A2203 Series Turbomolecular Pump This page is intentionally blank. MT-41E-101-I Page 8...

  • Page 17: How To Secure The Stp Pump

    STP-A2203 Series Turbomolecular Pump HOW TO SECURE THE STP PUMP WARNING The STP pump is provided with a high-speed rotor. Any internal abnormality/error may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in rotational torque leading to personal injury or peripheral equipment damage.

  • Page 18: When Securing The Inlet Port With Bolts

    When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. When securing the inlet port with bolts Pump model...
  • Page 19 STP-A2203 Series Turbomolecular Pump Refer to Table 2 for the destructive torque in any pump abnormality and for the recommended type of securing bolt for inlet port flange. Secure the inlet port flange with the correct size bolts as specified in the inlet port flange standard. The destructive torque depends on the presence of a torque reduction mechanism that can be built into the flange, according to the pump model and flange type.

  • Page 20: Example Of Securing The Stp Pump

    STP-A2203 Series Turbomolecular Pump Vacuum equipment Inlet port flange Washer Torque reduction mechanism Bolt insert position Figure 3 - Bolt position for securing the flange (A) When the base is not secured (B) When the base is secured Recommended fitting bolt for flange Secure the base Figure 4 - Example of securing the STP pump (when securing the inlet port with bolts)

  • Page 21: Shape Of Reduced Diameter Shank Bolts

    STP-A2203 Series Turbomolecular Pump Refer to Figure 4 for the shape of Reduced Diameter Shank Bolts (R.D.S.B.) ISO_F flange VG/ICF flange Vacuum equipment Clearance made by cantering Pump flange Figure 5 - Shape of reduced diameter shank bolts Use Table 3 in conjunction with Figure 5. Ensure that the surface of the levelled and smoothed area (expressed by "D"...

  • Page 22: When Securing The Inlet Port Flange With Claw Clamps

    STP-A2203 Series Turbomolecular Pump When securing the inlet port flange with claw clamps Refer to Table 2 for the destructive torque. When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the destructive torque generated by the worst-case failure. To make the vacuum equipment withstand the destructive torque in pump abnormality, secure the base with either the 8 screws for legs or the 8 attached legs.

  • Page 23: When Installing The Damper In The Inlet Port Flange

    STP-A2203 Series Turbomolecular Pump When installing the damper in the inlet port flange CAUTION Use a damper only at the vertically upright position. CAUTION DO NOT remove the bolts and nuts attached to reinforce the damper. Refer to Table 2 for the destructive torque. When using a damper, secure the base with either the 8 screw-holes for legs or the 8 attached legs.
  • Page 24 STP-A2203 Series Turbomolecular Pump This page is intentionally blank. MT-41E-101-I Page 16...

  • Page 25: Temperature Management System (Tms)

    STP-A2203 Series Turbomolecular Pump TEMPERATURE MANAGEMENT SYSTEM (TMS) WARNING The STP pump operates at high temperatures while the Temperature Management System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral equipment while TMS unit are in operation. Operators can burn hands. The Temperature Management System (TMS) maintains the temperature of the turbomolecular pump by monitoring the temperature with temperature sensor in the base of the turbomolecular pump, and performing the TMS valve and TMS heater ON/OFF control.
  • Page 26 STP-A2203 Series Turbomolecular Pump STP control unit 5. TMS valve STP connection cable 6. TMS sensor cable TMS heater 7. TMS connection cable STP pump 8. Power cable Note: The shape of each part is an example. It varies according to types of pumps. MT-41E-101-I Page 18...

  • Page 27: Tms Connection Cable

    STP-A2203 Series Turbomolecular Pump TMS connection cable The components of the TMS connection cables are as follows: (see Figure 9) Item Description Function Connector X5A For the STP control unit TC IN connector For the TMS sensor cable Fuse (F2) For protection of the TMS valve (1.0 A) CON2 COOLING VALVE OUT connector For the TMS valve...

  • Page 28: Tms Heater

    STP-A2203 Series Turbomolecular Pump TMS heater The TMS heater heats the base of the STP pump. It’s fitted with the STP-A2203CV series at the factory. TMS valve The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP pump.

  • Page 29: Installation Of The Tms Unit

    STP-A2203 Series Turbomolecular Pump Installation of the TMS unit CAUTION DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other unstable environment. CAUTION DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables excessively.

  • Page 30: Connecting Tms Connection Cable To Stp Pump

    STP-A2203 Series Turbomolecular Pump 3.6.3 Connecting TMS connection cable to STP pump Refer to Figure 8. Connect the TMS connection cable to the STP pump as follows: 1. Loosen the screws on the metal fitting securing the connectors to the distribution box, and remove the hooks.

  • Page 31: Condition For The Tms Unit

    STP-A2203 Series Turbomolecular Pump Condition for the TMS unit Item Condition Ambient temperature range °C 0 to 40 Storage temperature range °C -20 to 55 Input voltage Same voltage as the STP control unit 200 to 240 Vac ±10 Allowable input voltage fluctuation Temperature control method Control ON/OFF of the TMS heater and cooling water...
  • Page 32 STP-A2203 Series Turbomolecular Pump This page is intentionally blank. MT-41E-101-I Page 24...
  • Page 33 For more information, contact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8836 International +81-47-458-8836 Facsimile: Domestic 047-458-8835 International +81-47-458-8835 Copyright 2023 Edwards Japan Limited. All rights reserved.

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