Edwards STP Series Instruction Manual
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Edwards STP Series Instruction Manual

Turbomolecular pumps
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MT-91E-001-0
Instruction Manual
STP Series Turbomolecular Pumps
STP-iXA4507 Series
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
2023.10
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.

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  • Page 1 Read through the Safety Precautions and each section of this Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. 2023.10 Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 4 China Material Content Declaration Hazardous Substances Part name Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) × 〇 〇 〇 〇 〇 Aluminium alloys × 〇 〇 〇 〇 〇 Brass pipe fitting ×...

  • Page 5: Table Of Contents

    STP-iXA4507 series Turbomolecular Pump CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions Electromagnetic compatibility Limited warranty 1.3.1 Item warranted 1.3.2 Disclaimer 1.3.3 Spare parts Precautions for safe operation of the STP pump 1.4.1 Usable gases Maintenance and inspection precautions Labels Operation principle of the STP pump STP pump specification...
  • Page 6 STP-iXA4507 series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page TMS unit 3.9.1 TMS unit specification 3.9.2 TMS heater 3.9.3 Connecting the TMS heater cable 3.9.4 TMS valve 3.9.5 Configuration of the STP pump with the TMS 3.9.6 Connecting the pump and TMS valve 3.10 Connecting to semiconductor equipment 3.10.1...
  • Page 7 STP-iXA4507 series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 5.3.4 Query command (in the RS232/RS485 single point connection) 5.3.5 Transmission data format 5.3.6 Frame control (checksum) 5.3.7 Error control 5.3.8 Transmission frame in RS485 multi-point connection 5.3.9 Control command in RS485 multi-point connection 5.3.10 Query command in RS485 multi-point connection 5.3.11...
  • Page 8 STP-iXA4507 series Turbomolecular Pump CONTENTS (CONTINUED) PAGE Section Title Page 7.1.6 Overheating inside the STP pump (MOTOR Overheat) 7.1.7 Overheating inside the control unit (CNT Overheat) 7.1.8 Overspeed 7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 125 7.1.10 Safety feature of the rotor blade temperature warning sensor (Option)
  • Page 9 STP-iXA4507 series Turbomolecular Pump ILLUSTRATIONS PAGE Figure Title Page Warning label of STP pump installation and Caution label for Heavy product Caution label of Heater removing prohibition and Warning label for hot surface Caution label for the high voltage devices Label for the rotational direction Notice label urging to use water-cooling Label related to connecting the water-cooling lines...
  • Page 10 STP-iXA4507 series Turbomolecular Pump TABLES PAGE Table Title Page Maximum gas flow-rate (STP-iXA4507C) Maximum gas flow-rate (STP-iXA4507CV) Maximum gas flow-rate (STP-iXA4507CV3) Maximum gas flow-rate (STP-iXA4507B) Maximum gas flow-rate (STP-iXA4507BV) Maximum gas flow-rate (STP-iXA4507BV3) Environmental requirements for installation Eye nut / Eye bolt size Pump functions Control unit front panel functions Tightening torque of the bolt...

  • Page 11: Introduction

    INTRODUCTION Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). You must use the STP pump as specified in this manual otherwise the protection provided by the equipment may be impaired.

  • Page 12: Electromagnetic Compatibility

    1. This warranty applies only to the product delivered from Edwards to the customer. 2. If any defect is found during this period, Edwards will, at its option, repair or recondition the product free of charge. The costs for repair or replacement of the product after the warranty period has passed will be at your own charge.

  • Page 13: Disclaimer

    STP-iXA4507 series Turbomolecular Pump 1.3.2 Disclaimer Edwards makes no warranty with respect to any damage occurred due to any of the following during the warranty period: 1. Handling, operation or maintenance other than that specified herein. 2. Failure to follow any of the warnings or cautions enumerated in this manual.

  • Page 14: Precautions For Safe Operation Of The Stp Pump

    1.4.1 Usable gases 1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the following gases, contact Edwards. • Gases including alkaline metals except Li gas. • Gases including Ga, Hg, In, or Sn.

  • Page 15: Maintenance And Inspection Precautions

    STP-iXA4507 series Turbomolecular Pump Maintenance and inspection precautions Perform any maintenance or inspection of the STP pump under the condition that no power is applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8, "MAINTENANCE AND INSPECTION".

  • Page 16: Caution Label Of Heater Removing Prohibition And Warning Label For Hot Surface

    STP-iXA4507 series Turbomolecular Pump Caution label of Heater removing prohibition and Warning label for hot surface The pump has TMS heater, which is mentioned in section 3.9.2, “TMS heater”. That is not removable. Therefore, do not remove that as “Caution label of Heater removing prohibition” mentioning.

  • Page 17: Notice Label Urging To Use Water-Cooling

    STP-iXA4507 series Turbomolecular Pump Notice label urging to use the water-cooling As this label mentions, while driving the pump, always run the water-cooling unit. If the pump is used without that, it may stop running to avoid overheat. For more information such as the way to connect the water-cooling unit, see section 3.9, “TMS unit”.

  • Page 18: Operation Principle Of The Stp Pump

    STP-iXA4507 series Turbomolecular Pump Operation principle of the STP pump Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum pumping. It is principally used for manufacturing and inspection equipment of semiconductors, flat panels, and solar batteries. The STP pump (Figure 8) is configured, so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction.
  • Page 19 STP-iXA4507 series Turbomolecular Pump 1. Oil-free Rotor blade (1) is supported by the magnetic bearing without any mechanical contact. Therefore, the STP pump requires no lubrication oil, unlike conventional turbomolecular pumps using ball bearings. 2. Low vibration The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the radial direction by 4 pairs of active magnetic bearings that consist of a radial sensor (3) and a radial electromagnet (4).

  • Page 20: Stp Pump Specification

    STP-iXA4507 series Turbomolecular Pump STP pump specification The external appearances, installation and unpacking ways are different depending on the STP pump model. Refer to the following: External appearance of the STP pump STP-iXA4507C / STP-iXA4507CV / STP-iXA4507CV3 STP-iXA4507B / STP-iXA4507BV / STP-iXA4507BV3 Naming convention: •...
  • Page 21 STP-iXA4507 series Turbomolecular Pump The display unit iDT-002 is available as an optional accessory with STP-iXA4507 series. The display unit operates the STP pump, confirms the pump status or sets various settings. (refer to Section 6.2, “Display unit” and the Instruction Manual of the "Display Unit iDT-002".) Display unit iDT-002 MT-91E-001-0 Page 11...
  • Page 22 STP-iXA4507 series Turbomolecular Pump This page is intentionally blank. MT-91E-001-0 Page 12...

  • Page 23: Technical Data

    Mass Ambient temperature range °C 0 to 40 Storage temperature range °C -25 to 55 Pumping speed, compression ratio, ultimate pressure and backing pressures are measured by Edwards Japan method. (Ultimate pressure is a value after baking.) MT-91E-001-0 Page 13...
  • Page 24 STP-iXA4507 series Turbomolecular Pump Maximum backing pressure is the pressure when the working pressure rises suddenly without flowing gas. Critical operating backing pressure is the pressure that allows continuous operation without flowing gas. If the purge gas flow rate is out of specification, the rotor blade temperature warning sensor may not function properly. Always introduce purge gas when process gas is present inside the pump to prevent product deposition on the magnetic bearing components.

  • Page 25: Maximum Gas Flow-Rate

    STP-iXA4507 series Turbomolecular Pump Maximum gas flow-rate 2.2.1 STP-iXA4507C/CV/CV3 Backing Backing Maximum gas flow-rate Cooling water Purge gas N pressure pump [℃] condition flow rate [Pa･m [SCCM] [Pa(Torr)] [L/min] Temperature: 4.90 2,900 >1,300 15 to 25 ºC (2.187) 8.4×10 6.59 3,900 >10,000 Flow rate:...

  • Page 26: Stp-Ixa4507B/Bv/Bv3

    STP-iXA4507 series Turbomolecular Pump 2.2.2 STP-iXA4507B/BV/BV3 Backing Backing Maximum gas flow-rate Cooling water Purge gas N pressure pump condition flow rate [℃] [Pa･m [SCCM] [Pa(Torr)] [L/min] Temperature: 4.90 2,900 >1,300 (2.187) 15 to 25 ºC 8.4×10 6.59 3,900 >10,000 Flow rate: (1.052) ±1.7×10 2.8 to 3.2 L/min...

  • Page 27: Water Cooling Use Condition

    STP-iXA4507 series Turbomolecular Pump 2.2.3 Water cooling use condition Use cooling water that fulfills the following conditions. Item Specification Pump unit 9/16-18UNF Port type 1/4”Tube fitting Control unit (Swagelok) Flow rate L/min 2.8 to 3.2 Water temperature °C 15 to 25 Water pressure MPa (kgf/cm Max 0.3 (Max 3)

  • Page 28: Control Unit

    STP-iXA4507 series Turbomolecular Pump Control unit The values shown below are typical. They are not guaranteed. Item STP-iXA4507C/B STP-iXA4507CV/CV3/BV/BV3 Input voltage 200 to 240 ±10 Allowable input voltage fluctuation Input power 1,600 max 2,000 max (without TMS unit) (with TMS unit) Input frequency 50/60 ±...

  • Page 29: External Appearance Of The Stp Pump

    STP-iXA4507 series Turbomolecular Pump External appearance of the STP pump Item Description PU: Pump unit CU: Control unit AC220V Outlet port flange KF50 Outlet port pipe 52.2mm (ID) Purge port KF10 Water cooling port 9/16-18UNF of the PU Water cooling port Tube fitting 1/4”...

  • Page 30: Label Affixing Positions

    STP-iXA4507 series Turbomolecular Pump Label affixing positions Refer to Section 1.6, "Labels" for the details of the labels 1 to 7. Warning label of STP pump installation and Caution label for Heavy product Caution label of Heater removing prohibition and Warning label for hot surface (2 pcs) Caution label for the high voltage devices Label for the rotational direction...

  • Page 31: Installation Of The Stp Pump

    And take measures according to SDS to prevent an accident caused by exhaust gas. CAUTION Chlorine or fluorine system gases can be used in the corrosion-resistant pumps. When you use the following gases, contact Edwards: • Gases including alkaline metals except for Li gas. •...
  • Page 32 • A place that is free of radiation exposure. • No high voltage discharge (more than 500 V) (If more than 500 V is discharged, contact Edwards). • A place at an altitude of 2,000 m or less. • A place indoors.

  • Page 33: Installation Area

    STP-iXA4507 series Turbomolecular Pump 3.1.2 Installation area Leave enough space for the following reasons in addition to the room for the STP pump: (see Figure • Space for maintenance and inspection. • Space for connecting cables. CAUTION DO NOT bend the cables excessively, and beware of any obstacles when installing the STP pump.

  • Page 34: Bench

    The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange. Note: When the external appearance of the STP pump is not in the manual, contact Edwards. 3.1.4 Insulation test DO NOT perform an insulation test on the control unit.

  • Page 35: Unpacking

    Unpacking the STP pump Check no damage on the outer package and no difference between the things delivered and the purchase order. If the STP pump is damaged, contact Edwards or their distributor. Note: Keeping the packaging materials, such as the corrugated fiberboard container and cushioning material for possible reuse, is recommended.
  • Page 36 STP-iXA4507 series Turbomolecular Pump Use lifting devices when installing the STP pump on the equipment. A device to jack up the STP pump must withstand a load of five times or more than the weight of the STP pump. Figure 13 - Jacking up the STP pump MT-91E-001-0 Page 26...
  • Page 37 STP-iXA4507 series Turbomolecular Pump When jacking up the bottom of the control unit, place the STP pump on a larger table than the base size [Figure 14 (A)]. Jacking up the bottom plate [Figure 14 (B)] may deform the plate and break the internal parts.

  • Page 38: Name And Function Of Each Part

    STP-iXA4507 series Turbomolecular Pump Name and function of each part 3.3.1 Name and function of the pump The STP pump in Figure 15 is a typical pump model. Refer to Section 2, "TECHNICAL DATA". Figure 15 - Configuration of the STP pump Item Description Function...

  • Page 39: Name And Function Of The Control Unit

    STP-iXA4507 series Turbomolecular Pump 3.3.2 Name and function of the control unit WARNING A hazardous live voltage may exist at the connectors that are marked with the warning sign . DO NOT touch the connecter because it may result in electric shock.

  • Page 40: Control Unit Front Panel Functions

    STP-iXA4507 series Turbomolecular Pump Item Description Function "MAIN POWER" switch Input power switch. NEVER stop the power supply to the STP pump while the STP pump is in rotation. "X1 AC POWER" connector AC input inlet For the AC power cable The input voltage range is between 200 to 240Va.c (50/60Hz) "X2 COM2"...

  • Page 41: How To Install The Stp Pump

    STP-iXA4507 series Turbomolecular Pump How to install the STP pump Install the STP pump to the inside of the vacuum equipment, as shown in Figure 17. WARNING An appropriate enclosure or a barrier that cannot be removed without using a tool should be provided to prevent operators from accessing the connection cables between the STP pump and its connectors.

  • Page 42: Cleaning The Seal

    STP pump. Take care not to scratch the flange of the STP pump. Check the flange for no scratches on the surface before installing the STP pump. If unsatisfactory, contact Edwards. MT-91E-001-0 Page 32...

  • Page 43: Stp Pump Installation Positions

    STP-iXA4507 series Turbomolecular Pump 3.4.2 STP pump installation positions The STP pump can be installed vertically, horizontally, upside-down and/or slanted. Vacuum equipment 4. Slanted Upside-down 5. Vertical Horizontal Figure 18 - STP pump installation positions When installing the STP pump in a horizontal or slanted position, it is recommended to install the outlet port at 135 °...

  • Page 44: Secure The Stp Pump

    Refer to Table 11 for torque tightening the bolts. Bolt size Q’ty Tightening torque (Nm) Table 11 - Tightening torque of the bolt Note: When using any securing method other than that specified in this manual, contact Edwards. MT-91E-001-0 Page 34...

  • Page 45: Destructive Torque And Recommended Securing Bolt For Inlet Port Flange

    STP-iXA4507 series Turbomolecular Pump Pump model STP-iXA4507 series Flange type VG300 VG400 Destructive Torque 79.3 79.3 [kNm] Base (4 positions) securing Shape Standard Standard Standard Standard Size Q’ty Carbon steel Carbon steel Material Stainless steel Stainless steel /Alloyed steel /Alloyed steel Strength 12.9 or more 12.9 or more...
  • Page 46 STP-iXA4507 series Turbomolecular Pump There are two installation methods for the pump to secure the inlet port flange, as shown in Figure 20 (i), and to secure the inlet port flange and base, as shown in Figure 20 (ii). Make sure to secure the inlet port flange of the pump with the recommended bolts, as described in Table 12, according to the installation method used.

  • Page 47: Screw Holes For Securing The Base Of The Control Unit

    STP-iXA4507 series Turbomolecular Pump 3.4.4 Screw holes for securing the base of the control unit CAUTION Use stainless steel bolts with a 70 or more tensile strength class when securing the base of the control unit. Figure 21 shows the position of the four screw holes for securing the base of the control unit. The fixing parts [Figure 20 (2,3)] must be prepared by the customer.

  • Page 48: Power Cables

    STP-iXA4507 series Turbomolecular Pump 3.4.5 Power cables WARNING Ensure that the electrical supply cable is suitably protected against earth (ground) faults and that the earth (ground) and "X1 AC POWER" are correctly connected. CAUTION The power cable is designed specifically for the STP pump. DO NOT use the power cable with other products.
  • Page 49 STP-iXA4507 series Turbomolecular Pump Control unit side Power side (Primary) 4pin (socket / straight) Black 1 M4-bolt (fixing screw) Black 2 Crimp-type terminal (M4) Yellow / Green Cover Clearance min. 1.5 mm Terminal block *1 Use material flammability: UL 94V-0 *2 Use the UL-recognized terminal block satisfied the following conditions;...

  • Page 50: How To Connect The Power Cable

    STP-iXA4507 series Turbomolecular Pump 3.4.6 How to connect the power cable WARNING Follow the below when installing the STP pump, or connecting or disconnecting cables. The primary power must be off (switch the MAIN POWER "OFF"). And isolate (Lockout/Tagout) the vacuum equipment from the electrical energy source, water, gas, and other energy sources.

  • Page 51: Precautions For Vacuum Piping

    STP-iXA4507 series Turbomolecular Pump Precautions for vacuum piping CAUTION DO NOT open the flange to atmospheric air while the STP pump runs. The STP pump cannot normally work if atmospheric air flows into it. Install valves to shut off (Lockout / Tagout) purge gas N and cooling water.

  • Page 52: Connecting The Purge Port

    STP-iXA4507 series Turbomolecular Pump Connecting the purge port When pumping reactive or corrosive gas, including hydrogen, introduce a dry N gas or other gas into the STP pump to protect the inside of the STP pump. Introduce a dry N gas through the electromagnetic valve, needle valve, or similar valve (must be prepared by the customer) from the purge port to isolate (Lockout/Tagout) the purge gas N...

  • Page 53: Connecting The Water Cooling Pipes

    STP-iXA4507 series Turbomolecular Pump Connecting the water cooling pipes Secure the water cooling pipes to prevent water leakage and use cooling water under the conditions provided in Section 2.2.3, "Water cooling use condition". It is recommended to connect the water cooling pipes according to the direction (IN side / OUT side) in Figure 25.

  • Page 54: Attaching A Baking Heater

    STP-iXA4507 series Turbomolecular Pump Attaching a baking heater WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot when baking. NEVER touch them with bare hands. CAUTION Check the rated voltage of the baking heater (optional accessory) This working voltage range is within ±10% of the rated voltage.

  • Page 55: Tms Unit

    STP-iXA4507 series Turbomolecular Pump TMS unit WARNING The STP pump runs at high temperatures while the Temperature Management System (TMS) unit works. NEVER touch or remove the heater cover. It causes electric shock or burns. NEVER touch the STP pump and its peripheral equipment while TMS unit is in operation.

  • Page 56: Tms Heater

    STP-iXA4507 series Turbomolecular Pump 3.9.2 TMS heater The TMS heater heats the base of the STP pump. The TMS heater is attached to the STP pump at our factory (with the cover). 3.9.3 Connecting the TMS heater cable The TMS heater cable is attached to the STP pump at our factory. A fuse is set in the TMS heater cable of the STP-iXA4507 series.

  • Page 57: Configuration Of The Stp Pump With The Tms

    STP-iXA4507 series Turbomolecular Pump 3.9.5 Configuration of the STP pump with the TMS Figure 27 shows the wiring and piping of the three-way valve type. STP pump 5. TMS heater cable (with cover) TMS heater (with cover) 6. TMS valve cable TMS valve 7.

  • Page 58: Connecting The Pump And Tms Valve

    STP-iXA4507 series Turbomolecular Pump 3.9.6 Connecting the pump and TMS valve The control unit is always water-cooled. For Three-way valve type [A-2], [B-2] and Two-way valve type [C] in Figure 28, two water supply lines are required. Connect the pump and TMS valve according to Figure 28. [A-1] Three-way valve A type [A-2] Three-way valve A type (One supplying system)

  • Page 59: Connecting To Semiconductor Equipment

    STP-iXA4507 series Turbomolecular Pump 3.10 Connecting to semiconductor equipment The STP pump becomes a component system when installed on semiconductor equipment. Consider the following when designing semiconductor equipment. 3.10.1 Connecting to power The STP pump must be connected to the main power of the semiconductor equipment electrical distribution system with a circuit breaker (Rated current 15 A).
  • Page 60 STP-iXA4507 series Turbomolecular Pump This page is intentionally blank. MT-91E-001-0 Page 50...

  • Page 61: Operation

    Take measures according to SDS to prevent an accident when using toxic, reactive, or combustible gases. CAUTION Chlorine or fluorine system gases can be used in the corrosion-resistant pumps. When you use the following gases, contact Edwards: • Gases including alkaline metals except for Li gas. •...

  • Page 62: How To Introduce A Purge Gas

    STP-iXA4507 series Turbomolecular Pump 4.1.2 How to introduce a purge gas CAUTION When pumping reactive or corrosive gas, including hydrogen, introduce a purge gas to protect the inside of the STP pump. Otherwise, it may result in product damage. Connect a needle valve or a similar part to the purge port and introduce dry N gas or other gas to purge the gas (see Section 3.6, "Connecting the purge port").

  • Page 63: Baking The Stp Pump

    STP-iXA4507 series Turbomolecular Pump Baking the STP pump WARNING The surfaces of the STP pump and its peripheral equipment will become extremely hot. Never touch them with bare hands. CAUTION The TMS unit and the baking heater cannot be used together simultaneously. Bake the vacuum equipment and STP pump to attain much less pressure and reduce the exhaust time.

  • Page 64: Before Starting The Stp Pump

    STP-iXA4507 series Turbomolecular Pump Before starting the STP pump CAUTION NEVER connect or disconnect any cables while the power is ON. NEVER turn the primary power OFF (turn the MAIN POWER "OFF") while the STP pump is in rotation. DO NOT release the inlet port flange or outlet port flange into the atmosphere while the STP pump rotates.

  • Page 65: Confirmation Before Starting

    STP-iXA4507 series Turbomolecular Pump 4.4.1 Confirmation before starting After completing the installation, piping, leakage test of the STP pump, and wiring of the power cables, the STP pump is ready to start. Confirm the below before the STP pump starts. 1.

  • Page 66: Powering On/Off

    STP-iXA4507 series Turbomolecular Pump Powering ON/OFF 4.5.1 Powering ON Turn "ON" the "MAIN POWER" switch on the control unit. If there is no error, the magnetic bearings work, and the rotor levitates (POWER ON state). The "STATUS" LED flashes green in 1.6 second period (Levitation state).

  • Page 67: Status" Led

    STP-iXA4507 series Turbomolecular Pump "STATUS" LED The STP pump operation status is indicated by the colors and flashing patterns of the "STATUS" LED. If the flashing pattern is different from any pattern shown in Figure 30, there is a possibility of failure.

  • Page 68: Second Speed Option

    STP-iXA4507 series Turbomolecular Pump Second speed option When the second speed option is enabled, the second rating speed can be set independently of the normal rating speed setting. Either the second or normal rating speed can be selected by I/O remote input or serial communication port.

  • Page 69: Operating The Tms Unit (For Use With The Tms Unit)

    STP-iXA4507 series Turbomolecular Pump Operating the TMS unit (for use with the TMS unit) 4.9.1 Before starting Check the following items before starting: 1. Check that the TMS valve cable is securely connected to the "X3 VALVE" connector on the control unit.
  • Page 70 STP-iXA4507 series Turbomolecular Pump This page is intentionally blank. MT-91E-001-0 Page 60...

  • Page 71: Serial Communication Protocol

    STP-iXA4507 series Turbomolecular Pump SERIAL COMMUNICATION PROTOCOL Introduction STP-iXA4507 series has a serial RS232/RS485 compliant interface. It can make operating the STP pump and checking information of the STP pump, such as a running state with software. The STP pump has the serial ports for connecting the user application, STP-Link (optional accessory), or the display unit iDT-002 (optional accessory).

  • Page 72: Connection And Setting Up

    STP-iXA4507 series Turbomolecular Pump Connection and setting up 5.2.1 Signal connection 1. Serial Port COM2 (X2 COM2 connector) The serial port COM2 is available for serial communication using RS232 or RS485 protocol. When using a user application, connect it to this port. Connect the connector X2 (D-Sub 9 pin, socket type) to a PC according to Table 16.

  • Page 73: Connecting The Rs485

    STP-iXA4507 series Turbomolecular Pump 5.2.2 Connecting the RS485 Make sure the following when using the serial port COM2 with RS485. • A connection condition is 1 on 1 (single point connection) or 1 on N (multi-point connection). Up to 32 SIMs can be connected with the multi-point connection. •...

  • Page 74: Communication Parameter Setting

    STP-iXA4507 series Turbomolecular Pump 5.2.3 Communication parameter setting The factory setting of COM2 is shown in Table 17. Use the STP-Link (optional accessory) or the display unit iDT-002 (optional accessory) to set communication parameters. Communication Factory setting PC setting example parameter Baud rate 9,600 bps...

  • Page 75: Serial Communication Timeout Setting

    STP-iXA4507 series Turbomolecular Pump 5.2.5 Serial communication timeout setting If the signal on the input operation port is interrupted for a certain period during acceleration or normal operation, the STP pump detects a failure and stops. The time setting of the failure detection is user-definable.

  • Page 76: Recommended Items About Communication Cable Installation

    STP-iXA4507 series Turbomolecular Pump 5.2.6 Recommended items about communication cable installation Noise generated by many factors such as types or lengths of cables, communication speed, and other communication devices may cause communication failure with a serial port. It is very difficult to prevent a communication failure completely.

  • Page 77: Example Of Cable Installation In Metallic Duct

    STP-iXA4507 series Turbomolecular Pump • DO NOT bundle a communication line with a protective earth line or a power line. Moreover, keep away a communication line from a noise source as much as possible. • To prevent radio frequency noise, place a ferrite core on both ends of the communication cable. Electromagnetic interference caused by radiofrequency noise (150 kHz to 1 GHz) affects communication.
  • Page 78 STP-iXA4507 series Turbomolecular Pump • DO NOT insert or remove a communication cable during a communication device or the STP pump's power is turned ON. If the communication line is applied by surge voltage from a potential difference between communication interfaces or static electricity, communication interface circuits may break down. Communication failure frequently occurs if the communication interface circuit is broken.

  • Page 79: Protocol Specifications

    STP-iXA4507 series Turbomolecular Pump Protocol specifications 5.3.1 General description In the STP serial communication protocol, a SIM(s) receives communication commands transmitted from a PC (Figure 39-1), and sends a response following the communication commands (Figure 39- 2). The communication commands from a PC transmit a text message (ASCII text) assigned to each function.

  • Page 80: Standard Transmission Frame

    STP-iXA4507 series Turbomolecular Pump 5.3.2 Standard transmission frame The transmission frame has a single block or multiple transmission blocks. The transmission block consists of a start control character, data block Numbers (3 digits), a message (up to 255 characters), an end control character, and a checksum (LRC). The following table shows the transmission frame if the message transmission character string is C Transmission frame when a message is below 255 characters (n<=255): 5+n+1 5+n+2...
  • Page 81 STP-iXA4507 series Turbomolecular Pump Transmission frame when data is transmitted with one block (a message is less than 256 characters): Designate the control command on a PC first. <- Less than 256 chr. -> PC->SIM Stx Sp CHR C Etx LRC SIM->PC Ack or Nak Parameter characters are less than 254 characters (n<...

  • Page 82: Query Command

    STP-iXA4507 series Turbomolecular Pump 5.3.4 Query command (in the RS232/RS485 single point connection) A query command is used to read the pump operation state and setting values. The first character of the query command in the RS232/RS485 single point connection is "?" (HEX code "3F"), and the subsequent characters are ASCII characters corresponding to the respective function code and parameter.

  • Page 83: Transmission Data Format

    STP-iXA4507 series Turbomolecular Pump 5.3.5 Transmission data format The data value is 16 bit signed hexadecimal value coded ASCII text. Example: 12090 on decimal equals 2F3A on hexadecimal. 5.3.6 Frame control (checksum) The transmission frame is controlled by the odd number parity check. First, LRC is initialized to FF Next, LRC is calculated by EXCLUSIVE-OR (XOR) of all the frame bytes containing "Stx", "Etb", "Etx"...
  • Page 84 STP-iXA4507 series Turbomolecular Pump The network frame number is specified as 1 to 127 by 16 bit signed hexadecimal value coded ASCII to identify the SIM. Examples: A Network frame ID character and number in the multi-point connection ASCII Network frame No "1" ASCII Network frame No "100"...

  • Page 85: Control Command In Rs485 Multi-Point Connection

    STP-iXA4507 series Turbomolecular Pump 5.3.9 Control command in RS485 multi-point connection The control command to a SIM for a pump operation or a setting change transmitted is specified below. The first character is "Sp" (space character, HEX code "20"). And the next ASCII characters correspond to the function code and parameter.

  • Page 86: 5.3.10 Query Command In Rs485 Multi-Point Connection

    STP-iXA4507 series Turbomolecular Pump Next, when the preceding SIM->PC character is "Ack", the PC continues instructing the following control command (the 2nd block). PC->SIM @ F Stx 0 Etx LRC SIM->PC Ack or Nak The parameter characters are less than 510 characters (n< 510) when a message is less than 512 characters.

  • Page 87: 5.3.11 Broadcasting Command In Rs485 Multi-Point Connection

    STP-iXA4507 series Turbomolecular Pump The parameter characters are less than 254 characters (n< 254) when the message is less than 256 characters. Then if the preceding SIM->PC character is "Ack", the instructed query command is executed, and the SIM returns the following response (1st block). PC->SIM Ack or Nak SIM->PC @ F...

  • Page 88: 5.3.12 Application Note

    STP-iXA4507 series Turbomolecular Pump 5.3.12 Application note Noise generated by many factors such as the type or length of cable, communication speed, and different communication devices may cause communication failure with a serial port. It is very difficult to prevent a communication failure completely. The followings are the methods to create tool applications with redundancy to noise.

  • Page 89: Example Of Command Sending During Answer Data Reply

    STP-iXA4507 series Turbomolecular Pump • Always check the LRC checksum of answer data. When the LRC checksum is incorrect, do not use the data. When incorrect data caused by noise is accepted, parameters might be set with unexpected values. In this case, the processing of an equipment application may judge that it is a communication failure.

  • Page 90: Example Of The Communication Cycle Process

    STP-iXA4507 series Turbomolecular Pump This procedure is not necessary Communication cycle start if TMP connection number = 1. RS485 multipoint connection? Address selection: First TMP Command sending process Succeeded? Answer receiving process Succeeded? Decode process Error process RS485 multipoint connection? Address selection: Next TMP Address check:...

  • Page 91: Example Of The Command Sending Process

    STP-iXA4507 series Turbomolecular Pump This procedure is not necessary if total block N = 1. Send command (N blocks) *1 When using RS485 to communicate, switch the PC side from sending state to receiving state within 5 msec. (Revision B: 50 msec.) *2 When using RS485 multipoint connection, also Block number: k = 1 an address is incorrect.

  • Page 92: Command Specifications

    STP-iXA4507 series Turbomolecular Pump Command specifications 5.4.1 Command list Function Command/Query Name Function code ReadMeas Reading the measured rotational speed Command Sending commands of START, STOP, RESET (These commands are valid only when it is sent to the serial port set as the input operation port.) ReadFailMess Reading the errors being detected...

  • Page 93: Readmeas

    STP-iXA4507 series Turbomolecular Pump 5.4.2 ReadMeas Function: Reading the measured rotational speed. Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx D Parameter 1 to 2 Etx LRC Parameter Item Data format Remarks [System reservation] 56-bits hexadecimal coded ASCII Measured rotational speed 16-bits hexadecimal (Unit: Hz)

  • Page 94: Readfailmess

    STP-iXA4507 series Turbomolecular Pump Parameter Item Data format Remark Pump operation command 8-bits hexadecimal Refer to Table 23 coded ASCII Pump operation command Value START STOP RESET Table 23 - Pump operation commands Example: Pump operation command: RESET operation = 4 = 04 Parameter ASCII 30 34...
  • Page 95 STP-iXA4507 series Turbomolecular Pump Parameter Item Data format Remarks The number of errors 8-bits hexadecimal Up to 80 errors coded ASCII 2 to 81 Error 1 8-bits hexadecimal coded ASCII … … Error 80 8-bits hexadecimal coded ASCII *1 The maximum number of errors may differ depending upon the software version of the STP pump. It is recommended that an application be designed as variable-length data.

  • Page 96: Error Message Values

    STP-iXA4507 series Turbomolecular Pump Error message Value Error message Value [System reservation] AMB Com. Failure [System reservation] [System reservation] TMS Higher Temp TMS Sensor Lost [System reservation] [System reservation] [System reservation] [System reservation] Power Failure [System reservation] Power Supply Fail [System reservation] Overspeed 1 [System reservation]...

  • Page 97: Error Message Values (Continued)

    STP-iXA4507 series Turbomolecular Pump Error message Value Error message Value [System reservation] Overspeed 4 [System reservation] [System reservation] [System reservation] [System reservation] [System reservation] WARNING: Pump Run Time Over [System reservation] WARNING: Pump Overload [System reservation] [System reservation] [System reservation] Other Warning 1 (C/U Restart) [System reservation] Other Warning 2 (FAN Warning)

  • Page 98: Readmodfonct

    STP-iXA4507 series Turbomolecular Pump 5.4.5 ReadModFonct Function: Reading the pump operation mode and the errors being detected; the data of errors being detected reads the same data as that of "ReadFailMess". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 82 Etx LRC Parameter...
  • Page 99 STP-iXA4507 series Turbomolecular Pump Pump operation mode Value Levitation No Levitation Acceleration Normal Deceleration (Brake) Autotest Tuning Tuning Complete [System Reservation] 9, 10, 11 Table 26 - Pump operation mode Example: Pump operation mode: = 1 = Levitation The number of errors: = 2 errors Error 1: = 13 = Disturbance Xh...

  • Page 100: Readversion

    STP-iXA4507 series Turbomolecular Pump 5.4.6 ReadVersion Function: Reading the software version Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 24 Etx LRC Parameter Item Data format Remarks 1 to 16 Control unit software version 8-bits hexadecimal coded ASCII 17 to 20 Motor driver software version...

  • Page 101: Readcounters

    STP-iXA4507 series Turbomolecular Pump 5.4.7 ReadCounters Function: Reading serial number, running time, and number of launch times Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 23 Etx LRC Parameter Item Data format Remarks 1 to 10 Control unit serial number ASCII character 11 to 20...

  • Page 102: Readsetpoint

    STP-iXA4507 series Turbomolecular Pump 5.4.8 ReadSetPoint Function: Reading the setting values of the speed set point and the TMS temperature; the "Speed Set Point" data is the same data as that of "ReadSpeedSetPoint". Transmission frame: PC->SIM Stx Etx LRC SIM->PC PC->SIM SIM->PC Stx Parameter 1 to 2...

  • Page 103: 5.4.10 Readstatus

    STP-iXA4507 series Turbomolecular Pump Parameter Item Data format Remark Motor temperature 16-bits hexadecimal (Unit: ºC) coded ASCII Example: Motor temperature: 0014hex = 20 ºC (68 ºF) Parameter ASCII 30 30 31 34 5.4.10 ReadStatus Function: Reading various settings; Remote mode, TMS function Transmission frame: PC->SIM Stx Etx LRC...

  • Page 104: 5.4.11 Readevents

    STP-iXA4507 series Turbomolecular Pump Remote mode Value I/ O Remote (X4) COM1 (EtherCAT) COM2 (X2) COM3 (X5 STP-LINK) [System reservation] 3, 4 Table 27 - Remote mode Example: Remote mode setting: 01 = I/O Remote TMS function setting: = ENABLE Parameter ASCII 30 31 30 30...

  • Page 105: 5.4.12 Setspeedsetpoint

    STP-iXA4507 series Turbomolecular Pump Example: When 3 errors have been detected in the past; The number of "Error Record": = 3 errors Error Record 1: = 15 = Disturbance Xb Error Record 2: = 13 = Disturbance Xh Error Record 3: = 18 = T.Cable Disconnected Error Record 4 to 10: = No error recorded...

  • Page 106: 5.4.13 Readspeedsetpoint

    STP-iXA4507 series Turbomolecular Pump Example: Speed Set Point: 0190 = 400 Hz = 24,000 rpm Parameter ASCII 30 31 39 30 5.4.13 ReadSpeedSetPoint Function: Reading the "Speed Set Point" value; this value is the same as "ReadSetPoint" parameter 1 (Speed Set Point). Transmission frame: PC->SIM Stx Etx LRC...

  • Page 107: 5.4.14 Readmodfonctwithwarning

    STP-iXA4507 series Turbomolecular Pump 5.4.14 ReadModFonctWithWarning Function: Reading the pump operation mode, errors and warnings being detected. Transmission Frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 82 Etx LRC Parameter Item Data format Remark Pump operation mode 8-bits hexadecimal See Table 25 coded ASCII...
  • Page 108 STP-iXA4507 series Turbomolecular Pump Warning message 16-bits hex value 0001 [System reservation] WARNING: Second Damage Limit 0002 WARNING: First Damage Limit 0004 WARNING: Imbalance X_H 0008 WARNING: Imbalance X_B 0010 WARNING: Imbalance Z 0020 WARNING: Pump Run Time Over 0040 WARNING: Pump Overload 0080 [System reservation]...
  • Page 109 STP-iXA4507 series Turbomolecular Pump Example: Pump operation mode: = 1 = Levitation WARNING being detected: 000C = 0004 OR 0080 "WARNING: First Damage Limit" and "WARNING: Imbalance X_H" The number of errors: = 2 errors Error 1: = 13 = Disturbance Xh Error 2: = 15 = Disturbance Xb Error 3 to 79:...

  • Page 110: 5.4.15 Readmeasvalue

    STP-iXA4507 series Turbomolecular Pump 5.4.15 ReadMeasValue Function: Reading the TMS temperature, motor temperature, motor current, measured rotational speed, and control unit temperature; the motor temperature value is the same temperature as "ReadMotorTemp", and the measured rotational speed value is the same as "ReadMeas" parameter 2 (Measured rotational speed).
  • Page 111 STP-iXA4507 series Turbomolecular Pump Example: TMS temperature: 0046 = 70 ºC (158ºF) Motor temperature: 0014 = 20 ºC (68ºF) Motor current: = 2.5A Measured rotational speed: 017C = 380 Hz = 22,800 rpm Control unit temperature: 0032 = 50 °C Parameter ASCII Parameter...

  • Page 112: 5.4.16 Readoptionfunc

    STP-iXA4507 series Turbomolecular Pump 5.4.16 ReadOptionFunc Function: Reading the setting value of the input operation port, TMS option, warning function, serial communication time out, and PROG OUT/PROG IN. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 15 Etx LRC *1 The HEX code of ASCII character ' = ' is "3D".
  • Page 113 STP-iXA4507 series Turbomolecular Pump Parameter Item Data format Remarks Serial communication time out 16-bits hexadecimal 60 sec. step setting (Unit: sec.) coded ASCII PROG OUT pin setting 8-bits hexadecimal coded ASCII PROG IN pin setting 8-bits hexadecimal coded ASCII [System reservation] 72-bits hexadecimal coded ASCII Parameter...
  • Page 114 STP-iXA4507 series Turbomolecular Pump Parameter Item Setting range Type A (ROTATION): PROG OUT pin setting Type B (ACCELERATION): Type C (BRAKE): Type D (FAIL N.O.): Type E (WARNING): Type F (not ROTATION): Type G (ACCEL./BRAKE): Type A (RESET): PROG IN pin setting Type B (RESET/2 SPEED EN): 02 Table 29 - Parameter setting value...

  • Page 115: 5.4.17 Setoptionfunc

    STP-iXA4507 series Turbomolecular Pump 5.4.17 SetOptionFunc Function: Changing the setting value of the input operation port, TMS option, warning function, serial communication time out, and PROG OUT/PROG IN. CAUTION There is an endurance limit of setting changes (no more than 24 times per day for about ten years). If this limit is exceeded, it not only may become impossible to change the setting but can also cause pump failure.
  • Page 116 STP-iXA4507 series Turbomolecular Pump Parameter Item Data format Remarks Pump Overload Warning 16-bits hexadecimal Default 03E8 Motor current setting coded ASCII (100.0%) Pump Overload Warning 16-bits hexadecimal Default 0000 Rotational speed setting coded ASCII (0.0%) Serial communication 16-bits hexadecimal Default 003C time out setting (Unit: sec.) coded ASCII (60 sec.)

  • Page 117: 5.4.18 Readcondition

    STP-iXA4507 series Turbomolecular Pump Parameter ASCII 46 46 30 30 30 30 30 33 45 38 30 30 Parameter ASCII 46 46 30 33 45 38 30 30 30 30 30 30 33 43 30 35 30 32 Parameter ASCII *1 Assign the parameter value the reading data of ReadOptionFunc (?=) or FFFF32003CFF *2 Assign the parameter value the reading data of ReadOptionFunc (?=) or F 5.4.18 ReadCondition...
  • Page 118 STP-iXA4507 series Turbomolecular Pump Example: 1. Pump model: 5354502D69584134353037202020202020202020 = STP-iXA4507 3. Damage point: = 50 Parameter "S" "T" "P" "–" "i" "X" "A" "4" "5" "0" ASCII 35 33 35 34 35 30 32 44 36 39 35 38 34 31 33 34 33 35 33 30 Parameter "7"...

  • Page 119: 5.4.19 Readeventswithtime

    STP-iXA4507 series Turbomolecular Pump 5.4.19 ReadEventsWithTime Function: Reading the "Error Record" with detection time. Transmission frame: PC→SIM Stx Etx LRC SIM→PC PC→SIM SIM→PC Stx Parameter 1 to 15 Etb LRC PC→SIM SIM→PC Stx Parameter 15 to 22 Etx LRC *1 The HEX code of ASCII character ' } ' is "7D". Parameter Item Data format...
  • Page 120 STP-iXA4507 series Turbomolecular Pump 1. In the case of time flag = 0 Parameter Item Data format Remarks Error Code 8-bits hexadecimal coded ASCII Time flag 8-bits hexadecimal coded ASCII Pump running time 32-bits hexadecimal Unit: minute coded ASCII Control unit running time 32-bits hexadecimal Unit: minute coded ASCII...
  • Page 121 STP-iXA4507 series Turbomolecular Pump Example: In the case of Disturbance X_H detection on September 13, 2007, 12: 34 Parameter ASCII 30 44 30 31 30 37 30 39 31 33 31 32 33 34 *3 System reservation Example (in the case of time flag = 0): When 3 errors have been detected in the past;...
  • Page 122 STP-iXA4507 series Turbomolecular Pump Parameter ASCII 31 32 30 30 30 30 30 30 30 34 42 30 30 30 30 30 30 37 30 38 Parameter ASCII 46 46 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 Parameter ASCII 46 46 30 30...
  • Page 123 STP-iXA4507 series Turbomolecular Pump Parameter ASCII 30 44 30 31 30 37 30 34 33 30 30 36 35 39 Parameter ASCII 31 32 30 31 30 36 31 32 30 31 31 35 30 38 Parameter ASCII 46 46 30 31 30 30 30 30 30 30 30 30 30 30 Parameter ASCII 46 46 30 31...

  • Page 124: 5.4.20 Setoptions

    STP-iXA4507 series Turbomolecular Pump 5.4.20 SetOptions Function: Changing the setting value of the optional function; the parameter n depends on the optional function. Transmission frame: PC->SIM Stx Parameter 1 to n Etx LRC SIM->PC PC->SIM SIM->PC Stx Etx LRC Parameter Item Data format Remark...

  • Page 125: Second Speed Selection

    STP-iXA4507 series Turbomolecular Pump Parameter Item Data format Remark Optional function 16-bits hexadecimal 0014 number coded ASCII Second speed setting 16-bits hexadecimal (Unit: Hz) coded ASCII ：DISABLE Second speed option 16-bits hexadecimal 0000 ：ENABLE setting coded ASCII 00FF *1 This value can be changed from half of the rated rotational speed to the rated rotational speed. When the parameter value is larger than the rated rotational speed, it is automatically set to the rated rotational speed.

  • Page 126: 5.4.21 Readoptions

    STP-iXA4507 series Turbomolecular Pump 5.4.21 ReadOptions Function: Reading the setting value of the optional function; the parameter n depends on the optional function. Transmission frame: PC->SIM Parameter 1 Etx LRC SIM->PC PC→SIM SIM→PC Stx Parameter 1 to n Etx LRC Parameter Item Data format...

  • Page 127: Second Speed Selection

    STP-iXA4507 series Turbomolecular Pump Example: Second speed setting : 00CA = 202 Hz = 12,120 rpm Second speed option setting : 0000 = DISABLE Selected speed value : 0194 = 404 Hz = 24,240 rpm (Normal rating speed setting) Parameter ASCII 30 30 31 34 30 30 43 41 30 30 30 30 30 31 39 34 5.4.21.2...

  • Page 128: Tms Temperature

    STP-iXA4507 series Turbomolecular Pump 5.4.21.3 TMS temperature Temperatures of input sensors and the heater/water valve output conditions of TMS can be read. And also, motor temperature and measured rotational speed can be read. Note: Valid only with TMS specification Parameter Item Data format Remark...
  • Page 129 STP-iXA4507 series Turbomolecular Pump Example: Measured temperature 1: = 110 ºC (230 ºF) Measured temperature 2: = 95 ºC (203 ºF) Measured temperature 3: = 76 ºC (169 ºF) Measured temperature 4: = 71 ºC (160 ºF) Output device 1 condition: = Heater ON/Water valve Open Output device 2 condition: = Heater ON/Water valve Open...
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  • Page 131: Stp-Link And Display Unit

    STP-iXA4507 series Turbomolecular Pump STP-LINK AND DISPLAY UNIT The STP-Link (optional accessory) and the display unit iDT-002 (optional accessory) are available with the STP pump. STP-Link The "STP-Link" is a Windows application for operating the STP pump, confirming the pump status or setting various settings.
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  • Page 133: Safety Functions

    STP-iXA4507 series Turbomolecular Pump SAFETY FUNCTIONS The STP pump has safety functions for various abnormities/errors. When abnormities/errors are detected, the "STATUS" LED flashes in red or orange (except during deceleration). If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures.

  • Page 134: Operation After A Power Recovery

    STP-iXA4507 series Turbomolecular Pump 7.1.2 Operation after a power recovery The STP pump continues decelerating, and power failure detection is reset automatically. At this time, the "STATUS" LED will change from red flash to orange flash. In the case of the I/O Remote interface, a failure signal is also simultaneously reset on FAILURE OUT pins, (14)-(33) and (15)-(33) of the "X4 REMOTE"...

  • Page 135: Motor Driver Overload (Drv Overload)

    STP-iXA4507 series Turbomolecular Pump 7.1.5 Motor driver overload (DRV Overload) The STP pump decelerates and stops when the STP pump does not attain the rated speed within about 30 minutes after starting, or the ACCELERATION state remains during operation for about 30 minutes, and the "STATUS"...

  • Page 136: Safety Feature Of The Rotor Blade Temperature Warning Sensor (Option)

    STP-iXA4507 series Turbomolecular Pump In the case of the I/O Remote interface, a failure signal also simultaneously outputs from the "X4 REMOTE" connector. Note: "TMS Lower Temp" is not detected for a certain time when the STP pump starts. The STP pump decelerates and stops when a TMS sensor cable fails. In this case, the heater and the cooling water unit are switched OFF, and the "STATUS"...

  • Page 137: Warning" Function

    STP-iXA4507 series Turbomolecular Pump "WARNING" function 7.2.1 "WARNING" function The STP pump has a WARNING function that is shown in Table 34. It notifies the timing that the STP pump needs to overhaul by doing a self-test. The "STATUS" LED flashes in orange only in the NORMAL and LEVITATION state when a warning is detected.

  • Page 138: Contents Of Warning Function

    STP-iXA4507 series Turbomolecular Pump Contents of WARNING function 7.3.1 First Damage limit Impact of the STP pump rotor onto the touch down bearing, such as an unexpected in-rush of air from outside or power failure, can damage the touch down bearing. The STP pump monitors these impacts and adds damage points when "Disturbance"...

  • Page 139: Pump Overload

    STP-iXA4507 series Turbomolecular Pump 7.3.4 Pump Overload "Pump Overload" is detected when the motor current exceeds the setting value until a certain period of time or the STP pump rotational speed drops below the set value until a certain period of time. The motor current and the rotational speed are monitored only in the NORMAL state.

  • Page 140: Other Warning

    STP-iXA4507 series Turbomolecular Pump 7.3.6 Other Warning Occurrence condition Pump operation Countermeasures Air-cooling fan failure Continuing operation. Contact our Service office. (FAN Warning) When operating continuously, the STP pump may overheat and detect overheating abnormality. The operation of the air-cooling Continuing operation.

  • Page 141: Warning Function Setting

    STP-iXA4507 series Turbomolecular Pump WARNING function setting The WARNING functions can be set to Enable or Disable. Set to "ENABLE" when using the WARNING function. Set to "DISABLE" to release each WARNING function after the WARNING is detected. The setting values of the "Pump Run Time Over" and "Pump Overload" are adjustable. "Pump Run Time Over"...

  • Page 142: Troubleshooting Immediately After Failure Occurs

    STP-iXA4507 series Turbomolecular Pump Troubleshooting immediately after failure occurs The STP pump has safety functions for various abnormities/errors. When abnormities/errors are detected, the "STATUS" LED flashes in red. In the case of the I/O Remote interface, a failure signal also simultaneously outputs from the "X4 REMOTE" connector. If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures.

  • Page 143: Troubleshooting

    STP-iXA4507 series Turbomolecular Pump Troubleshooting 7.6.1 Indication of "STATUS" LED (red flash) A safety function operates, and the "STATUS" LED flashes in red when an abnormality/error occurs while the STP pump is in operation. In the case of the I/O Remote interface, a failure signal also simultaneously outputs from the "X4 REMOTE"...
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  • Page 151: Indication Of "Status" Led (Green And Red Alternately)

    STP-iXA4507 series Turbomolecular Pump 7.6.2 Indication of "STATUS" LED (green and red alternately) If an abnormality/error is detected by self-test during the power ON operation, the "STATUS" LED flashes in green and red alternately. This is the indication of the STP pump or control unit failure. Contact Service Office.
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  • Page 153: Maintenance And Inspection

    And NEVER open any panel because it could cause shock, malfunction, or short circuit. Power OFF the peripheral equipment before performing maintenance and inspections. Only Edwards will repair, overhaul, and replace the maintenance parts. Contact our Service office. MT-91E-001-0...

  • Page 154: Cleaning

    • When the dust has accumulated in the ventilation port, wipe it off or vacuum it with the cleaner. Ensure that the dust must not enter the control unit. • If the label of the STP pump has been damaged, contact Edwards. The decontamination (overhaul) in the STP pump is executed in Service office.
  • Page 155 STP-iXA4507 series Turbomolecular Pump Opening the STP pump to the atmosphere may cause a chemical reaction in the deposit. Therefore, seal the inlet port, outlet port, and purge port so as to prevent the deposit from being exposed to the atmosphere as much as possible.

  • Page 156: Maintenance

    STP-iXA4507 series Turbomolecular Pump Maintenance 8.4.1 Recommended overhaul intervals If the STP pump has been used for a long time, accumulation of a deposit and deterioration/failure of the parts may cause the pump to stop running or fail. To efficiently and safely use the STP pump, periodically conduct an overhaul. By referring to the overhaul intervals based on the pump conditions of use as shown in the table below, develop an overhaul plan.

  • Page 157: Recommended Maintenance Intervals For Main Parts

    STP-iXA4507 series Turbomolecular Pump 8.4.3 Recommended maintenance intervals for main parts Internal components of the STP pump will be damaged from a gas load, heat, and corrosion when used long-term. Deterioration or abrasion of the internal parts of the STP pump will cause unexpected failures.

  • Page 158: Transporting For Repair Or Overhaul

    To prevent an accident during transportation, follow the "Return Procedure" instructions. CAUTION When returning the STP pump to Edwards, be sure to pack it well to prevent external damage. If the "Return Procedure" has not been satisfied, Edwards will not be responsible for any troubles. Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes.

  • Page 159: Storage And Disposal

    Safety Data Sheet (SDS) you obtain from the gas supplier. Dispose of the STP pump as industrial waste in accordance with all local and national safety and environmental standards. Note: Edwards will not be responsible for problems during or after disposal. MT-91E-001-0 Page 149...
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  • Page 161: Service, Spares And Accessories

    10.1 Introduction Edwards products, spares and accessories are available from Edwards companies and a network of distributors. A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor.

  • Page 162: Accessories

    STP-iXA4507 series Turbomolecular Pump 10.4 Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual STP Pump Instruction Manual This manual Supplied with STP pump Power cable Primary input power Standard cable length is 5 m.
  • Page 163 For more information, contact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8836 International +81-47-458-8836 Facsimile: Domestic 047-458-8835 International +81-47-458-8835 Copyright 2023 Edwards Japan Limited. All rights reserved.

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