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Edwards STP-L301 Series Instruction Manual

Turbomolecular pumps
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Instruction Manual
STP Series Turbomolecular Pumps
STP-L301/L451 Series
(First Edition - f)
VIEW OUR INVENTORY
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
FOR SALES AND SERVICE PLEASE CALL:
PTB SALES
:: 626.334.0500
T
sales@ptbsales.com
service@ptbsales.com
www.ptbsales.com
DATE SERVICED:
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-47E-001-F
Jan. 2008

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  • Page 1 Read through the Safety Precautions and each section of this Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. Jan. 2008 Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
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  • Page 3 Safety Precautions as well as the general safety rules (your country’s laws, regulations, safety standards and so on). If the equipment is used in a manner not specified by Edwards, the protection provided by the equipment may be impaired. SYMBOLS...
  • Page 4 STP-L301/L451 Series Instruction Manual ◇ The STP pump is provided with a high-speed rotor. Secure the STP pump according to the specified method. Failure to do so may lead to serious personal injury, product and/or peripheral equipment damage if any abnormality/error occurs in the rotor. ◇...
  • Page 5 STP-L301/L451 Series Instruction Manual ◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas may corrode the STP pump and damage it. ◇ A hazardous live voltage may exist at connector/terminal that marked DO NOT touch the terminal.
  • Page 6 STP-L301/L451 Series Instruction Manual ◇ Use the STP connection cable that has a label affixed STP-301/451 Series The use of different cables may result in product damage. ◇ Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing so may result in electric shock or product damage.
  • Page 7 STP-L301/L451 Series Instruction Manual INTRODUCTION Thank you very much for purchasing Edwards’ turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operation and...
  • Page 8 No part of this manual may be reproduced in any form by any means without prior written permission from Edwards. Edwards pursues a policy of continuing improvement in design and performance of this product. The right is, therefore, reserved to vary specifications and design without notice.

  • Page 9: Limited Warranty

    This WARRANTY applies to the customer to whom Edwards has delivered this product. WARRANTY PERIOD: Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards.
  • Page 10 STP-L301/L451 Series Instruction Manual SPARE PARTS: Fuse and air cooling fan for control unit Touch down bearing Heater Rubber of structure for reduce vibration level...

  • Page 11: Table Of Contents

    STP-L301/L451 Series Instruction Manual TABLE of CONTENTS SAFETY PRECAUTION INTRODUCTION LIMITED WARRANTY Precautions for Safe Operation of the STP Pump......1-1 Usable Gases........................1-1 Precautions on Maintenance and Inspection..............1-1 Labels..........................1-2 Operation Principle of the STP Pump ...........2-1 Unpacking ..................3-1 Unpacking the STP Pump and the STP Control Unit ............3-1 Accessories ........................3-1 Installation of the STP Pump............4-1 Name and Function of Each Part ..................4-1...
  • Page 12 STP-L301/L451 Series Instruction Manual 6.2.3 Installation Area ....................6-8 Attaching the STP Control Unit Front Panel to a Rack ............6-9 Cable Connection......................6-10 6.4.1 Name and Dimensions of Each Cable ..............6-10 6.4.2 How to Connect the Cables ................6-12 Connecting to Semiconductor Equipment ..............6-15 6.5.1 Connecting to Power..................6-15 6.5.2...
  • Page 13 STP-L301/L451 Series Instruction Manual 10.1 Power Failure ........................10-1 10.2 Abnormal State of Magnetic Bearing................10-3 10.3 Excessive Vibration .......................10-3 10.4 Motor Driver Overload ....................10-3 10.5 Overheating Inside the STP Pump ................10-3 10.6 Overheating Inside the STP Control Unit ..............10-3 10.7 Overspeed........................10-3 Troubleshooting, Maintenance and Inspection......
  • Page 14 STP-L301/L451 Series Instruction Manual TABLES Table 3.1 Accessories......................3-1 Table 3.2 Accessories for Chemical Specific Pump (Type C) ..........3-1 Table 4.1 Tightening Torque of Bolt ..................4-8 Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange ..........................4-9 Table 4.3 Number of Claw Clamps by Size of Flange............4-10 Table 6.1 Connecting the Power Cable.................6-13...
  • Page 15 STP-L301/L451 Series Instruction Manual FIGURES Figure 2.1 Cross Sectional View of the STP Pump ..............2-2 Figure 4.1 Configuration of the STP Pump................4-2 Figure 4.2 Installation of the STP Pump to the Vacuum Equipment.........4-5 Figure 4.3 STP Pump Installation Positions ................4-7 Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump ..4-7 Figure 4.5...
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  • Page 17: Precautions For Safe Operation Of The Stp Pump

    (STP-L301C/STP-L451C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Edwards. ◇ To prevent an accident, confirm the characteristics of gases to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.

  • Page 18: Labels

    STP-L301/L451 Series Instruction Manual Labels The following labels are affixed to the STP pump and STP control unit. Read the contents of the labels before operation. STP Pump Caution Label This label indicates precautions for operating the STP pump. Follow these precautions. STP Control Unit Caution Label This label indicates precautions for operating the STP control unit.
  • Page 19 STP-L301/L451 Series Instruction Manual Connector Caution Label This label indicates the lock of the connector This label instructs operators to prevent the connectors from being disconnected while the STP pump is in operation. 注意 CAUTION Lock 感電や故障の原因になり Improper connection may ます。...
  • Page 20 STP-L301/L451 Series Instruction Manual Rotational Direction Instruction Label This label indicates the rotational direction of the STP pump. The STP pump rotates in this direction. ROTATION Voltage Rating Label This label indicates the rated voltage of the STP control unit. Use voltage specified in this label.

  • Page 21: Operation Principle Of The Stp Pump

    STP-L301/L451 Series Instruction Manual Operation Principle of the STP Pump The STP-L301/L451 is a series of magnetically-levitated turbomolecular pumps, featuring the following: • Oil free • Low vibration, Low noise • High reliability The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction.

  • Page 22: Figure2.1 Cross Sectional View Of The Stp Pump

    STP-L301/L451 Series Instruction Manual Figure2.1 Cross Sectional View of the STP Pump...

  • Page 23: Unpacking

    Check the following before unpacking the STP pump and STP control unit. Check the package for bruises, breakage, wetness, and other. If there is any abnormality/error or it is judged necessary to return the product, contact Edwards or the selling agency. Check the contents of the package. See Section 3.2, "Accessories".
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  • Page 25: Installation Of The Stp Pump

    STP-L301/L451 Series Instruction Manual Installation of the STP Pump Name and Function of Each Part (1) Inlet Port Flange (ICF , VG , ISO, and other) Connected to the vacuum equipment (at the high vacuum side). (2) Outlet Port Flange (KF Connected to the inlet port side of the backing pump.

  • Page 26: Figure 4.1 Configuration Of The Stp Pump

    STP-L301/L451 Series Instruction Manual Figure 4.1 Configuration of the STP Pump...

  • Page 27: Precautions Before Installation

    ◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the STP-L301/STP-L451 pump or other models without anti-corrosion treatment. ◇ If the STP pump is used in an area with radiation, contact Edwards. Install the STP pump in a place meeting the following requirements: Ambient Temperature 0 to 40 °C...

  • Page 28: Installation Area

    DO NOT excessively bend the cables and beware of any obstacles when installing the STP pump. Also, leave enough space to install other cables without bending them excessively. ◇ The L-type STP connection cable is also offered. Contact Edwards if necessary. 4.2.3 Bench A bench must be prepared by the customer to secure the STP pump.

  • Page 29: How To Install The Stp Pump

    STP-L301/L451 Series Instruction Manual How to Install the STP Pump Install the STP pump to the vacuum equipment as shown in Figure 4.2. Figure 4.2 Installation of the STP Pump to the Vacuum Equipment...

  • Page 30: Cleaning The Seal

    STP-L301/L451 Series Instruction Manual 4.3.1 Cleaning the Seal Inspect the seals of the inlet and outlet port flanges for dirt or oil spots before installing the STP pump to the vacuum equipment. Take the following measures for cleaning the seals: Clean off with a pure gas.

  • Page 31: Stp Pump Installation Positions

    STP-L301/L451 Series Instruction Manual 4.3.2 STP Pump Installation Positions Upside-down Horizontal Vacuum Equipment Slanted Vertical Figure 4.3 STP Pump Installation Positions The STP pump can be installed vertically, horizontally, upside-down and slanted. However, it is recommended to mount the STP pump in the vertical position. The STP pump may be inclined by its own weight in other positions in the case of atmospheric release.

  • Page 32: How To Secure The Stp Pump

    Use a material that has a tensile strength of 600N/mm or more. ◇ When securing the base, use stainless steel securing bolts with a tensile strength class is 70 or more. ◇ When using any securing method other than that specified in this manual, contact Edwards.

  • Page 33: Table 4.2 Maximum Torque Predicted And Recommended Securing Bolt For Inlet Port Flange

    STP-L301/L451 Series Instruction Manual When securing the inlet port with bolts Refer to Table 4.2 for torque in pump abnormality and recommended securing bolts. Secure the inlet port flange with all of the bolt holes of the size specified in the Inlet Port Flange Standard.

  • Page 34: Table 4.3 Number Of Claw Clamps By Size Of Flange

    STP-L301/L451 Series Instruction Manual When securing the inlet port flange with claw clamps Refer to Table 4.2 for rotational torque. When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure.

  • Page 35: Figure 4.7 Example Of Securing The Stp Pump (When Installing The Damper In The Inlet Port Flange)

    STP-L301/L451 Series Instruction Manual When installing the damper in the inlet port flange Refer to Table 4.2 for rotational torque. In case of using a damper, secure the base with all eight screw-holes for legs or all eight attached legs. Follow "CAUTION" on page 4-8 about legs and bolts for securing the base.

  • Page 36: Vacuum Piping

    STP-L301/L451 Series Instruction Manual 4.3.4 Vacuum Piping ◇ DO NOT open the STP pump through the flange to atmospheric air while the STP pump is running. If atmospheric air flows into the STP pump, it may not function normally. ◇ Depending upon the type of the backing pump used, atmospheric air may reverse flow into the STP pump when the backing pump stops.

  • Page 37: Connecting The Ground Cable

    STP-L301/L451 Series Instruction Manual Piping at the Inlet Port Flange Attach the inlet port to the high vacuum side. Maximum working pressure: See Table 13.1, "Specifications of the STP Pump" Pressure at the inlet port flange applicable continuously Piping at the Outlet Port Flange Attach the outlet port to the inlet port flange of the backing pump (primary side pump).

  • Page 38: Connecting The Purge Port (For The Chemical Specific Pump, Type C)

    STP-L301/L451 Series Instruction Manual 4.3.6 Connecting the Purge Port (For the Chemical Specific Pump, Type C) When pumping reactive or corrosive gases, introduce a dry N gas or other gas into the STP pump in order to protect the inside of the STP pump. As shown in Figure 4.8, introduce a dry N gas through the electromagnetic vent valve, needle valve or similar valve (must be prepared by the customer) from the purge port.

  • Page 39: Baking, Cooling The Stp Pump And Gas Pumping

    STP-L301/L451 Series Instruction Manual Baking, Cooling the STP Pump and Gas Pumping Baking the STP Pump To attain a lower pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment and STP pump. ◇ The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking.

  • Page 40: Cooling The Stp Pump

    STP-L301/L451 Series Instruction Manual Cooling the STP Pump There are two methods for cooling: Water cooling and Air cooling. When performing baking, cool the STP pump. Also, when pumping gases, cool the STP pump as well. Select the best method which fits your vacuum equipment. 5.2.1 Water Cooling Method When cooling the STP pump by water cooling, use a water cooling unit (optional accessory).

  • Page 41: Air Cooling Method

    STP-L301/L451 Series Instruction Manual 5.2.2 Air Cooling Method When water cooling is not available, use an air cooling unit (optional accessory). Attach the air cooling unit using four screws at screw holes for legs (8-M8 , depth 16 mm). (For the positions of the screw holes for legs, see "External Appearance of the STP Pump") ◇...

  • Page 42: Gas Suction

    ◇ Chlorine or fluorine system gases can be used in the chemical specific pump (type C). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Edwards. ◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the STP-L301/STP-L451 pump or other models without anti-corrosion treatment.

  • Page 43: Figure 5.1 Attaching Positions Of The Cooling Unit And Baking Heater

    STP-L301/L451 Series Instruction Manual 警 告 WARNING 高 温 部 H o t s u r f ac e やけどします。 Can burn hands 　 　 触らないでくだ D0 not touch. さい。 Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater ◇...
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  • Page 45: Installation Of The Stp Control Unit

    STP-L301/L451 Series Instruction Manual Installation of the STP Control Unit Name and Function of Each Part 6.1.1 Front Panel (1) "START" Switch (momentary push button switch, green) STP pump rotating function (valid in MANUAL operation only) Press this switch to accelerate the STP pump when the LCD displays "LEVITATION"...

  • Page 46: Figure 6.1 Stp Control Unit Front Panel

    STP-L301/L451 Series Instruction Manual (6) LCD The LCD displays a pump's operation state, speed, or other messages. The LCD displays an error message when an abnormality occurs in the STP pump. (7) "ACCEL." LED (green LED) Illuminates during acceleration (ACCELERATION state). (8) "NORMAL"...

  • Page 47: Rear Panel

    STP-L301/L451 Series Instruction Manual 6.1.2 Rear Panel ◇ A hazardous live voltage may exist at connector/terminal that marked DO NOT touch the terminal. Doing so may result in electric shock. When operating connection/disconnection to connector, always power OFF the STP pump (Switch the breaker "OFF").

  • Page 48: Figure 6.2 Stp Control Unit Rear Panel

    STP-L301/L451 Series Instruction Manual (14) (21) (18) (15) (13) (16) (19) (20) (17) Figure 6.2 STP Control Unit Rear Panel...

  • Page 49: Top Panel

    STP-L301/L451 Series Instruction Manual 6.1.3 Top Panel (22) VR1 Volume For setting the rated speed of the STP pump. This volume is normally made ineffective (see Section 9.2, "Setting the Rated Speed"). (23) DSW-B Dip Switches For optional settings. Figure 6.3 shows the functions and the factory settings of the dip switches. <No.1 switch (Rated speed setting)>...

  • Page 50: Side Panel (Left Side)

    STP-L301/L451 Series Instruction Manual 6.1.4 Side Panel (Left side) (24) Air Cooling Fan For cooling the inside of the STP control unit. (24) Figure 6.4 STP Control Unit Side Panel (Left side)

  • Page 51: Precautions Before Installation

    STP-L301/L451 Series Instruction Manual Precautions before Installation 6.2.1 Operating Environment Install the STP control unit in a place meeting the following requirements: Ambient Temperature 0 to 40 °C Ambient Relative Humidity 30 to 95 % (no dew condensing) Environment A place free of exposure to direct sunlight. A place free of high humidity.

  • Page 52: Installation Area

    STP-L301/L451 Series Instruction Manual 6.2.3 Installation Area Leave enough spaces for the following in addition to the space for the STP control unit. • Space for maintenance and inspection • Space for inlet and outlet of air for cooling - Top and side: 50 mm or more - Bottom: 18 mm or more (height of the rubber foot)

  • Page 53: Attaching The Stp Control Unit Front Panel To A Rack

    STP-L301/L451 Series Instruction Manual Attaching the STP Control Unit Front Panel to a Rack The dimensions of the STP control unit front panel conform to EIA Standard. Therefore, this panel can be attached to any type of commercially-available racks. Attach the front panel unit to the rack according to the following steps: •...

  • Page 54: Cable Connection

    STP-L301/L451 Series Instruction Manual Cable Connection 6.4.1 Name and Dimensions of Each Cable STP Control unit Side STP Pump Side Ground Terminal( ) Ground Terminal( ) Crimp-Type Terminal Lug(M4 ) Crimp-Type Terminal Lug(M4 ) Yellow / Green Wire φ4.3(L≦20m) L≦20m: 4mm^2 φ6.5(L＞20m) Unit:mm L＞20m: 10mm^2...

  • Page 55: Figure 6.9 External Dimensions Of Stp Connection Cable

    STP-L301/L451 Series Instruction Manual STP Control Unit Side Power Side (Primary) Crimp-Type Terminal Lug(M4 ) 3pin (Socket) PE( ) 1.5mm^2 X 3 cores (Blown, Blue, Yellow/Grenn) a) without power plug STP Control Unit Side Power Side (Primary) Plug type: NEMA 6-15 GND( ) (250V,15A) 3pin (Socket)

  • Page 56: How To Connect The Cables

    STP-L301/L451 Series Instruction Manual 6.4.2 How to Connect the Cables ◇ When connecting/disconnecting cables, always power OFF the STP pump (switch the breaker "OFF"). Failure to do so may result in electric shock or product damage. ◇ With each connector, align the position of the guide key and insert the pin vertically so as not to bend it.

  • Page 57: Table 6.1 Connecting The Power Cable

    STP-L301/L451 Series Instruction Manual Connecting the Power (Primary Side) Cable Connect the power cable to the "AC POWER CON1" on the STP control unit rear panel as shown in Table 6.1. Secure the power cable connector using the cable fitting tool (see Figure 6.11). Table 6.1 Connecting the Power Cable CON1 Rear Panel...

  • Page 58: Figure 6.11 How To Secure The Power Cable

    STP-L301/L451 Series Instruction Manual Figure 6.11 How to Secure the Power Cable 6-14...

  • Page 59: Connecting To Semiconductor Equipment

    STP-L301/L451 Series Instruction Manual Connecting to Semiconductor Equipment The STP pump is a component system when installing to the semiconductor equipment. Consider the followings when designing the semiconductor equipment. 6.5.1 Connecting to Power The STP control unit receives its power from the semiconductor equipment electrical distribution system via a circuit breaker.
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  • Page 61: How To Start/Stop The Stp Pump

    STP-L301/L451 Series Instruction Manual How to Start/Stop the STP Pump ◇ NEVER connect or disconnect any cables while the power is ON. ◇ NEVER turn the primary power OFF (switch the breaker "OFF") while the STP pump is in rotation. ◇...

  • Page 62: Start Procedures

    STP-L301/L451 Series Instruction Manual Start Procedures Start the backing pump before or simultaneously with the start of the STP pump. Open the vacuum valve located at the outlet port flange side after starting the backing pump. ◇ DO NOT open the vacuum valve without operating the backing pump. Depending upon the type of the backing pump, doing so may cause a reverse flow of oil, which could contaminate the inside of the STP pump.

  • Page 63: Manual Operation

    STP-L301/L451 Series Instruction Manual There are two methods of operating the STP pump: MANUAL and REMOTE. Select one which fits your vacuum equipment. Manual Operation Slide the "MANUAL/REMOTE" changeover switch on the STP control unit front panel to the position opposite to "ON". At this time, the "REMOTE" LED is off. 7.4.1 Powering ON Switch "ON"...

  • Page 64: Starting The Stp Pump After Stopping

    STP-L301/L451 Series Instruction Manual 7.4.4 Starting the STP Pump after Stopping Press the "START" switch on the front panel to reaccelerate the STP pump. The STP pump can be reaccelerated even while it is stopping. ◇ The STP pump can be reaccelerated only when the LCD displays "LEVITATION" or "BRAKE: ***00rpm".

  • Page 65: Remote Operation (I/O Tb2)

    STP-L301/L451 Series Instruction Manual Remote Operation (I/O TB2) (Read through Section 8.2, "I/O TB 2 Terminal Block" before use) Slide the "MANUAL/REMOTE" changeover switch on the STP control unit front panel to "ON". The "REMOTE" LED illuminates. 7.5.1 Powering ON Switch "ON"...

  • Page 66: Powering Off

    STP-L301/L451 Series Instruction Manual 7.5.3 Starting the STP Pump after Stopping Perform the rotation procedures to reaccelerate the STP pump. See Section 7.5.2, "Starting/Stopping the STP Pump". The STP pump can be reaccelerated even while it is stopping. ◇ The STP pump can be reaccelerated by remote operation with any message displayed on the LCD.

  • Page 67: Remote Operation (Con4: Optional Accessory)

    STP-L301/L451 Series Instruction Manual Remote Operation (CON4: Optional Accessory) (Read through Section 8.3, "CON4 connector" befor use.) The CON4 connector (special accessory) is available in the STP-L301/L451 series in order to maintain compatibility with the remote specification of the previous model of the STP-200/300/400 series.

  • Page 68: Powering Off

    STP-L301/L451 Series Instruction Manual 7.6.3 Starting the STP Pump after Stopping Perform the rotation procedures to reaccelerate the STP pump. See Section 7.6.2 "Starting/Stopping the STP Pump". The STP pump can be reaccelerated even while it is stopping. ◇ The STP pump can be reaccelerated by remote operation with any message displayed on the LCD.

  • Page 69: Figure 7.1 Stp Pump Operation Procedures

    STP-L301/L451 Series Instruction Manual < LC D M essage> <Operation> <STP Pum p State> Breaker ON P021* Ver.*.** Version Execute Self Test Self test in progress SELF TEST Self test com pleted TEST C OM PLETE Levitation state Levitation state LEVITATION SELEC T Sw itch Set value of rated speed...
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  • Page 71: Remote Input/Output Signal Terminal Blocks

    STP-L301/L451 Series Instruction Manual Remote Input/Output Signal Terminal Blocks I/O TB1 Terminal Block This is a terminal block for remote output signals. Use it in accordance with Table 8.1 and Figure 8.1. This terminal block functions in both the MANUAL and REMOTE operations. The screw for the terminal is M3.5 Five abbreviations are used in the following table: N.O: Normal Open...
  • Page 72 STP-L301/L451 Series Instruction Manual Terminal Description Terminals for outputting the NORMAL OPERATION state (13) (15) signal. When the STP pump is in rated operation, the terminals between (16)-(13) are closed, and the terminals between (16)-(15) are opened. (16) Terminals for outputting the ACCELERATION state signal. (17) These terminals are closed when the STP pump is in N.O OUT...

  • Page 73: Figure 8.1 I/O Tb1 Remote Output Signal Terminal Block

    STP-L301/L451 Series Instruction Manual N.O: Normal Open N.C: Normal Close COM: Common Power input terminals for AC POWER the air cooling unit Terminals for the air cooling unit N.O OUT Not used POWER POWER ON state signal output terminals N.O OUT N.O OUT ALARM state signal ALARM OUT COM...
  • Page 74 STP-L301/L451 Series Instruction Manual Table 8.2 shows rated contacts for relays CR1, 3, 5, 7, and 8 (see Figure 8.1). Table 8.2 Rated Contacts for Relays CR1, 3, 5, 7, and 8 Induction Load Resistance Load (COSφ = 0.4) (COSφ= 1) (L/R =7 ms) 250 Vac 10 A 250 Vac 5 A...

  • Page 75: I/O Tb2 Terminal Block

    STP-L301/L451 Series Instruction Manual I/O TB2 Terminal Block This is a terminal block for remote input signals. Use it in accordance with Table 8.4 and Figure 8.2 (see Section 7.5, "Remote Operation (I/O TB2)"). This terminal block operates only during the REMOTE operations. Switch "OFF" the No.4 switch of the DSW-B with CON4.

  • Page 76: Figure 8.2 I/O Tb2 Remote Input Signal Terminal Block

    STP-L301/L451 Series Instruction Manual In case of 1) in Table 8.4 I/O TB2: Remote Input Signal Terminal Block In case of 2) in Table 8.4 Approx. 330 ohms +12V +12V In case of 3) in Table 8.4 Approx. 10 ohms 25VAC 12 to 48VDC Fuse...

  • Page 77: Con4 Connector (Optional Accessory)

    STP-L301/L451 Series Instruction Manual CON4 Connector (Optional accessory) This is a connector for remote input/output signals. This connector can maintain compatibility with the remote I/O signal of the STP-200/300/400 series. The remote input signal from the CON 4 connector is valid by setting No.4 switch of the DSW-B on the top panel to "ON".

  • Page 78: Figure 8.3 Con4 Remote Input Signal Connector

    STP-L301/L451 Series Instruction Manual STP Control Unit 24VDC Coil of RESET signal relay CR3 input pins (14) 0VDC 24VDC Coil of START signal relay CR1 input pins (15) 0VDC 24VDC Coil of STOP signal relay CR2 input pins (16) 0VDC Not Used (13) Figure 8.3 CON4 Remote Input Signal Connector...

  • Page 79: Remote Output Signals

    STP-L301/L451 Series Instruction Manual 8.3.2 Remote Output Signals Use output signals according to Table 8.7 and Figure 8.4. This output signal operates in both manual operation and remote operation. No.4 of the DSW-B DIP switch operates in "ON/OFF" both states. Table 8.7 CON 4 Connector (Remote output signal) Description Pins for outputting the STP pump REMOTE SELECTION state...

  • Page 80: Figure 8.4 Con4 Remote Output Signal Connector

    STP-L301/L451 Series Instruction Manual STP Control Unit Remote selection state signal output pins (17) Rotational state signal output pins (18) EMERGENCY OPERATION state signal output pins (19) CR10 FAILURE state signal output pins (20) OVER TEMPERATURE state signal output pins (21) (11) ACCELERATION state...

  • Page 81: Remote Cables (Optional Accessories)

    Remote cables for CON4 are provided as optional accessories. Remote cables are available in two types: single-side connector type and both-side connector type. Contact Edwards for details. Table 8.9 shows connections of remote cables of single-side connector type. Table 8.9 Remote Cable Connections (Single-Side Connector Type)
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  • Page 83: Adjustment Method

    STP-L301/L451 Series Instruction Manual Adjustment Method Tuning For the STP pump, tuning is required to align the position of levitation in the axial direction with the center of the rotor's movable range. The tuning can be performed simply by pressing the "RESET" switch. The tuning is completed before delivery, so it is not required before use.

  • Page 84: Figure 9.1 Tuning Procedures

    STP-L301/L451 Series Instruction Manual <Operation> <STP Pump State> < LCD Message > Breaker ON P021* ver.*.** Execute Self Test SELF TEST TEST COMPLETE Levitation State LEVITATION Press RESET RATING: 48000 rpm switch for 3 sec. PUMP TEMP: **℃ Tuning in Progress TUNING! Tuning Complete TUNING COMPLETE...

  • Page 85: Setting The Rated Speed

    STP-L301/L451 Series Instruction Manual Setting the Rated Speed The STP pump can be set (changed) to the required rated speed in the range of 25,000 to 48,000 rpm, in units of 500 rpm. The setting can be performed even during rotation of the STP pump.

  • Page 86: When Setting Dsw-B No.1 To On Before Powering On

    STP-L301/L451 Series Instruction Manual 9.2.2 When Setting DSW-B No.1 to ON before Powering On Set dip switch 1 of DSW-B to the ON position. Switch "ON" the breaker on the rear panel. After the STP pump completes the self test, the LCD displays the current rated speed in "RATING: ***00rpm".

  • Page 87: Figure 9.2 Lcd Message In Rated Speed Setting Mode

    STP-L301/L451 Series Instruction Manual <Operation> < LCD Message > DSW-B No.1 ON Change speed by turning VR1 volume Rated speed setting mode SET = ***00rpm Determine speed by SELECT Switch pressing “START” switch RATING: **000rpm Set value of rated speed SELECT Switch PUMP TEMP: **℃...
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  • Page 89: 10 Safety Functions

    STP-L301/L451 Series Instruction Manual 10 Safety Functions 10.1 Power Failure <Operation at a Power Failure> When the power voltage drops below 170 V (in case of 200 V specification) or below 85 V (in case of 100 V specification) due to power failure, the normal operation of the magnetic bearing is maintained using the regenerative energy of the rotating rotor (backup operation during a power failure).

  • Page 90: Table 10.1 States Of Leds And Remote Output Signals At Power Failure

    STP-L301/L451 Series Instruction Manual < Operation after a Power Recovery> MANUAL operation The STP pump continues decelerating even after a power recovery. Press the "START" switch to reaccelerate the STP pump. REMOTE operation When the START signal is input to the REMOTE input terminal at a power recovery to reaccelerate the STP pump.
  • Page 91 STP-L301/L451 Series Instruction Manual 10.2 Abnormal State of Magnetic Bearing When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor falls on the touch down bearing and stops. Simultaneously, the "FAILURE"...

  • Page 92: Table 10.3 Safety Functions

    STP-L301/L451 Series Instruction Manual Table 10.3 Safety Functions Operation state Reset by Abnormality REMOTE Probable causes of an of safety State of the STP pump RESET /Error indication output signal abnormality/error functions operation Power failure Power failure "FAILURE" "POWER "ALARM" The magnetic bearing Power failure.
  • Page 93 STP-L301/L451 Series Instruction Manual Operation state Reset by Abnormality REMOTE Probable causes of an of safety State of the STP pump RESET /Error indication output signal abnormality/error functions operation Overheating Temperature of "FAILURE" "PUMP "ALARM" The STP pump decelerates Abnormal baking Possible inside the STP the STP pump...
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  • Page 95 STP-L301/L451 Series Instruction Manual 11 Troubleshooting, Maintenance and Inspection The STP pump is provided with safety functions for various abnormalities/errors. When an abnormality occurs in the STP pump or STP control unit, a safety function operates with the "FAILURE" LED illuminates, and an alarm signal is output from remote output terminals.
  • Page 96 STP-L301/L451 Series Instruction Manual 11.2 When Error Message is displayed 11.2.1 Error Messages When an abnormality occurs, the "FAILURE" LED illuminates and the LCD displays an error message. If an ampersand "&" is shown at the right of the error message, it indicates that more than one error occurs.

  • Page 97: Table 11.1 Error Messages

    STP-L301/L451 Series Instruction Manual Table 11.1 Error Messages LCD Message Probable Cause Countermeasures Refer to CABLE Incorrect connection of the Connect the cable correctly. 6.4.2 DISCONNECT STP connection cable If the cable connector is not locked, lock it securely. Failure of the STP connection Contact Service office.
  • Page 98 STP-L301/L451 Series Instruction Manual LCD Message Probable Cause Countermeasures Refer to OVERLOAD Motor driver overload Insufficient pressure at Use the maximum 4.3.4 the inlet port working pressure or less. 13.1 Insufficient pressure at Use the allowable backing 4.3.4 the outlet port pressure or less.
  • Page 99 STP-L301/L451 Series Instruction Manual 11.2.2 Displaying Past Abnormalities/Errors and Accumulated Running-Time (This function is available with the STP pump of "Ver. 2.20" and after. How to check the version is shown on the next page.) The STP pump provides a function that the LCD displays a maximum of eight error messages that occurred in the past, and a total of running-time in hours (acceleration, rated speed operation, and deceleration).
  • Page 100 STP-L301/L451 Series Instruction Manual <How to check the version> The version of the STP pump is displayed on the LCD immediately after the main breaker is switched "ON". < LCD Message> Main breaker “ON” ***** ver.*.** Version SELFTEST TEST COMPLETE LEVITATION 11-6...

  • Page 101: Table 11.2 Troubleshooting After Powering On

    STP-L301/L451 Series Instruction Manual 11.2.3 Abnormalities when Powering ON Table 11.2 Troubleshooting after Powering ON Symptom Probable cause Countermeasures Refer to The "POWER" LED does Incorrect connection of Connect the power cable 6.4.2 not illuminate, when the power cable correctly. powering ON.

  • Page 102: Table 11.4 Troubleshooting While The Stp Pump Is Rotating

    STP-L301/L451 Series Instruction Manual 11.2.5 Other Abnormalities Table 11.4 Troubleshooting while the STP Pump is Rotating Symptom Probable causes Countermeasures Refer to The STP pump stops Check the past errors 11.2.2 referring to Section 11.2.2, "Displaying Past Abnormalities/Errors and Accumulated Running Time".
  • Page 103 STP-L301/L451 Series Instruction Manual 11.3 Maintenance and Inspection ◇ When performing maintenance and inspections of the STP pump, exhaust gases inside the STP pump thoroughly. Residual gases may cause an accident when removing the STP pump. Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.

  • Page 104: Table 11.5 Recommended Spare Parts

    STP-L301/L451 Series Instruction Manual 11.3.2 Replacing the Fuses ◇ Remove the probable causes of the blown fuse (Ex. a problem with the remote input signal, and other) before replacing the fuse. ◇ Always use specified and rated fuses. ◇ When you use parts other than those recommended in the above table, contact Service office.

  • Page 105: Table 11.6 Cleaning And Decontamination

    STP-L301/L451 Series Instruction Manual 11.3.3 Cleaning and Decontamination The method of cleaning and decontamination of the STP pump and STP control unit is shown below. Table 11.6 Cleaning and Decontamination Area Cleaning and Decontamination STP Pump Exterior Wipe with proper solvent (such as alcohol). Clean off with a pure gas when dust has accumulated in the connector.
  • Page 106 (Only vacuum pumping) Other use (2 years) Dependent on application, contact Edwards. The costs of replacing parts that need to be replaced because of deterioration or abrasion will be at your own charge. When overhaul of the STP pump or the STP control unit is needed, contact Service office.
  • Page 107 ◇ When returning the STP pump to Service office, be sure to pack it well to prevent external damage. If "Return Procedure" has not been satisfied, Edwards will not be responsible for any troubles. i) Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes.
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  • Page 109 STP-L301/L451 Series Instruction Manual 12 Storage and Disposal 12.1 Storage of the STP Pump When the STP pump is left unused over a long period (more than a few months), follow the precautions below: Close the inlet port of the STP pump and vacuum it using a backing pump. Introduce dry N gas or dry air from the outlet port or the purge port.
  • Page 110 Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier. ◇ Edwards is not responsible for problems during or after disposal. 12-2...

  • Page 111: Table 13.1 Specifications Of The Stp Pump

    STP-L301/L451 Series Instruction Manual 13 Specifications and Accessories 13.1 Specifications of the STP Pump Table 13.1 Specifications of the STP Pump Item STP-L301 series STP-L451 series Inlet port flange ICF152/VG100/ISO100 ICF203/VG150/ISO160 Flange size Outlet port flange KF25 Pumping speed >10 5×10...

  • Page 112: Figure 13.1 External Appearance Of The Stp Pump Stp (Stp-L301: Iso100)

    STP-L301/L451 Series Instruction Manual φ130 φ115 φ 180 φ 180 φ 156 99.5 φ 128 Figure 13.1 External Appearance of the STP Pump STP (STP-L301: ISO100) 13-2...

  • Page 113: Figure 13.2 External Appearance Of The Stp Pump (Stp-L451: Iso160)

    STP-L301/L451 Series Instruction Manual φ180 φ165 φ169 φ 180 φ 180 φ 156 99.5 φ 128 Figure 13.2 External Appearance of the STP Pump (STP-L451: ISO160) 13-3...

  • Page 114: Figure 13.3 Label Affixing Position For The Stp Pump

    STP-L301/L451 Series Instruction Manual turbomolecular pump STP- SERIAL NO: MANUFACTURING DATE : RATED SPEED WEIGHT: MANUFACTURED BY:Edwards Japan Limited. 1078-1,Yoshihashi,Yachiyo-shi,Chiba,Japan Figure 13.3 Label Affixing Position for the STP Pump 13-4...

  • Page 115: Table 13.2 Specifications Of The Stp Control Unit

    STP-L301/L451 Series Instruction Manual 13.2 Specifications of the STP Control Unit Table 13.2 Specifications of the STP Control Unit Item Specifications 100 to 120+/–10% (100 V specification) Input voltage 200 to 240+/–10% (200 V specification) At start: Input power Under rated operation: Input frequency 50/60 +/–2 Leakage current value...
  • Page 116 STP-L301/L451 Series Instruction Manual Item Specifications Safety functions Magnetic bearing abnormality/error detection (Rotor vibration: 100μm0-P or more) STP pump overheat detection (Motor: 110 °C or more) Driver overload detection (Motor overcurrent) Power failure detection (at 25,000 rpm or more: detects power failure of 2 sec.

  • Page 117: Figure 13.4 External Appearance Of The Stp Control Unit

    STP-L301/L451 Series Instruction Manual 4.85 4.85 Rubber foot (4Piece) (fixed wiht screw (M4) 209.7 4-φ3.6 34.85 34.85 29.85 29.85 Figure 13.4 External Appearance of the STP Control Unit 13-7...

  • Page 118: Figure 13.5 Label Affixing Positions For The Stp Control Unit

    STP-L301/L451 Series Instruction Manual Turbomorecular pump Control Unit MODEL: SCU- SERIAL No.: MANUFACTURING DATE: WEIGHT: MANUFACTURED BY: Edwards Japan Limited. 1078-1, Yoshihashi, Yachiyo-shi, Chiba, Japan 注意 CAUTION Figure 13.5 Label Affixing Positions for the STP Control Unit 13-8...
  • Page 119 UNIT CONVERSION TABLE Length inch 1.00x10 39.4 0.01 10.0 0.394 1x10 39.4x10 0.10 25.4x10 2.54 25.4 Mass 1.00x10 2.20x10 1x10 2.20 0.454 Pressure kgf/cm Torr 7.50x10 1.02x10 1.36x10 9.81 x 10...
  • Page 120 For more information, contact the nearest Service Office. Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8822 International +81-47-458-8822 Facsimile: Domestic 047-458-8833 International +81-47-458-8833 Copyright 2008 Edwards Japan Limited. All rights reserved.

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